A substrate assembling device (1) includes a first end effector 10 attached to a first arm (3), a second end effector 20 attached to a second arm (3), and a controller 4. The second end effector 20 includes a pair of grippers 22 configured to grip a second substrate 102, and a placing part 23 where threaded elements are placed. The controller 4 is adapted to control operations of the first arm and the second arm to position the second substrate 102 on a first substrate 101 while gripping the second substrate 102 by using the pair of grippers 22 of the second end effector 20, and hold the threaded element placed on the placing part 23 of the second end effector 20 and fasten the held threaded element, by using the first end effector 10, to join the first substrate 101 and the second substrate 102 together.

A robot apparatus is configured to extend a first end effector into a first process chamber and extend a second end effector into a second process chamber. The first process chamber and the second process chamber are separated by a first pitch. The robot apparatus is further configured to retract the first end effector and the second end effector into a rectangular mainframe while maintaining a distance between the substrates bounded by the first pitch throughout a retraction process, and fold the first end effector and the second end effector inward within a sweep diameter defined by a width of the rectangular mainframe.

A vacuum transfer device includes: a main body including an arm unit with an internal mechanical part therein and a vacuum seal, and configured to transfer a high temperature substrate in a vacuum; a substrate holder connected to the main body to hold the substrate; a heat transport member provided on a surface of the main body and made of a material having a higher thermal conductivity than that of a material constituting the main body in a creeping direction to transport heat transferred from the substrate to the substrate holder; and a heat radiator configured to dissipate heat transported by the heat transport member.

Provided is a method for controlling a robot including a base, a robot arm coupled to the base, and a drive unit including a motor for driving the robot arm. The method includes a first step of acquiring weight information including information on a weight of an end effector installed on the robot arm and a weight of an object to be worked by the end effector, a second step of determining a frequency component to be removed from a drive signal for driving the motor based on the weight information acquired in the first step, and a third step of removing the frequency component determined in the second step from the drive signal to generate a correction drive signal.

Provided is a method for controlling a robot including a base, a robot arm coupled to the base, and a drive unit including a motor for driving the robot arm. The method includes a first step of acquiring target position information on a target position when the robot arm is moved; a second step of determining a frequency component to be removed from a drive signal for driving the motor based on a posture of the robot arm at the target position of the acquired target position information; and a third step of removing the frequency component determined in the second step from the drive signal to generate a correction drive signal.

An in-vacuum twin-arm robot transports substrates in a vacuum space. The in-vacuum twin-arm robot includes a base arm, a first arm, a second arm, a first hand, and a second hand. The base arm can move vertically and can rotate. The first arm can rotate with respect to the base arm. The second arm can rotate with respect to the base arm. The first hand rotates with respect to the first arm and holds and transports the substrate. The second hand rotates with respect to the second arm and holds and transports the substrate. The first arm and the second arm are rotatably mounted on a leading end of the base arm via a joint shaft formed hollow. An angle of the first hand with respect to the first arm and an angle of the second hand with respect to the second arm can be changed independently of each other.

An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

A self-traveling articulated robot for working in a production factory is provided, which includes a carriage having at least two operation shafts driven by servomotors, respectively, and self-travelable in a two-dimensional plane, a robotic arm supported by the carriage and having at least one operation shaft driven by a servomotor and constituting a joint, an end effector provided to a tip portion of the robotic arm, and a control unit provided in the carriage and for controlling the operation shaft of the robotic arm and the operation shafts of the carriage to operate in cooperation with each other so that a control point defined in one of the robotic arm and the end effector reaches a target position.

Robots including spaced upper arms are described. The robot includes first and second upper arms rotatable about a shoulder axis wherein the second upper arm is spaced from the first upper arm. The other robot components (first and second forearms, first and second wrist members, and first and second end effectors) are interleaved in the space between the first and second upper arms. Each of the first and second upper arms and first and second forearms may be individually and independently controlled. Methods of operating the robot and electronic device processing systems including the robot are provided, as are numerous other aspects.

A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.