A semiconductor device of an embodiment includes: a first semiconductor element; a first insulating resin that seals the first semiconductor element; a wiring substrate having a pad; a first wiring that extends from the first semiconductor element toward the wiring substrate, and has a first head portion and a first column portion, the first column portion connected to the first semiconductor element and the first head portion exposed on a surface of the first insulating resin; and a first conductive bonding agent that electrically connects the first head portion of the first wiring and the pad. When a surface of the first head portion facing a side of the first insulating resin is defined as a first surface. A surface of the first insulating resin on a side of the wiring substrate is defined as a second surface. A distance from a surface of the wiring substrate on a side of the first insulating resin to the first surface is defined as a first distance, and a distance from a surface of the wiring substrate on the side of the first insulating resin to the second surface is defined as a second distance. The first distance is shorter than the second distance.

Provided is a semiconductor package including a first semiconductor chip; a plurality of lower first conductive posts on the first semiconductor chip; a second semiconductor chip offset-stacked on the first semiconductor chip; a plurality of lower second conductive posts on the second semiconductor chip; a first molding layer around the first semiconductor chip, and the second semiconductor chip; a third adhesive layer on an upper surface of the first molding layer; a plurality of upper first conductive posts on the plurality of lower first conductive posts; a plurality of upper second conductive posts on the plurality of lower second conductive posts; a third semiconductor chip on the third adhesive layer; a plurality of third conductive posts on the third semiconductor chip; a second molding layer on the third adhesive layer; and a redistribution structure on the second molding layer.

Methods, apparatuses, and systems related to an apparatus configured to provide varied connection positions. The varied connection positions may be provided through an alternating pattern of pads and pedestals that are each configured to attach and electrically couple to complementary connection points on a connected device.

Embodiments of the present disclosure relate to a method of digital lithography for semiconductor packaging and a software application. The method includes receiving metrology data to a digital lithography system, the metrology data corresponding to the pillar heights and pillar critical dimensions of a plurality of non-uniform pillars disposed over the die, wherein at least two pillars have different pillar heights and different pillar critical dimensions, the digital lithography system is operable to update a mask pattern, the mask pattern corresponding to a pattern of uniform pillars, updating the mask pattern according to the metrology data to generate a compensated mask pattern, and conducting a digital lithography process to pattern on a resist to form a plurality of vias, the vias are formed over each non-uniform pillar of the plurality of non-uniform pillars and include a via depth and a via critical dimension after the resist is developed.

A semiconductor module may include a package substrate including a first surface and an opposite second surface, a semiconductor chip on the first surface of the package substrate, a plurality of pads on the second surface of the package substrate, and a plurality of solder balls connected to the plurality of pads, respectively, where the package substrate may include a slit in or on the second surface, at least a portion of the slit is disposed between the plurality of solder balls, the slit is spaced apart from the plurality of pads, and a filling layer is in the slit.

A method of making an assembly can include juxtaposing a top surface of a first electrically conductive element at a first surface of a first substrate with a top surface of a second electrically conductive element at a major surface of a second substrate. One of: the top surface of the first conductive element can be recessed below the first surface, or the top surface of the second conductive element can be recessed below the major surface. Electrically conductive nanoparticles can be disposed between the top surfaces of the first and second conductive elements. The conductive nanoparticles can have long dimensions smaller than 100 nanometers. The method can also include elevating a temperature at least at interfaces of the juxtaposed first and second conductive elements to a joining temperature at which the conductive nanoparticles can cause metallurgical joints to form between the juxtaposed first and second conductive elements.

A method of electroplating a metal into features, having substantially different depths, of a partially fabricated electronic device on a substrate is provided. The method includes adsorbing accelerator into the bottom of recessed features; partially filling the features by a bottom up fill mechanism in an electroplating solution; diffusing leveler into shallow features to decrease the plating rate in shallow features as compared to deep features; and electroplating more metal into the features such that the height of metal in deep features is similar to the height of metal in shallow features.

Methods for forming semiconductor structures are provided. The method for forming a semiconductor structure includes forming a metal pad over a first substrate and forming a polymer layer over the metal pad. The method for forming a semiconductor structure further includes forming a seed layer over the metal pad and extending over the polymer layer and forming a conductive pillar over the seed layer. The method for forming a semiconductor structure further includes wet etching the seed layer using an etchant comprising H2O2. In addition, the step of wet etching the seed layer is configured to form an extending portion having a slope sidewall.

A semiconductor package is provided. The semiconductor package includes a semiconductor device bonded to a base through a first conductive structure. The semiconductor device includes a carrier substrate including a conductive trace. A portion of the conductive trace is elongated. The semiconductor device also includes a second conductive structure above the carrier substrate. A portion of the second conductive structure is in contact with the portion of the conductive trace. The semiconductor device further includes a semiconductor body mounted above the conductive trace. The semiconductor body is connected to the second conductive structure.

In an embodiment, a device includes: a substrate having a first side and a second side opposite the first side; an interconnect structure adjacent the first side of the substrate; and an integrated circuit device attached to the interconnect structure; a through via extending from the first side of the substrate to the second side of the substrate, the through via being electrically connected to the integrated circuit device; an under bump metallurgy (UBM) adjacent the second side of the substrate and contacting the through via; a conductive bump on the UBM, the conductive bump and the UBM being a continuous conductive material, the conductive bump laterally offset from the through via; and an underfill surrounding the UBM and the conductive bump.