A silicon carbide power device has: a die having a functional layer of silicon carbide and an edge area and an active area, surrounded by the edge area; gate structures formed on a top surface of the functional layer in the active area; and a gate contact pad for biasing the gate structures. The device also has an integrated resistor having a doped region, of a first conductivity type, arranged at the front surface of the functional layer in the edge area; wherein the integrated resistor defines an insulated resistance in the functional layer, interposed between the gate structures and the gate contact pad.

A silicon carbide device includes: a planar gate structure on a first surface of a silicon carbide substrate, the planar gate structure having a gate length along a lateral first direction; a source region of a first conductivity type extending under the planar gate structure over at least part of the gate length; a body region of a second conductivity type, the body region including a channel zone that adjoins the source region under the planar gate structure; and a shielding region of the second conductivity type covering the channel zone over at least 20% but less than 100% of the gate length, wherein a maximum dopant concentration in the shielding region is higher than a maximum dopant concentration in the body region.

A power device and a method for manufacturing the power device are provided. The power device includes an electrical substrate, an epitaxial layer, a well region, a plurality of doping regions, a plurality of trenches, a first oxidation layer, a second oxidation layer, a polycrystalline silicon filler, two shielding regions, a dielectric layer, and a metallic electrically conductive layer.

Methods for fabricating SiC MOSFETs using compensating ion implants are disclosed. An n-type silicon carbide layer is epitaxially grown. After this growth process, a compensating ion implantation process is performed. This ion implantation process is used to compensate for the known dopant non-uniformity in the n-type silicon carbide layer. After the dopant concentration has been compensated, the traditional processes used to fabricate a planar SiC MOSFET may be performed. For super junction MOSFETs, the n-type epitaxial growth and compensating ion implantation processes may be repeated a plurality of times.

A semiconductor device includes a semiconductor layer made of a wide bandgap semiconductor and including a gate trench; a gate insulating film formed on the gate trench; and a gate electrode embedded in the gate trench to be opposed to the semiconductor layer through the gate insulating film. The semiconductor layer includes a first conductivity type source region; a second conductivity type body region; a first conductivity type drift region; a second conductivity type first breakdown voltage holding region; a source trench passing through the first conductivity type source region and the second conductivity type body region from the front surface and reaching a drain region; and a second conductivity type second breakdown voltage region selectively formed on an edge portion of the source trench where the sidewall and the bottom wall thereof intersect with each other in a parallel region of the source trench.

A silicon carbide transistor may be formed with a channel that includes a p-doped region between n-doped source and drain regions. A counter-doped region may be formed at the top of the channel directly underneath the gate oxide. Instead of using the conventional doping levels for the p-doped region, the doping concentration may be increase to be greater than about 1e18 cm.sup.3. The transistor may also include pocket regions on one or both sides of the channel. The pocket regions may be formed in the counter-doped region and may extend up to the gate oxide. These improvements individually and/or in combination may increase the current in the channel of the transistor without significantly increasing the threshold voltage beyond acceptable operating limits.

A MOSFET transistor device includes a functional layer of silicon carbide, having a first conductivity type. Gate structures are formed on a top surface of the functional layer and each includes a dielectric region and an electrode region. Body wells having a second conductivity type are formed within the functional layer, and the body wells are separated from one another by surface-separation regions. Source regions having the first conductivity type are formed within the body wells, laterally and partially underneath respective gate structures. Modified-doping regions are arranged in the surface-separation regions centrally thereto, underneath respective gate structures, in particular underneath the corresponding dielectric regions, and have a modified concentration of dopant as compared to the concentration of the functional layer.

A base layer has a low concentration peak at a position between a portion located at a same depth as a lower end portion of a gate electrode and a portion located at a same depth as an upper end portion of the gate electrode in a concentration profile of an impurity concentration in a depth direction. An impurity region has a boundary with the base layer in the depth direction at a position between a first peak position, at which the impurity concentration of the base layer is maximum between the portion located at the same depth as the lower end portion and the position of the low concentration peak, and a second peak position, at which the impurity concentration of the base layer is maximum between the position of the low concentration peak and the portion located at the same depth as the upper end portion.