Apparatuses including substrate container attachment interfaces and substrate container adapters are provided. The substrate container attachment interfaces and substrate container adapters include at least one engagement feature configured to engage with a projection or recess provided in a substrate container. Adapters can include a cassette configured to be attached to, or integrally formed including the substrate container attachment interfaces. The substrate container attachment interfaces can attach to side columns provided in substrate containers. The substrate container attachment interfaces can include or be joined to environmental adjustment packs and/or sensors. The adapters can be configured to be at predetermined heights, and the predetermined heights can be selected based on interactions with automated handling.

Provided is a substrate storage container that can make locking mechanisms metal-free, also make locking claws of the locking mechanisms operate smoothly and ensure sufficient sealing performance of the lid. A locking claw 40 is comprised of a locking block 41 that can move linearly in an inside-outside direction of the lid body while being held between a pair of locking mechanism guide blocks of a lid 10 and can swing in a thickness direction of the lid body, joint bars 44 that are joined to an advancing/retracting bar 34 of a locking mechanism 30, and cam bosses 46 that are fitted into cam grooves 17 of the locking mechanism guide blocks. The locking block 41, the joint bars 44 and the cam bosses 46 are formed integrally from a molding material containing resin. A depressed portion is formed in the locking block 41, and a resin pin 49 is supported between both side ends of the depressed portion with a resin pressing roller 50 fitted on the resin pin 49. The cam boss has a pair of flat facets 47 formed on its peripheral surface. The cam groove 17 is formed of divided sections including: a straight linear-motion groove 19 that is in contact with the flat facets 47 to limit the swing of the locking claw 40; and an arcuate swinging-motion groove to allow the locking claw 40 to swing.

The present invention relates to an etching device and an etching method thereof, the etching device comprising: an etchant supply unit for supplying an etchant to an etching chamber; a rinsing liquid supply unit for supplying a rinsing liquid to the etching chamber, a cleaning liquid supply unit for supplying a cleaning liquid to the etching chamber, and a first pressurization maintaining unit for maintaining at least one of the etching chamber and the etchant supply unit in a pressurized atmosphere.

A locking and unlocking module for a wafer carrier load port includes a transmission assembly, an actuator, a gear and a locking latch. The transmission assembly includes a linear guide and a linear moving member slidable along the linear guide, and the linear moving member is provided with a plurality of toothed structures arranged substantially in a straight line. The actuator is coupled to the linear moving member and configured to reciprocate the linear moving member in a direction parallel to the straight line. The gear meshes with the toothed structures of the linear moving member, a locking latch is disposed coaxially with and driven together with the gear, and the locking latch is rotatable between a first position and a second position.