An integrated circuit product includes a vertical bridge chiplet that includes through silicon vias (TSVs) to provide power delivery or other system input/output signals to an integrated circuit device. The vertical bridge chiplet and functional chiplets are coupled to the integrated circuit device using vertical interconnect. In an embodiment, the vertical bridge chiplet uses double-sided interconnect to couple system I/O from a package or printed circuit board to the integrated circuit device and reduces or eliminates the need for the integrated circuit device to include TSVs. The vertical bridge chiplet is separately manufactured and may be included in a library of functional chiplets of a modular chiplet system for use with a set of prefabricated integrated circuit devices formed from a semiconductor substrate with a set of chiplet interfaces to serve a variety of system applications without requiring custom silicon devices.

An electronic device may include a first die that may include a first set of die contacts. The electronic device may include a second die that may include a second set of die contacts. The electronic device may include a bridge interconnect that may include a first set of bridge contacts and may include a second set of bridge contacts. The first set of bridge contacts may be directly coupled to the first set of die contacts (e.g., with an interconnecting material, such as solder). The second set of bridge contacts may be directly coupled to the second set of die contacts (e.g., with solder). The bridge interconnect may help facilitate electrical communication between the first die and the second die.

A semiconductor package comprises a first die having a central region and a peripheral region that surrounds the central region; a plurality of through electrodes that penetrate the first die; a plurality of first pads at a top surface of the first die and coupled to the through electrodes; a second die on the first die; a plurality of second pads at a bottom surface of the second die, the bottom surface of the second die facing the top surface of the first die; a plurality of connection terminals that connect the first pads to the second pads; and a dielectric layer that fills a space between the first die and the second die and surrounds the connection terminals. A first width of each of the first pads in the central region may be greater than a second width of each of the first pads in the peripheral region.

A semiconductor package includes a first substrate including upper pads, at least one chip structure including connection pads, and first bump structures electrically connecting the connection pads and the upper pads. The connection pads include a first group of connection pads arranged at a first interval, and a second group of connection pads arranged at a second interval, smaller than the first interval. Each of the first group of the first bump structures includes a first pillar contacting one of the first group of the connection pads, and a first solder connecting the first pillar and one of the upper pads. Each of the second group of the first bump structures includes a second pillar contacting one of the second group of the connection pads, a second solder contacting one of the upper pads, and a third pillar connecting the second pillar and the second solder.

Disclosed are semiconductor packages and their fabrication methods. The semiconductor package comprises a first substrate having first pads on a first surface of the first substrate, a second substrate on the first substrate and having a plurality of second pads on a second surface of the second substrate, and connection terminals between the first substrate and the second substrate and correspondingly coupling the first pad to the second pads. Each of the connection terminals has a first major axis and a first minor axis that are parallel to the first surface of the first substrate and are orthogonal to each other. When viewed in a plan view, the first minor axis of each of the connection terminals is directed toward a center of the first substrate.

A chip-stacked device includes a first chip including a first substrate including a first face, a first conductive film provided in an island form over the first face and electrically connected to a signal line, and a second conductive film provided apart from the first conductive film over the first face and connected to the ground line; a second chip; a first bonding portion covering the first conductive film; and a second bonding portion apart from the first conductive film and the first bonding portion, the second bonding portion located over the second conductive film. The first chip and the second chip are bonded to each other via the first bonding portion and the second bonding portion.

Microelectronic die package structures formed according to some embodiments may include a substrate and a die having a first side and a second side. The first side of the die is coupled to the substrate, and a die backside layer is on the second side of the die. The die backside layer includes a plurality of unfilled grooves in the die backside layer. Each of the unfilled grooves has an opening at a surface of the die backside layer, opposite the second side of the die, and extends at least partially through the die backside layer.

A chip-size-package type semiconductor device includes a semiconductor layer, pads, and metal redistributions that are located above a top surface of the semiconductor layer and each of which is connected to one or more pads. The metal redistributions include first metal redistributions each of which includes a first portion and a second portion contained within the first portion in a plan view, the second portion being located above the first portion and having an area smaller than an area of the first portion in the plan view. Each of the first metal redistributions includes one or more line-shaped bends in a boundary portion between the first portion and the second portion on a surface of the first metal redistribution, the one or more line-shaped bends each having an interior angle of at least 180 degrees in a cross section of the first metal redistribution.