A shipping vehicle includes a mobile transport device, an inflatable module, and a shipping box. The mobile transport device includes an inflatable receiving device and a gas connection port connected to the inflatable receiving device. The mobile transport device can be used for automated transportation or manual transportation, and can also be used as a transportation vehicle for transportation between factories or transportation to different areas outside the factories. The mobile transport device is used to carry the shipping box. The inflatable module continuously provides gas to the shipping box, which can effectively reduce the humidity inside the shipping box and greatly improve the problems of particles and VOC.

A technique includes: a process chamber configured to process a substrate; a transferor configured to transfer the substrate; a component relating to at least one of the process chamber or the transferor; a memory storing a plurality of operation events; a plurality of areas in each of which at least one of the process chamber, the transferor, or the component is provided; a detector provided in at least one of the plurality of areas and configured to be capable of detecting an operating sound of the component; and a controller is configured to be capable of controlling the component and the detector to select one area of the plurality of areas, which corresponds to each of the plurality of operation events, and to acquire detection data from the detector provided in the selected one area.

A system includes a robot configured to transfer either one of a substrate and an edge ring within a substrate processing system, a substrate aligner configured to adjust a rotational position of either one of the substrate or the edge ring relative to an end effector of the robot, and a carrier plate configured to support the edge ring. The robot is configured to retrieve the carrier plate with the end effector, retrieve the edge ring using the carrier plate supported on the end effector, and transfer the carrier plate and the edge ring to the substrate aligner.