A substrate processing method of processing a substrate having a base film includes a loading process of loading the substrate into a processing container, a first process of performing a first plasma process in a state where the loaded substrate is held at a first position by raising substrate support pins of a stage arranged in the processing container, and a second process of performing a second plasma process while holding the substrate at a second position by lowering the substrate support pins.

A method for manufacturing a semiconductor structure includes: a base provided with a contact hole is provided; an initial contact structure including a first diffusion barrier layer, a conductive layer and a second diffusion barrier layer stacked onto one another is formed on the base, the first diffusion barrier layer conformably covering the contact hole and covering part of a top surface of the base, the conductive layer covering first diffusion barrier layer and being filled in unoccupied space in the contact hole, the second diffusion barrier layer covering a side of the conductive layer away from first diffusion barrier layer, the initial contact structure outside the contact hole being provided with a groove exposing side walls of conductive layer and second diffusion barrier layer; a third diffusion barrier layer is formed on a side wall of initial contact structure exposed by the groove to obtain a target contact structure.