A method for cutting a thin glass including the steps of guiding, by a transport device, the thin glass ribbon over a levitation support, and directing, within a range of the levitation support, a laser beam onto the thin glass ribbon, which heats up the thin glass ribbon at an impingement point of the laser beam. The method also includes the step of blowing, by a cooling jet generator, a cooling fluid onto the track heated by the laser beam so that a region heated by the laser beam is cooled down and a mechanical stress is created. The cooling fluid contains vapor of a liquid at a saturation ratio of at least 0.5 or a plurality of liquid droplets. The liquid droplets form a contact angle on a surface of the thin glass ribbon which is smaller than that of water on the same surface.

A gas floated workpiece supporting apparatus includes a gas upward ejector ejecting gas upward, and a gas downward ejector located at an upper side from the gas upward ejector and ejecting gas downward. The gas downward ejector is installed at a position where the gas downward ejector ejects the gas downward from above a plate-shaped workpiece to apply pressure to the plate-shaped workpiece that is floated and supported by the gas ejected from the gas upward ejector, whereby a uniform floating amount supports the plate-shaped workpiece with high flatness at a time of floating and supporting the plate-shaped workpiece.

The invention is an atmosphere formation apparatus that is provided in a floatation conveyance apparatus, the floatation conveyance apparatus conveying a workpiece while performing floating support of the workpiece by gas injection, the atmosphere formation apparatus including a small-range atmosphere formation device that forms a small-range atmosphere B in a large-range atmosphere A, the large-range atmosphere A being an atmosphere in a large-range region containing a conveyance path along which the conveyance is performed, the small-range atmosphere B being an atmosphere in a small-range region containing the conveyance path, the small-range atmosphere B being different from the large-range atmosphere A.

Methods of conveying a glass ribbon are provided that each includes the step of conveying the glass ribbon over a support device with a cushion of fluid supporting the glass ribbon over the support device. Each method further includes the step of monitoring a physical contact event between the glass ribbon and the support device by detecting an acoustic signal associated with the physical contact event. In further examples, glass ribbon conveying apparatus are provided that each includes a support device configured to support a glass ribbon over the support device with a cushion of fluid. Each apparatus further includes an acoustic sensor configured to monitor a physical contact event between the glass ribbon and the support device by detecting an acoustic signal associated with the physical contact event.

A method for cutting thin glass, wherein the thin glass is heated with a laser beam along a path forming a cutting line moving along a forward feed direction, such that a crack propagates along the cutting line and cuts through the thin glass. The laser beam is formed by a beam-forming optic in such a way that the beam profile thereof has an elongated shape. The laser beam is orientated on the surface of the thin glass such that the longitudinal direction thereof is aligned in the feed direction. The elongated shape of the beam profile is asymmetric, such that the intensity course differs at the ends of the beam profile in such a way that the increase in intensity at the front end crossing the thin glass first is steeper than the drop in intensity at the opposite rear end.

Provided is a substrate processing apparatus and method capable of controlling a gripper to stably suck a substrate even when the substrate is deformed, the substrate processing apparatus including a floating stage for floating a substrate, lift pins liftably mounted in the floating stage, a substrate aligner for aligning the substrate floated from the floating stage, a gripper for vacuum-sucking the aligned substrate, and a controller capable of controlling a floating height of the substrate, wherein the controller reduces the floating height of the substrate when the gripper fails to vacuum-suck the substrate.

A printer includes a substrate support, a printhead assembly, first and second actuators, and a controller. The printhead assembly deposits material on a substrate supported on the substrate support. The first actuator is disposed at a side of the substrate support and coupled to a first linear track disposed along the side of the substrate support and oriented in a first direction. The second actuator is disposed at an end of the substrate support and coupled to a second linear track disposed along the end of the substrate support and oriented in a second direction perpendicular to the first direction. The first and second actuators are positioned to engage with the substrate simultaneously. The controller moves the first and second actuators together to rotate the substrate.

To provide a levitation air plate that can be easily manufactured and can float a substance being conveyed such as a glass while maintaining its high rigidity and controlling a floating amount in high accuracy. A levitation air plate 1 provided with: a top plate 2 in which a plurality of air ejection holes 2c and suction holes 2d penetrating from an upper surface 2a to a lower surface 2b are arranged in alternating fashion as viewed from the upper surface, the top plate 2 having a counter-bored portion 2e on the lower surface side of each of the plurality of air ejection holes; an orifice sheet 3 having a plurality of orifices 3c penetrating from an upper surface 3a to a lower surface 3b in positions corresponding to the counter-bored portions of the top plate, and having communicating holes 3d communicated one-to-one with the suction holes of the top plate and penetrating from the upper surface to the lower surface; and bottom side plates 4, 5 having an air supply channel 4c and an air supply hole 5c for supplying air to all of the orifices drilled in the orifice sheet, and an air suction channel 4d and a suction hole 5d for suctioning air from all of the communicating holes communicated with the suction holes.

A printer includes a substrate support, a printhead assembly, first and second actuators, and a controller. The printhead assembly deposits material on a substrate supported on the substrate support. The first actuator is disposed at a side of the substrate support and coupled to a first linear track disposed along the side of the substrate support and oriented in a first direction. The second actuator is disposed at an end of the substrate support and coupled to a second linear track disposed along the end of the substrate support and oriented in a second direction perpendicular to the first direction. The first and second actuators are positioned to engage with the substrate simultaneously. The controller moves the first and second actuators together to rotate the substrate.

A floating unit carries and transport is a substantially flat body, with a carrier plate which has a first multiplicity of pressure nozzles and a first multiplicity of vacuum nozzles on a first surface, wherein a first multiplicity of channels which extend both from the pressure nozzles of the first multiplicity of pressure nozzles and from the vacuum nozzles of the first multiplicity of vacuum nozzles is provided in the first surface.