A nozzle plate includes, on a substrate: at least a base layer; an intermediate layer; and a liquid repellent layer. The base layer contains a silane coupling agent A having reactive functional groups at both terminals and including a hydrocarbon chain and a benzene ring at an intermediate part. The intermediate layer contains an inorganic oxide. The liquid repellent layer contains a fluorine (F)-containing coupling agent B.

In one embodiment, a method for manufacturing an aperture plate includes depositing a releasable seed layer above a substrate, applying a first patterned photolithography mask above the releasable seed layer, the first patterned photolithography mask having a negative pattern to a desired aperture pattern, electroplating a first material above the exposed portions of the releasable seed layer and defined by the first mask, applying a second photolithography mask above the first material, the second photolithography mask having a negative pattern to a first cavity, electroplating a second material above the exposed portions of the first material and defined by the second mask, removing both masks, and etching the releasable seed layer to release the first material and the second material. The first and second material form an aperture plate for use in aerosolizing a liquid. Other aperture plates and methods of producing aperture plates are described according to other embodiments.

A fluid ejection apparatus includes a plurality of fluid ejectors. Each fluid ejector includes a pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber. The fluid ejection apparatus includes a feed channel fluidically connected to each pumping chamber; and at least one compliant structure formed in a surface of the feed channel. The at least one compliant structure has a lower compliance than the surface of the feed channel.

An ink jet head includes a nozzle plate substrate having a nozzle for ejecting ink toward a recording medium and an oil repellent film on a surface of the nozzle plate substrate, the surface facing the recording medium. The oil repellent film includes a fluorine compound having a first end and a second end, the first end having a bonding group bonded to the nozzle plate substrate, the second end having a perfluoroalkyl group, and the bonding group being bonded to a bonding group of an adjacent fluorine compound bonded to the nozzle plate substrate.

In an embodiment, a fluid flow structure includes a micro device embedded in a molding, a fluid feed hole formed through the micro device, and a transfer molded fluid channel in the molding that fluidically couples the fluid feed hole with the channel.

Provided herein are a jet hole plate, a liquid jet head, a liquid jet recording apparatus, and a method for manufacturing a jet hole plate that can achieve a long life. A jet hole plate according to an embodiment of the present disclosure is a jet hole plate for use in a liquid jet head. The jet hole plate includes a metal substrate having provided therein a plurality of jet holes. The metal substrate has a principal surface having outlets for the jet holes. The principal surface has a surface roughness (arithmetic mean roughness Ra) that is smaller in outlet edge regions of the jet holes than in surrounding regions around the outlet edge regions.

A method for forming a fluid flow structure may include positioning rows of micro devices in a mold, wherein each of the micro devices comprising a chamber layer in which an ejection chamber is formed and an orifice layer over the chamber layer in which an orifice is formed. The method may further include molding an amorphous body to encapsulate the rows of the micro devices such that the amorphous body forms fluid channels such that each of the rows is fluidically coupled to a different one of the fluid channels.

An ink jet head includes a nozzle plate substrate having a nozzle for ejecting ink toward a recording medium and an oil repellent film on a surface of the nozzle plate, the surface facing the recording medium. The oil repellent film comprises a terminal perfluoroalkyl group including a CF2 group, a CF3 group, and a CF3+ group.

There is provided a method of manufacturing a liquid ejection head. The liquid ejection head includes a recording device substrate, an electric wiring member configured to be connected to the recording device substrate at an electric connection portion, and a support member including a concave portion and a convex portion. The convex portion includes a first surface and a second surface. The method includes applying an adhesive to the surface of the concave portion on which the recording device substrate is to be placed and to the first surface, pressing the applied adhesive after the recording device substrate is placed on the surface of the concave portion on which the recording device substrate is to be placed, to fill, with the adhesive, a gap between the convex portion and the recording device substrate to a position higher than the first surface, and sealing the electric connection portion.

A method for manufacturing a liquid ejection head includes forming a water-repellent layer containing a condensate of a first hydrolyzable silane compound and a second hydrolyzable silane compound, and irradiating the water-repellent layer with light including a light ray having a wavelength of less than 270 nm, wherein the first hydrolyzable silane compound contains a fluorine-containing group but no carbonyl group between the fluorine-containing group and a silicon atom, and the second hydrolyzable silane compound contains a fluorine-containing group and a carbonyl group between the fluorine-containing group and a silicon atom.