A piezoelectric actuator includes a vibration portion, a support portion that is integrally configured with the vibration portion and supports the vibration portion, and a piezoelectric element that is disposed on the vibration portion. The piezoelectric element includes a piezoelectric film including columnar crystal grains extending in a thickness direction. When a thickness of the piezoelectric film is referred to as T [μm] and an average diameter of the crystal grains in the width direction is referred to as D [μm], T/D is within a range of 10 to 100. The thickness T of the piezoelectric film is larger than or equal to 2 μm. A standard deviation of diameters of the crystal grains in the width direction is less than or equal to 1.8 μm.

A piezoelectric body layer of a first area has (100) plane preferential orientation, and a (100) plane orientation ratio of the piezoelectric body layer of a second area is lower than a (100) plane orientation ratio of the piezoelectric body layer of the first area, when one area far from an end portion of a second electrode is the first area, and one area near the end portion of the second electrode is the second area, of two areas of the second electrode in a second direction intersecting a first direction.

A piezoelectric body that is driven to apply pressure to a liquid in the plurality of pressure chambers, and contains lead atoms, a first electrode that is provided on a first surface of two surfaces of the piezoelectric body, a second electrode that is provided on a second surface opposite to the first surface of the two surfaces of the piezoelectric body, a drive wiring that is electrically coupled to the first electrode and the second electrode, and applies a voltage for driving the piezoelectric body, a resistor that is formed of the same material as any of the first electrode, the second electrode, and the drive wiring to measure a temperature of the liquid in the plurality of pressure chambers, and a diffusion suppression layer that is provided between the resistor and the piezoelectric body to suppress diffusion of lead atoms contained in the piezoelectric body into the resistor.

A printhead module includes a plurality of rows of printhead nozzles, at least some of the rows including at least one displaced row portion, the displacement of the row portion including a component in a direction normal to that of a pagewidth to be printed, wherein the displaced row portions of at least some of the rows are different in length than the displaced row portions of at least some of the other rows.

A liquid ejecting head includes a piezoelectric element and a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including a first layer that contains SiO.sub.2 and a second layer that contains ZrO.sub.2 and that is stacked on the first layer. The second layer contains a first impurity element different from Zr, and the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer.

A liquid discharge head includes: a piezoelectric body including piezoelectric layers stacked in a stacking direction, the piezoelectric body including a first end and a second end that are separated in a first direction orthogonal to the stacking direction of the piezoelectric layers; individual electrodes positioned in a first plane orthogonal to the stacking direction; a first common electrode formed in a second plane that is orthogonal to the stacking direction and of which position in the stacking direction is different from a position of a neutral plane of the piezoelectric body in the staking direction and a position of the first plane in the staking direction; and a trace positioned in a third plane of which position in the stacking direction is different from a position of the first plane, the position of the second plane, and the position of the neutral plane.

A piezoelectric element according to the present disclosure includes: a first electrode; a piezoelectric layer formed at an upper part of the first electrode; and a second electrode formed at an upper part of the piezoelectric layer, in which the piezoelectric layer contains potassium, sodium, and niobium, and a Young's modulus of the piezoelectric layer measured by a nanoindentation method exceeds 130 GPa.

A piezoelectric element according to the present disclosure includes: a substrate; a first electrode formed on the substrate; a piezoelectric layer formed on the first electrode; and a second electrode formed on the piezoelectric layer, in which the piezoelectric layer contains potassium, sodium, niobium, oxygen, and carbon, and in secondary ion mass spectrometry in the piezoelectric layer, a ratio of a maximum intensity of carbon to a maximum intensity of oxygen is 3.1×10.sup.−3 or more and 9.1×10.sup.−3 or less.

A coating head includes: a plurality of nozzles; a plurality of pressure chambers communicating with the plurality of nozzles; an ink flow path communicating with the plurality of pressure chambers; and a coating layer that is at least partially provided on liquid contact surfaces of the plurality of nozzles, the plurality of pressure chambers, and the ink flow path.

A piezoelectric device includes: a substrate having a plurality of recesses; a vibration plate provided on one side of the substrate; and a piezoelectric actuator including layers of first electrodes, a piezoelectric layer, and a second electrode provided in this order on the vibration plate side, and the piezoelectric actuator has a plurality of active portions including the first electrode, the second electrode, and the piezoelectric layer held between the first electrode and the second electrode, the first electrode serves as an individual electrode individually provided for each active portion, the second electrode serves as a common electrode shared by the plurality of active portions, and the second electrode includes a first end portion serving as a reference and a protruding portion protruding from an end portion of the active portion beyond the first end portion toward a coupling electrode electrically coupled to the first electrode.