A size adapter for a substrate container includes an engagement feature capable of engaging a cassette spring provided in the substrate container. The size adapter further includes a cassette contact surface. The size adapter can be configured such that the cassette contact surface is positioned within an internal space of the substrate container such that the cassette contact surface can retain a position of a cassette that is of a size smaller than a size the substrate container is configured to accommodate.

There is provided a cushioning material, the cushioning material including a lower cushioning material that supports a lower portion of each of two rows of containers on a lower tier, middle cushioning materials that are interposed between the containers on an upper tier and the containers on the lower tier, and upper cushioning materials that are disposed in each of the two rows of the containers on the upper tier and that hold each of an upper portion of the containers on the upper tier, in which the lower cushioning material is formed without a space between the lower cushioning material and side plates of a packing case and the middle cushioning materials and the upper cushioning materials are formed with a predetermined space between the middle cushioning materials and the upper cushioning materials and the side plates of the packing case.

A filter module includes an interface body and a filter retention body. A filter can be disposed between the filter retention body and a filter retainer joined to the filter retention body. The filter retention body can further include a valve. The filter retainer can be joined to the filter retention body by a snap fit, a press-fit, or a weld. The filter retainer can include stand-offs configured to contact the filter such that the filter is held away from the filter grill. The filter module can be used for providing purge in a wafer container such as a front opening unified pod (FOUP).

A reticle pod includes an outer portion that includes a pod door and a pod dome, and an inner portion including a baseplate and a cover. One of the baseplate or the cover includes a reticle compartment wall extending towards the other of the baseplate or cover. The reticle compartment wall includes one or more retaining features. The pod door or the pod dome includes one or more actuating surfaces configured to contact the retaining features. The retaining features are configured to be moved by contact with the actuating surfaces. The retaining features may be in a position configured to secure a reticle within the inner portion of the reticle pod when the reticle pod is assembled by joining the baseplate and the cover, placing the joined baseplate and cover within the pod dome, and securing the pod door to the pod dome.