Techniques are described for laser processing of electrochromic glass or other thin-film devices. A laser beam collimated to an angular divergence of 1 milliradian or less is directed onto a first position on a surface of a workpiece. The laser beam includes pulses of electromagnetic radiation directed to a spot having a characteristic dimension of at least about 5 mm at the surface of the workpiece. The laser beam removes the material from the first position, then is moved to a second position on the surface of the workpiece and removes material from the second position. The laser beam is then moved to one or more additional positions on the surface of the workpiece and removes material from the one or more additional positions.