a first sloped portion that is provided between the first wall surface and the third wall surface includes a first constituting surface that extends in a third direction between the first direction and the second direction.

A liquid ejecting head in which a first electrode layer, a piezoelectric layer, and a second electrode layer of a piezoelectric element are laminated, a pressure chamber, which is partitioned by a partition wall, has an elongated shape, in a structure including the diaphragm and the piezoelectric element including an active portion and a non-active portion lateral direction, a first position is a position on an inner side of the active portion when viewed in the thickness direction, a second position is a position on an inner side of the non-active portion and closest to a boundary between the pressure chamber and the partition wall, and EI1/EI2≤40, wherein EI1 is a bending rigidity of the active portion at the first position and EI2 is a bending rigidity of the non-active portion at the second position.

A liquid ejecting head includes a pressure chamber substrate on which a plurality of spaces as pressure chambers are formed along a first direction; a nozzle substrate on which a plurality of nozzles which eject liquid are formed by corresponding to the pressure chamber; and a flow path substrate on which a plurality of communicating holes which communicate with the nozzle and the pressure chamber which corresponds to the nozzle are formed between the pressure chamber substrate and the nozzle substrate, in which both ends of each pressure chamber in a second direction are formed by being aligned at a predetermined position in the second direction, the nozzles which are adjacent in the first direction are formed so that positions thereof in the second direction are different, and the communicating holes which are adjacent in the first direction are formed so that positions in the second direction are different.

Provided are an MEMS device, a head, and a liquid jet device in which substrates are inhibited from warping, so that a primary electrode and a secondary electrode can be reliably connected to each other. Included are a primary substrate 30 provided with a bump 32 including a primary electrode 34, and a secondary substrate 10 provided with a secondary electrode 91 on a bottom surface of a recessed portion 36 formed by an adhesive layer 35. The primary substrate 10 and the secondary substrate 30 are joined together with the adhesive layer 35, the primary electrode 34 is electrically connected to the secondary electrode 91 with the bump 32 inserted into the recessed portion 36, and part of the bump 32 and the adhesive layer 35 forming the recessed portion 36 overlap each other in a direction in which the bump 32 is inserted into the recessed portion 36.

Systems and method of maintaining a uniform temperature distribution in an inkjet head. The inkjet head includes a plurality of ink channels that jet droplets of a liquid material onto a medium using piezoelectric actuators. A temperature controller includes a non-jetting pulse generator that provides non-jetting pulses to one or more of the piezoelectric actuators to generate heat. The non-jetting pulses cause the piezoelectric actuators to actuate without jetting a droplet from its corresponding ink channel.

A liquid ejection head, including: nozzles; and a supply passage through which a liquid is supplied to the nozzles, wherein the supply passage includes (a) a first flow passage and (b) a second flow passage connected to the first flow passage and including two sections that extend in different directions from a connected position at which the first flow passage is connected to the second flow passage, the liquid being supplied to the second flow passage from the first flow passage, wherein the second flow passage has a liquid flow resistance larger in a first section than in a second section, and wherein a protrusion protruding toward the first flow passage is provided on an inner wall surface of the second flow passage facing the first flow passage, for permitting the liquid to more easily flow from the first flow passage into the first section than the second section.

A jetting device includes an ejection unit arranged to eject a droplet of a liquid. The ejection unit includes a nozzle, a liquid duct connected to the nozzle, and an electro-mechanical transducer arranged to create an acoustic pressure wave in the liquid in the duct. The jetting device further includes a filter arranged to filter the liquid being supplied into the duct and a filter status detection system arranged to detect an obstruction status of the filter by measuring a property of the liquid in the duct. The filter status detection system includes a circuit configured for measuring the electric response of the transducer, for recording changes in the electric response that represent pressure fluctuations induced by the acoustic wave in the form of a time-dependent function, and for judging the obstruction status of the filter on the basis of that function.

A flow path structure which forms a flow path of liquid, includes: a light absorbing member (first substrate) having absorbing properties with respect to laser light; a light transmitting member (second substrate) which is joined to the light absorbing member and has transmitting properties with respect to the laser light; a first flow path (flow path) which is surrounded by a welding interface between the light absorbing member and the light transmitting member; and a second flow path which is formed in a flow path pipe (flow path pipe) which protrudes from a front surface opposite of the welding interface in the light transmitting member, and communicates with the first flow path, in which the flow path pipe is included in a region of the first flow path in a plan view from a direction orthogonal to the welding interface.

A piezoelectric device includes a diaphragm provided on a side of one surface of a substrate, and a piezoelectric actuator having a first electrode, a piezoelectric body layer, and a second electrode which are stacked in a first direction on a side of a surface opposite to the substrate of the diaphragm, in which when one area far from an end portion of the second electrode is a first area and one area near the end portion of the second electrode is a second area, of two areas of the second electrode in a second direction intersecting the first direction, the second electrode has a stiffness of 17,000 N/m or more in the second area in the first direction, which is higher than a stiffness in the first area in the first direction, and a length in the second area in the first direction is equal to or less than a length of the piezoelectric body layer in the second area in the first direction.

A piezoelectric actuator is disclosed that may include a insulating layer, individual electrodes, a common electrode, and a piezoelectric layer. The common electrode may include divisional electrodes that are connected with one another. The individual electrodes may be disposed between the insulating layer and the piezoelectric layer while the piezoelectric layer may be disposed between the individual electrodes and the common electrode. Further, the divisional electrodes may be configured to face the individual electrodes.