The invention relates to a method for disinfecting and/or sterilizing objects, said method comprising the method steps of: placing an object in a process chamber that can be evacuated; evacuating the process chamber; introducing a treatment medium; carrying out the disinfection and/or sterilization process; and increasing the pressure in the process chamber. The invention also relates to: a software program for carrying out the method for disinfecting and/or sterilizing objects; and a device for disinfecting and/or sterilizing objects. The invention also relates to: a disinfected object comprising residues of the treatment medium and/or reaction products of the treatment medium and fewer than 2000 germs per m.sup.2 on the surface of the disinfected object; and a sterilized object comprising residues of the treatment medium and/or reaction products of the treatment medium and a germ-free surface.

The invention relates to a method for disinfecting and/or sterilizing objects, said method comprising the method steps of: placing an object in a process chamber that can be evacuated; evacuating the process chamber; introducing a treatment medium; carrying out the disinfection and/or sterilization process; and increasing the pressure in the process chamber, wherein the concentration of the treatment medium is monitored while the disinfection and/or sterilization process is carried out. The invention also relates to: a software program for carrying out the method for disinfecting and/or sterilizing objects; and a device for disinfecting and/or sterilizing objects. The invention also relates to: a disinfected object comprising residues of the treatment medium and/or reaction products of the treatment medium and fewer than 2000 germs per m.sup.2 on the surface of the disinfected object; and a sterilized object comprising residues of the treatment medium and/or reaction products of the treatment medium and a germ-free surface.