A semiconductor device includes: a multilayered wiring layer including an insulation layer (30) and a diffusion prevention layer (21, 22, 23, 24) stacked alternately and including a wiring layer (11, 12, 13) internally; a gap section (50) disposed at least in a portion of the insulation layer (30); and a support section (60) disposed at least in a portion of the gap section (50) and configured to support the multilayered wiring layer.

The disclosure provides an electronic device and a manufacturing method thereof. The electronic device includes a package structure, a circuit structure, a bonding structure and an external element. The circuit structure is disposed on the package structure and is electrically connected to the package structure. The circuit structure has a recess. The bonding structure includes a first bonding pad and a second bonding pad. The second bonding pad is disposed in the recess, and the second bonding pad is disposed on the first bonding pad. The bonding structure is disposed between the circuit structure and the external element. The external element is electrically connected to the circuit structure through the bonding structure. A width of the first bonding pad is smaller than a width of the second bonding pad.

In a method of manufacturing a semiconductor device first conductive layers are formed over a substrate. A first photoresist layer is formed over the first conductive layers. The first conductive layers are etched by using the first photoresist layer as an etching mask, to form an island pattern of the first conductive layers separated from a bus bar pattern of the first conductive layers by a ring shape groove. A connection pattern is formed to connect the island pattern and the bus bar pattern. A second photoresist layer is formed over the first conductive layers and the connection pattern. The second photoresist layer includes an opening over the island pattern. Second conductive layers are formed on the island pattern in the opening. The second photoresist layer is removed, and the connection pattern is removed, thereby forming a bump structure.

The present disclosure provides a semiconductor structure and a manufacturing method thereof. A semiconductor structure includes a first chip. The first chip includes a first interconnect layer, a first conductive layer disposed on the first interconnect layer, a first dielectric layer covering the first conductive layer, and a first bonding pad embedded in the first dielectric layer and extending into the first conductive layer. The method of manufacturing the semiconductor structure includes the following operations. A first conductive layer is formed on a first interconnect layer. A first dielectric layer is formed on the first conductive layer and the first interconnect layer. The first dielectric layer is etched to form a first trench on the first conductive layer. A portion of the first conductive layer is etched to form a second trench. A first bonding pad is formed in the second trench.

Representative techniques and devices including process steps may be employed to mitigate the potential for delamination of bonded microelectronic substrates due to metal expansion at a bonding interface. For example, a metal pad having a larger diameter or surface area (e.g., oversized for the application) may be used when a contact pad is positioned over a TSV in one or both substrates.

An image sensor is provided. The image sensor includes a first semiconductor structure with photodiodes provided in a first semiconductor substrate, a first interconnection structure below the first semiconductor substrate, first bonding structures below the first interconnection structure and connected to the first interconnection structure, first shielding structures between the first bonding structures, and a first bonding insulating film surrounding lower regions of the first bonding structures and lower regions of the first shielding structures; and a second semiconductor structure a second interconnection structure provided in a second semiconductor substrate, second bonding structures contacting the first bonding structures on the second interconnection structure and connected to the second interconnection structure, second shielding structures between the second bonding structures and contacting the first shielding structures, and a second bonding insulating film surrounding upper regions of the second bonding structures and upper regions of the second shielding structures.

A connection panel unit and a display device including the same are disclosed. The connection panel unit includes a connection panel having a chip coupling region and a link region, a pad coupled to the chip coupling region, and a display driver chip coupled to the pad. The chip coupling region includes an input region and an output region spaced apart from each other. The pads include input pads coupled to the input region and output pads coupled to the output region. The ratio of pressure applied to the output pads to the pressure applied to the input pads may be between 0.9 and 1.1. The present disclosure can form an improved contact between a display driver chip and a connection panel.

A method of manufacturing a semiconductor package includes: forming through-vias extending from a front side of a semiconductor substrate into the substrate; forming, on the front side of the semiconductor substrate, a circuit structure including a wiring structure electrically connected to the through-vias; removing a portion of the semiconductor substrate so that at least a portion of each of the through-vias protrudes to a rear side of the semiconductor substrate; forming a passivation layer covering the protruding portion of each of the through-vias; forming trenches recessed along a periphery of a corresponding one of the through-vias; removing a portion of the passivation layer so that one end of each of the through-vias is exposed to the upper surface of the passivation layer; and forming backside pads including a dam structure in each of the trenches, the dam structure being spaced apart from the corresponding one of the through-vias.

Methods for forming semiconductor structures are provided. The method for forming a semiconductor structure includes forming a metal pad over a first substrate and forming a polymer layer over the metal pad. The method for forming a semiconductor structure further includes forming a seed layer over the metal pad and extending over the polymer layer and forming a conductive pillar over the seed layer. The method for forming a semiconductor structure further includes wet etching the seed layer using an etchant comprising H2O2. In addition, the step of wet etching the seed layer is configured to form an extending portion having a slope sidewall.

A semiconductor device includes a substrate having a first main surface and a second main surface opposite to the first main surface, and a first conductive layer including a first metal layer and a second metal layer, the first metal layer covering the second main surface, the second metal layer covering the first metal layer and including dendrites, wherein a via hole extending through the substrate and having an inner wall surface is formed in the substrate, and wherein the first metal layer, which is covered with the second metal layer, covers the inner wall surface.