A method of manufacturing a semiconductor package may include disposing, in a lower mold, a substrate strip in which a plurality of semiconductor chips are arranged in a horizontal direction, providing, in an upper mold, a release film to which a first encapsulant is attached, allowing the upper mold and the lower mold to be proximate to each other such that a first encapsulant is adjacent to an upper surface of each of the plurality of semiconductor chips, injecting a second encapsulant into a space between the upper mold and the lower mold, heating the first encapsulant and the second encapsulant to form a molded structure including a first encapsulating layer and a second encapsulating layer, allowing the upper mold and the lower mold to be spaced from each other such that the molded structure is separated from the release film, and cutting the molded structure.

Semiconductor packages, and methods for manufacturing semiconductor packages are provided. In one aspect, a method of manufacturing a semiconductor package includes stacking a plurality of semiconductor chips including a first semiconductor chip and a second semiconductor chip, the first semiconductor ship being offset from the second semiconductor ship to expose upper connection pads; forming a multilayered photoresist film to cover the plurality of semiconductor chips; forming a plurality of openings by exposing and developing the multilayered photoresist film; forming a plurality of conductive posts by filling the plurality of openings with a conductive material; removing the multilayered photoresist film; forming a molding encapsulant to surround the plurality of semiconductor chips and the plurality of conductive posts; and forming a wiring structure electrically connected to the plurality of conductive posts. The multilayered photoresist film comprises at least two layers having different chemical resistances and resolutions.

In a bonding process of a flip chip bonding method, a chip is bonded to contact pads of a substrate by composite bumps which each includes a raiser, a UBM layer and a bonding layer. Before the bonding process, the surface of the bonding layer facing toward the substrate is referred to as a surface to be bonded. During the bonding process, the surface to be bonded is boned to the contact pad and become a bonding surface on the contact pad. The bonding surface has an area greater than that of the surface to be bonded so as to reduce electrical impedance between the chip and the substrate.

A semiconductor package may include a first substrate; a second substrate on the first substrate; at least one chip structure on the second substrate; connection bumps below the first substrate; first bump structures between the first substrate and the second substrate; and second bump structures between the at least one chip structure and the second substrate, wherein each of at least a portion of the first bump structures and the each of at least a portion of the second bump structures includes a pillar bump, a solder ball connecting the pillar bump to one of the upper pads or upper terminals, and a barrier film at least partially covering a side surface of the pillar bump, and wherein a thickness of the barrier film decreases in a direction perpendicular to the side surface of the pillar bump in a portion adjacent to the solder ball.