Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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2201/00
Manufacture or treatment of microstructural devices or systems
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B81C2201/0101
Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
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B81C2201/0102
Surface micromachining
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B81C2201/0109
Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
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