Provided is a liquid ejection head substrate including: a substrate; a liquid ejection element that generates liquid ejection energy on the substrate; and an electrode pad that is electrically connected to the liquid ejection element, in which the electrode pad includes a barrier metal layer and a bonding layer on the barrier metal layer, and an end side surface of the barrier metal layer is covered with a silicon-based film containing carbon.

There is provided a liquid jetting apparatus, including: a first pressure chamber and a second pressure chamber arranged in a first direction; a first insulating film covering the first and second pressure chambers; a first piezoelectric element arranged to face the first pressure chamber with the first insulating film being intervened therebetween; a second piezoelectric element arranged to face the second pressure chamber with the first insulating film being intervened therebetween; a trace arranged between the first and the second piezoelectric elements adjacent to each other in the first direction; and a second insulating film covering the trace. An end, in the first direction, of a part of the second insulating film covering the trace between the first piezoelectric element and the second piezoelectric element is positioned inside an end of a partition wall partitioning the first pressure chamber and the second pressure chamber.

A liquid ejection head including: a substrate; an energy generating element, which is provided on the substrate and is utilized to eject liquid; a first film provided on the energy generating element; a flow path forming member, which has an ejection orifice from which the liquid is ejected and forms a flow path of the liquid between the substrate and the flow path forming member; and an electrode, which generates a flow of the liquid, wherein the electrode includes the first film.

According to examples, an apparatus may include a fluidic chamber, in which fluid is to be temporarily held. The apparatus may also include a heating component to generate heat to form a drive bubble in the fluid held in the fluidic chamber and a cavitation plate may be provided between the fluidic chamber and the heating component. The cavitation plate may be in communication with the fluidic chamber and may physically separate the fluidic chamber from the heating component to protect the heating component. In addition, a controller may determine a condition in the fluidic chamber based on an electrical signal received from the cavitation plate.

Provided is a method of manufacturing a liquid ejection head, which is capable of patterning a dry film while suppressing deformation of the dry film caused by a pressure. The method of manufacturing a liquid ejection head includes: preparing a substrate including an ejection orifice member on a first surface; forming, on an ejection orifice surface of the ejection orifice member, a protection film having communicating holes for allowing ejection orifices to communicate to outside; closing an opening of a supply port on a second surface on a side opposite to the first surface of the substrate with a dry film; and patterning the dry film by irradiating the dry film with light under a state in which the protection film is formed on the ejection orifice surface.

A droplet ejector for a printhead comprises: a substrate having a mounting surface and an opposite nozzle surface; at least one electronic component integrated with the substrate; a nozzle-forming layer formed on at least a portion of the nozzle surface of the substrate; a fluid chamber defined at least in part by the substrate and at least in part by the nozzle-forming layer, the fluid chamber having a fluid chamber outlet defined at least in part by a nozzle portion of the said nozzle-forming layer; a piezoelectric actuator formed on at least a portion of the nozzle portion of the nozzle-forming layer; and a protective layer covering the piezoelectric actuator and the in nozzle forming layer. The piezoelectric actuator comprises a piezoelectric body provided between first and second electrodes. At least one of the said first and second electrodes is electrically connected to the at least one electronic component. The piezoelectric body comprises one or more piezoelectric materials processable at a temperature below 450 C.

Provided is a coating liquid for forming a piezoelectric thin film containing lead zirconate titanate, the coating liquid including a complex precursor containing at least three kinds of metal elements of Pb, Ti, and Zr, the coating liquid being free from an exothermic peak at a temperature of 450 C. or more, or having a heat generation amount at a temperature of from 400 C. to 450 C., which is larger than a heat generation amount at a temperature of from 450 C. to 500 C., in differential thermal analysis of the coating liquid.

A nozzle plate includes, on a substrate: at least a base layer; an intermediate layer; and a liquid repellent layer. The base layer contains a silane coupling agent A having reactive functional groups at both terminals and including a hydrocarbon chain and a benzene ring at an intermediate part. The intermediate layer contains an inorganic oxide. The liquid repellent layer contains a fluorine (F)-containing coupling agent B.

A fluid ejection apparatus includes a plurality of fluid ejectors. Each fluid ejector includes a pumping chamber, and an actuator configured to cause fluid to be ejected from the pumping chamber. The fluid ejection apparatus includes a feed channel fluidically connected to each pumping chamber; and at least one compliant structure formed in a surface of the feed channel. The at least one compliant structure has a lower compliance than the surface of the feed channel.

An ink jet head includes a nozzle plate substrate having a nozzle for ejecting ink toward a recording medium and an oil repellent film on a surface of the nozzle plate substrate, the surface facing the recording medium. The oil repellent film includes a fluorine compound having a first end and a second end, the first end having a bonding group bonded to the nozzle plate substrate, the second end having a perfluoroalkyl group, and the bonding group being bonded to a bonding group of an adjacent fluorine compound bonded to the nozzle plate substrate.