A substrate process station includes a housing including a transport region and process region. The process station further includes a magnetic levitation assembly disposed in the transport region configured to levitate and propel a substrate carrier. The magnetic levitation assembly includes a first track segment including first rails disposed in the transport region and below the process region, wherein the first rails each include a first plurality of magnets. The process station further includes a pedestal assembly comprising a pedestal disposed within the housing. The pedestal is moveable between a pedestal transfer position and a process position, wherein the pedestal is disposed between the first rails in the pedestal transfer position to receive a substrate from the substrate carrier, and wherein the pedestal is moveable between the first rails to position the received substrate in the process region in the process position.

The overhead transport vehicle includes: a winding drum configured to lift and lower a lifting part by winding and paying out a plurality of suspending members; at least one guide roller around which the suspending members paid out from the winding drum are wound; a body part supporting the winding drum and the guide roller; at least one position adjusting part configured to move a portion of each suspending member connected to the lifting part in a lifting direction by moving a relative position of the guide roller with respect to the body part; and a control part configured to control movement of the guide roller by the position adjusting part, based on information on an inclination of the lifting part.

A first container includes a pair of first held sections serving as a pair of held sections, and a second container includes a pair of second held sections serving as a pair of held sections. A first distance between the two first held sections is smaller than a second distance between the two second held sections. A first detector is configured to detect a detection target section in the first held sections and not detect the detection target section in the second held sections while a holder device is disposed at a holding reference position. A second detector is configured to detect a detection target section in the second held sections and not detect the detection target section in the first held sections while the holder device is disposed at the holding reference position.

A transport facility equipped with an overhead transport vehicle, a ground transport vehicle, and a transport device includes a transfer section for an article to be transferred between the overhead transport vehicle and the transport device, the transfer section being on the upper side of a floor surface and separated from the floor surface. The overhead transport vehicle and the ground transport vehicle are configured to directly transfer an article therebetween, and the ground transport vehicle and the transport device are configured to transfer an article therebetween via the overhead transport vehicle and the transfer section.

Proposed are a transfer module that can exhaust air without scattering particles, and a transfer chamber and a substrate processing apparatus including the transfer module. The transfer module that transfers a substrate in the substrate processing apparatus includes a vertical gantry member configured to extend in a vertical direction, a horizontal gantry member coupled to the vertical gantry member to move in the vertical direction and configured to extend along a first horizontal direction perpendicular to the vertical direction, a horizontal driving member coupled to the horizontal gantry member and configured to move along the first horizontal direction, and a substrate transfer robot coupled to the horizontal driving member and driven in a second horizontal direction perpendicular to the first horizontal direction and a rotation direction.

A substrate process station includes a housing including a transport region and process region. The process station further includes a magnetic levitation assembly disposed in the transport region configured to levitate and propel a substrate carrier. The magnetic levitation assembly includes a first track segment including first rails disposed in the transport region and below the process region, wherein the first rails each include a first plurality of magnets. The process station further includes a pedestal assembly comprising a pedestal disposed within the housing. The pedestal is moveable between a pedestal transfer position and a process position, wherein the pedestal is disposed between the first rails in the pedestal transfer position to receive a substrate from the substrate carrier, and wherein the pedestal is moveable between the first rails to position the received substrate in the process region in the process position.

A substrate process station includes a housing including a transport region and process region. The process station further includes a magnetic levitation assembly disposed in the transport region configured to levitate and propel a substrate carrier. The magnetic levitation assembly includes a first track segment including first rails disposed in the transport region and below the process region, wherein the first rails each include a first plurality of magnets. The process station further includes a pedestal assembly comprising a pedestal disposed within the housing. The pedestal is moveable between a pedestal transfer position and a process position, wherein the pedestal is disposed between the first rails in the pedestal transfer position to receive a substrate from the substrate carrier, and wherein the pedestal is moveable between the first rails to position the received substrate in the process region in the process position.

An overhead transport vehicle includes: a holding unit that is provided to be liftable and lowerable and configured to hold an article; a three-dimensional ranging sensor that has a detection range to include surroundings of a lower space formed directly below the article held by the holding unit; and a control device that is configured to determine presence or absence of an obstacle based on a detection result of the three-dimensional ranging sensor.

A path setting system is used for setting paths of a plurality of transfer bodies in a substrate transfer device, the substrate transfer device including a substrate transfer area and the plurality of transfer bodies, each having a support configured to support a substrate and configured to float and move by a magnetic force from a floor forming the substrate transfer area. The path setting system includes a virtual area setting part configured to set a virtual area corresponding to the substrate transfer area, a path generating part configured to generate, in the virtual area, moving paths of the transfer bodies from a movement start position to a movement end position, and an interference determining part configured to determine interference between the moving paths.

A conveyance apparatus includes: a mast; and a lifting body supported by the mast, wherein the lifting body includes: a base; a transfer mechanism that is provided in the base, the transfer mechanism including a placement unit and an expandable unit that moves the placement unit between an inner position on the base and an outer position deviated from the base in a direction intersecting an up-down direction; and a suppression member that suppresses separation of a storage container from the placement unit by an inertial force acting upward or obliquely upward, the suppression member fixed to the base in a state of being separated upward by a predetermined distance from the base in such a manner as to be positioned above the storage container with a gap in a state where the placement unit on which the storage container is placed is at the inner position.