An inkjet head manufacturing method for an inkjet head that includes a head chip including: a nozzle ejecting ink; and a flow path substrate including an ink flow path which communicates with the nozzle and through which the ink flows, the method including: composite substrate manufacturing that is manufacturing a composite substrate including a plurality of regions which forms flow path substrates by being split; first protective film forming that is forming a first protective film on a surface of the composite substrate and an inner wall surface of the ink flow path; splitting that is splitting the composite substrate into the flow path substrates; and second protective film forming that is forming a second protective film on at least an exposed face in a split face of the flow path substrate generated in the splitting, the exposed face being exposed in a surface of the head chip.

There are provided a head chip, a liquid jet head, and a liquid jet recording device each capable of ensuring an electrical reliability, and enhancing the durability. The head chip according to an aspect of the present disclosure includes an actuator plate having ejection channels and non-ejection channels extending in a Z direction and arranged alternately in an X direction, and a nozzle plate which has nozzle holes respectively communicated with the ejection channels, and faces the actuator plate. The non-ejection channels are terminated at positions separated from a lower end surface of the actuator plate. The ejection channels open on a lower end surface of the actuator plate.

The trouble of removing a protective film such as a poly-paraxylene film from the part not requiring the protective film is reduced. A method of manufacturing a head chip according to an aspect of the present disclosure includes a substrate preparation step of preparing an actuator plate substrate having a jet channel communicated with a nozzle hole configured to jet ink, and a non-jet channel which does not jet the ink, and a protective film formation step of forming a protective film configured to protect a common electrode formed on an inner surface of the jet channel from the ink in a state in which the jet channel is exposed and the non-jet channel is covered after the substrate preparation step.

The head chip includes an actuator plate having ejection channels and non-ejection channels extending in a Y direction and arranged alternately in an X direction, an intermediate plate overlapped with the actuator plate in a Z direction, and provided with communication holes communicated with the ejection channels and through holes communicated with the non-ejection channels, and a nozzle plate overlapped with the intermediate plate in the Z direction in a state of closing the through holes, and provided with nozzle holes which are communicated with the communication holes, jet liquid contained in the ejection channels, and are formed at positions corresponding to the ejection channels. The non-ejection channels are communicated with an outside of the head chip. The through holes are each disposed at an inner side in the X direction of the inner surfaces extending in the Y direction of the non-ejection channel viewed from the Z direction.

There are provided a head chip, a liquid jet head, a liquid jet recording device, and a method of manufacturing the head chip each capable of preventing the short circuit of electrodes by ink to maintain an excellent ejection performance over a long period of time. The head chip according to an aspect of the present disclosure includes an actuator plate, a cover plate, and an intermediate plate. In the actuator plate, open apertures which communicate an inside and an outside of a non-ejection channel with each other are formed in both end portions of the non-ejection channel in a Y direction. In the actuator plate, open apertures which communicate an inside and an outside of a non-ejection channel with each other are formed in both end portions of the non-ejection channel in the Y direction.

A liquid discharge head includes a channel unit. The channel unit is formed therein with: a plurality of individual channels aligning in a first direction, a common channel extending in the first direction, a supply hole in communication with the common channel, and a damper chamber provided in a position overlapping with the supply hole in a second direction orthogonal to the first direction. The channel unit includes a first plate having a first surface where a recess is formed to constitute the damper chamber, and a second plate having a second surface attached to the first surface via an adhesive. A protrusion is provided on a bottom of such a first part of the recess as overlaps with the supply hole in the second direction.

A liquid ejection head includes a channel member, a pressurizing part, a cover member, and a sealing member. The channel member includes an ejection hole, a pressurizing chamber, an ejection hole surface, and a pressurizing chamber surface. The pressurizing chamber is connected with the ejection hole. The ejection hole surface is positioned on the ejection hole side. The pressurizing chamber surface is positioned on the pressurizing chamber side. The pressurizing part is positioned in a pressurizing region in the pressurizing chamber surface. The cover member stands on the channel member. The sealing member seals the cover member and the channel member. The channel member includes a groove positioned in the pressurizing chamber surface but outside the pressurizing region. The cover member is positioned in the groove. Further, the sealing member is positioned between a fixing portion in the cover member which is positioned in the groove and the groove.

An inkjet head includes a first and a second channel substrates. At least one of the first and the second channel substrates is formed of silicon. A bonding interface of the first and the second channel substrates is bonded via an adhesive layer. A protective film containing a compound having a Si—C bond is formed on: an ink channel surface formed of silicon among the first and the second channel substrates; and a surface of the channel substrate side formed of silicon in the adhesive layer.

There are provided a head chip, a liquid jet head, a liquid jet recording device, and a method of manufacturing the head chip each capable of preventing the short circuit of electrodes by ink to maintain an excellent ejection performance over a long period of time. The head chip according to an aspect of the present disclosure includes an actuator plate, a cover plate, and an intermediate plate. In the actuator plate, open apertures which communicate an inside and an outside of a non-ejection channel with each other are formed in both end portions of the non-ejection channel in a Y direction. In the actuator plate, open apertures which communicate an inside and an outside of a non-ejection channel with each other are formed in both end portions of the non-ejection channel in the Y direction.

A liquid discharge head includes a channel unit. The channel unit is formed therein with: a plurality of individual channels aligning in a first direction, a common channel extending in the first direction, a supply hole in communication with the common channel, and a damper chamber provided in a position overlapping with the supply hole in a second direction orthogonal to the first direction. The channel unit includes a first plate having a first surface where a recess is formed to constitute the damper chamber, and a second plate having a second surface attached to the first surface via an adhesive. A protrusion is provided on a bottom of such a first part of the recess as overlaps with the supply hole in the second direction.