A liquid discharge head comprising a silicon substrate; an insulating layer A formed on a first surface of the silicon substrate, a protective layer A that includes metal oxide and is formed on the insulating layer A, the structure that is formed on the protective layer A by direct contact with the protective layer A, includes organic resin, and forms a part of a flow path for liquid, and an element that is formed on a second surface of the silicon substrate on a side opposite to the first surface, and is configured to generate energy used for discharging the liquid.

A method for manufacturing a structure includes, preparing a substrate with a recessed portion provided therein, attaching a film including a photosensitive resin layer containing photosensitive resin therein and a support layer to the substrate to cover the recessed portion with the photosensitive resin layer, irradiating the photosensitive resin layer covering the recessed portion with light via the support layer to form a latent image pattern on the photosensitive resin layer, heating the photosensitive resin layer at 30 degrees Celsius or higher and X degrees Celsius or lower for one minute or longer, wherein a softening point of the photosensitive resin is X degrees Celsius (X≧30), separating the support layer from the photosensitive resin layer, heating the photosensitive resin layer at X+10 degrees Celsius or higher, and carrying out development on the photosensitive resin layer.

A piezoelectric device includes a diaphragm, a piezoelectric actuator, and an orientation layer between the diaphragm and the piezoelectric layer. The piezoelectric actuator has a first electrode, a piezoelectric layer, and a second electrode, with the first electrode, a piezoelectric layer, and a second electrode on the diaphragm. The orientation layer is a stack of two or more tiers.

A liquid discharge head includes a nozzle plate, a substrate, a diaphragm, and a piezoelectric element. The nozzle plate includes a nozzle from which liquid is discharged. The substrate is disposed on the nozzle plate and includes a pressure chamber communicating with the nozzle. The diaphragm is disposed on a first side of the substrate opposite a second side of the substrate on which the nozzle plate is disposed, the diaphragm constituting one wall of the pressure chamber. The piezoelectric element is disposed on the diaphragm to deform the diaphragm to discharge liquid in the pressure chamber from the nozzle. The piezoelectric element includes a first electrode, a piezoelectric film, and a second electrode. The first electrode is disposed on the diaphragm. The piezoelectric film is disposed on the first electrode.

A head includes the passageway member which is configured by a plurality of plates stacked through the adhesive and in which the ink passageways are configured by communication of the through holes individually formed in the plurality of plates to each other. The plurality of plates includes the resin plate and a plurality of metal plates. The resin plate does not have a relief groove for the adhesive. The plurality of metal plates include the eighth metal plate and/or ninth metal plate which is adhered to the resin plate and includes the relief groove for the adhesive on the resin plate side.

A method of printing, including providing a fluid ejection device that includes a substrate, a plurality of drive units formed on the substrate, each drive unit including at least two drive elements electrically coupled in parallel, and a plurality of fluid ejection elements disposed on the substrate, each fluid ejection element of the plurality of fluid ejection elements electrically coupled with a single respective drive unit. Electrical power is selectively supplied via the plurality of drive units to the plurality of fluid ejection elements to cause fluid to be expelled from the fluid ejection device based on image data.

There is provided a method of producing an electromechanical transducer that includes a plurality of electromechanical transducer elements on a substrate. The method includes forming a plurality of individual electrodes corresponding to the plurality of electromechanical transducer elements on the substrate, forming an insulation film to cover the plurality of individual electrodes on the substrate, forming a conductive film on the insulation film, forming a plurality of openings to expose the plurality of individual electrodes in each of the insulation film and the conductive film, and forming a plurality of electromechanical transducer films on the plurality of individual electrodes exposed in the plurality of openings.

A piezoelectric actuator includes: a plurality of discrete electrodes, which is disposed on one side of a piezoelectric element; a common electrode, which is disposed on the other side of the piezoelectric element; a plurality of discrete contacts, which are respectively connected to the plurality of discrete electrodes, and wherein the plurality of discrete electrodes include: a first discrete electrode; and a second discrete electrode, which is disposed at a position away from a corresponding discrete contact as compared with the first discrete electrode, wherein the common electrode includes: a first common electrode, which faces the first discrete electrode in the thickness direction; and a second common electrode, which is separated from the first common electrode in the surface direction and faces the second discrete electrode in the thickness direction, and wherein a connection wiring is provided to connect the first common electrode with the second common electrode.

A conduction structure includes a device substrate (third substrate) including a conductive portion, an IC (second substrate) including an upper surface, an end surface inclined toward the upper surface, and a conductive portion (second conductive portion), a sealing plate (first substrate) including an upper surface, an end surface (first side wall portion) inclined toward the upper surface, and a conductive portion (first conductive portion), and plating layers that respectively form electrical connections between a conductive portion and a conductive portion and between a conductive portion and the conductive portion.

A liquid ejecting head includes a flow path substrate configuring a side face of a pressure chamber in communication with a nozzle through which a liquid is ejected, a diaphragm including a first face joined to the flow path substrate and a second face on an opposite side of the diaphragm to the first face, and a drive device provided on the second face and configured to change pressure in the pressure chamber. A corner of the side face of the pressure chamber includes a curved face having a center of curvature positioned in the pressure chamber in plan view, a recess is formed in the first face, and the pressure chamber is positioned inside the recess in plan view.