There is provided a film-forming apparatus including a roll-to-roll mechanism and a heating unit. The roll-to-roll mechanism is configured to transport a film-forming target and includes a tensile force relaxation unit configured to relax a tensile force applied to the transported film-forming target. The heating unit is configured to heat the film-forming target transported by the roll-to-roll mechanism.

A rolled film formation apparatus including a first chamber in which a first precursor is applied to a substrate, a second chamber in which a second precursor is applied to the substrate such that the first and second precursors react with each other and that an atomic layer is deposited on the substrate, a third chamber in which a purge gas is applied to the substrate, and conveyance roller pairs which are positioned in the first, second and third chambers, and convey the substrate. Each conveyance roller pair includes a first roller and a second roller which sandwich the substrate in a thickness direction of the substrate. At least one of the first and second rollers has an outer peripheral surface having a surface unevenness. The substrate is moved back and forth among the first, second and third chambers. The atomic layer is deposited more than once on the substrate.

There is provided a film-forming apparatus including a roll-to-roll mechanism and a heating unit. The roll-to-roll mechanism is configured to transport a film-forming target and includes a tensile force relaxation unit configured to relax a tensile force applied to the transported film-forming target. The heating unit is configured to heat the film-forming target transported by the roll-to-roll mechanism.

The invention relates to a rolled up thin glass composite comprising a thin glass film and at least one further layer (10, 11, 20, 30) applied over the surface of one side of the thin glass film, wherein the at least one further layer (10, 11, 20, 30) is applied to a radially outer side of the rolled up thin glass film and the at least one further layer (10, 11, 20, 30) contains a desiccant which protects the thin glass film against stress corrosion cracking. The invention also relates to a method for storing a thin glass film by providing a thin glass film, applying at least one further layer (10, 11, 20, 30) over the surface of at least one side of the thin glass film, wherein a desiccant which protects the thin glass film against stress corrosion cracking is added to the at least one further layer (10, 11, 20, 30) and a thin glass composite composed of the thin glass film and the at least one further layer (10, 11, 20, 30) is rolled up in such a way that the at least one further layer (10, 11, 20, 30) is applied to a radially outer side of the rolled up thin glass film.