A semiconductor package includes a first semiconductor chip including a first semiconductor layer, a first through-electrode that penetrates through the first semiconductor layer, a first bonding pad connected to the first through-electrode, and a first insulating bonding layer, and a second semiconductor chip on the first semiconductor chip and including a second semiconductor layer, a second bonding pad bonded to the first bonding pad, and a second insulating bonding layer bonded to the first insulating bonding layer, wherein the first insulating bonding layer includes a first insulating material, the second insulating bonding layer includes a first insulating layer that forms a bonding interface with the first insulating bonding layer and a second insulating layer on the first insulating layer, the first insulating layer includes a second insulating material, different from the first insulating material, and the second insulating layer includes a third insulating material, different from the second insulating material.

A method of manufacturing a semiconductor package may include: preparing a semiconductor wafer including rear pads and a rear insulating layer surrounding the rear pads, the rear insulating layer including first recesses spaced apart from the rear pads in a first lateral direction; preparing second semiconductor chips including front pads and a front insulating layer surrounding the front pads, the front insulating layer including second recesses spaced apart from the front pads in the first lateral direction; forming an air gap between the first recesses and the second recesses in a vertical direction by disposing the second semiconductor chips on the semiconductor wafer, the rear pads contacting the front pads; and bonding the rear insulating layer and the front insulating layer to each other and bonding the rear pads and the front pads to each other by performing a thermal compression process.

A method of manufacturing a display device includes forming a thin film transistor layer in an active area of a substrate, forming a metal layer on an edge area of the substrate, transferring first coating patterns to the edge area, the first coating patterns covering a portion of the metal layer corresponding to shapes of side surface lines, etching the metal layer to form the side surface lines, an upper surface of each of the side surface lines being covered by the first coating patterns, transferring a second coating pattern to the edge area, the second coating pattern covering a side surface of each of the side surface lines and the first coating patterns, and transferring light emitting elements to the thin film transistor layer. The second coating pattern includes openings corresponding to the first coating patterns in a plan view.

A device package comprising an integrated cooling assembly comprising a semiconductor device and a cold plate directly bonded to the semiconductor device. The cold plate comprises a top portion, sidewalls extending downwardly from the top portion to a backside of the semiconductor device, an inlet opening, and an outlet opening. The top portion, the sidewalls, and the backside of the semiconductor device collectively define a coolant chamber volume therebetween. The inlet opening and the outlet opening are disposed in the top portion and are in fluid communication with the coolant chamber volume. The inlet opening is disposed above a hotspot region of the semiconductor device.

A semiconductor device, including: a semiconductor chip having an element forming surface; an insulating layer formed on the element forming surface of the semiconductor chip; a barrier conductive layer formed on the insulating layer; a pad wiring layer including a plurality of conductive layers, one of the plurality of conductive layers including an eaves portion protruding to an outward direction; a bonding member that is bonded to the pad wiring layer and supplies electric power to an element of the element forming surface; and a coating insulating film that is selectively formed on the insulating layer below the eaves portion, exposes an upper surface of the insulating layer to a peripheral region of the pad wiring layer, and coats both an upper surface and a side surface of an end portion of the barrier conductive layer.

A semiconductor device assembly including a first semiconductor die having a first dielectric region and a first bond pad that are disposed on a first side of the first semiconductor die; a second semiconductor die having a second dielectric region and a second bond pad that are disposed on a second side of the second semiconductor die; and a hybrid bonding interface between the first side of the first semiconductor die and the second side of the second semiconductor die, the hybrid bonding interface including a gap free metal-metal bonding region between the first and the second bond pads and a gap free dielectric-dielectric bonding region between the first and the second dielectric regions, wherein the dielectric-dielectric bonding region includes a nitrogen gradient with a concentration that increases with proximity to the metal-metal bonding region.

A device comprises a substrate) of a first material with a surface, which is modified by depositing a bi-layer nanoparticle film. The film includes a nanoparticle layer of a second material on top of and in contact with surface, and a nanoparticle layer of a third material on top of and in contact with the nanoparticle layer of the second material. The nanoparticles of the third material adhere to the nanoparticles of the second material. The substrate region adjoining surface comprises an admixture of the second material in the first material. A fourth material contacts and chemically/mechanically bonds to the nanoparticle layer of the third material.

A copper diffusion-suppressing electrical bond between a first semiconductor wafer or chip or interposer and a second semiconductor wafer or chip or interposer includes a first bond pad metal with a first bond pad metal surface disposed on the first semiconductor wafer or chip or interposer, bonded with a second bond pad metal with a second bond pad metal surface disposed on the second semiconductor wafer or chip or interposer. A copper outdiffusion-suppressing coating such as a titanium, cobalt, nickel/gold, or nickel/palladium/gold layer may be disposed on the first copper bond pad metal surface and/or on the second copper bond pad metal surface. The copper of the bond pad metal may be doped with manganese to form a copper outdiffusion-suppressing surface manganese oxide. The bond pad metal may alternatively be tungsten to prevent copper outdiffusion.

The present disclosure provides a semiconductor structure and a manufacturing method thereof. A semiconductor structure includes a first chip. The first chip includes a first interconnect layer, a first conductive layer disposed on the first interconnect layer, a first dielectric layer covering the first conductive layer, and a first bonding pad embedded in the first dielectric layer and extending into the first conductive layer. The method of manufacturing the semiconductor structure includes the following operations. A first conductive layer is formed on a first interconnect layer. A first dielectric layer is formed on the first conductive layer and the first interconnect layer. The first dielectric layer is etched to form a first trench on the first conductive layer. A portion of the first conductive layer is etched to form a second trench. A first bonding pad is formed in the second trench.

A display device includes a display panel including a display area and a pad area. The display panel includes a base substrate, a pixel, a pad group, an alignment mark, and a protective layer. The pad group includes a plurality of pads arranged in a first direction. The alignment mark is spaced apart from the pad group in the first direction. The protective layer covers the pads and the alignment mark and a plurality of openings respectively exposing upper surfaces of the pads is defined in the protective layer. Each of the pads includes at least one pad pattern, and the alignment mark is disposed in a same layer as a pad pattern spaced farthest from the base substrate among the at least one pad pattern.