A wet-processing dark laboratory for scientific research includes a laboratory body, a wet-processing equipment, a transfer robot, a sample supplying and storing apparatus, a chemical supplying and storing apparatus, and a control apparatus. The laboratory body is configured to provide a clean space. The transfer robot includes a moving device, a mechanical arm device, at least one end effector, and an accompanying device. The accompanying device can move with the moving device and provide a temporary storage space. The mechanical arm device is mounted on the moving device. The at least one end effector is mounted on the mechanical arm device for grasping a semiconductor sample and/or a chemical tank. The above design enables 24/7 experiments conduction without the need for human presence, which forms a dark laboratory.

An apparatus for transferring a substrate includes: loading plate, a substrate loading part disposed on the loading plate, a rail disposed below the loading plate and extending in a first direction, a driving part disposed in an accommodation space defined within the rail, and connected to the loading plate through an opening defined in an upper portion of the rail, and wheels connected to both opposing sides of the driving part in a second direction that intersects perpendicular to the first direction. Each of the wheels includes a first wheel core, a second wheel core surrounding a first outer circumferential surface of the first wheel core when viewed in the second direction, and fan blades disposed between the first wheel core and the second wheel core. When viewed in the first direction, the fan blades are disposed to be inclined at a first angle with respect to the second direction.

A system according to the present disclosure includes a first fixed rail segment, a second fixed rail segment aligned with the first fixed rail segment along a first direction, a rotatable rail joint disposed between the first fixed rail segment and the second fixed rail segment along the first direction, a hanger mechanically coupled to the rotatable rail joint, a powered rotational mechanism housed in the hanger. The rotatable rail joint includes at least one rotational rail that is aligned with the first fixed rail segment and the second fixed rail segment when the rotatable rail joint rotates to an alignment position is not aligned with the first fixed rail segment and the second fixed rail segment when the rotatable rail joint rotates out of the alignment position.

The disclosure discloses an object conveying system including an object conveying apparatus and a mounting table. The object conveying apparatus includes a traveling member, the vehicle member, and a transporting member. A rail which extends along a horizontal direction is disposed between the object conveying system and the mounting table. A horizontal moving mechanism of the vehicle member moves back and forth along the rail. A horizontal height of a lowest end of an outer peripheral edge of a first wheel on the horizontal moving mechanism is higher than a horizontal height of a lowest end of an outer peripheral edge of a second wheel. While the horizontal moving mechanism is moving to a direction away from the object conveying apparatus, the first wheel and the second wheel move along the rail by contacting in order.