Patent classifications
H10P72/3221
Turntable for wafer transport system
A system according to the present disclosure includes a first fixed rail segment, a second fixed rail segment aligned with the first fixed rail segment along a first direction, a rotatable rail joint disposed between the first fixed rail segment and the second fixed rail segment along the first direction, a hanger mechanically coupled to the rotatable rail joint, a powered rotational mechanism housed in the hanger. The rotatable rail joint includes at least one rotational rail that is aligned with the first fixed rail segment and the second fixed rail segment when the rotatable rail joint rotates to an alignment position is not aligned with the first fixed rail segment and the second fixed rail segment when the rotatable rail joint rotates out of the alignment position.
Object conveying system
The disclosure discloses an object conveying system including an object conveying apparatus and a mounting table. The object conveying apparatus includes a traveling member, the vehicle member, and a transporting member. A rail which extends along a horizontal direction is disposed between the object conveying system and the mounting table. A horizontal moving mechanism of the vehicle member moves back and forth along the rail. A horizontal height of a lowest end of an outer peripheral edge of a first wheel on the horizontal moving mechanism is higher than a horizontal height of a lowest end of an outer peripheral edge of a second wheel. While the horizontal moving mechanism is moving to a direction away from the object conveying apparatus, the first wheel and the second wheel move along the rail by contacting in order.
Transport vehicle cleaning device and article transport equipment including the same
A transport vehicle cleaning device that cleans a transport vehicle incudes a housing including a cleaning space accommodating the transport vehicle for cleaning, a plurality of fans disposed at an upper part of the housing and generating a downward airflow in the cleaning space, a cleaning gas injector disposed at a ceiling of the housing and injecting a cleaning gas towards the transport vehicle in the cleaning space of the housing, an exhaust unit provided at a lower part of the housing and exhausting the cleaning gas supplied to the cleaning space and a foreign matter removed from the transport vehicle from the cleaning space, and a frame cover disposed in the housing and configured to completely cover opposite openings of the frame in the housing to form a closed internal space of the frame separated from the cleaning space.
Transport vehicle with grip drive section
A first guide body includes a pair of first guide surfaces and corrects the position in a second direction of a gripping body section relative to a first grip section by at least one of the pair of first guide surfaces coming into contact with the first grip section during a lowering operation for gripping. A second guide body includes a pair of second guide surfaces and corrects the position in the second direction of the gripping body section relative to a target grip section by at least one of the pair of second guide surfaces coming into contact with the target grip section during the lowering operation for gripping. The first guide body and the second guide body are spaced apart from each other in at least either a first direction or the second direction.