Patent classifications
C01B33/04
TRIPHENYLGERMYLSILANE AND TRICHLOROSILYL-TRICHLOROGERMANE FOR THE PRODUCTION OF GERMANIUM-SILICON LAYERS, AND METHOD FOR THE PRODUCTION THEREOF FROM TRICHLOROSILYL-TRIPHENYLGERMANE
Triphenylgermylsilane (Ph.sub.3GeSiH.sub.3) is useful for the production of germanium-silicon layers (GeSi) or as transfer agent of silane groups (SiH.sub.3). Further, a method describes the production of triphenylgermylsilane (Ph.sub.3GeSiH.sub.3) by reducing trichlorosilyltriphenylgermane (Ph.sub.3GeSiCl.sub.3) with a hydride in solution, and another method describes the production of trichlorosilyltrichlorogermane (C.sub.3GeSiCl.sub.3) by reacting trichlorosilyltriphenylgermane (Ph.sub.3GeSiCl.sub.3) with hydrogen chloride (HCl) in the presence of AlCl.sub.3 in solution. In addition, trichlorosilyltrichlorogermane is also used for the production of germanium-silicon layers (GeSi).
TRIPHENYLGERMYLSILANE AND TRICHLOROSILYL-TRICHLOROGERMANE FOR THE PRODUCTION OF GERMANIUM-SILICON LAYERS, AND METHOD FOR THE PRODUCTION THEREOF FROM TRICHLOROSILYL-TRIPHENYLGERMANE
Triphenylgermylsilane (Ph.sub.3GeSiH.sub.3) is useful for the production of germanium-silicon layers (GeSi) or as transfer agent of silane groups (SiH.sub.3). Further, a method describes the production of triphenylgermylsilane (Ph.sub.3GeSiH.sub.3) by reducing trichlorosilyltriphenylgermane (Ph.sub.3GeSiCl.sub.3) with a hydride in solution, and another method describes the production of trichlorosilyltrichlorogermane (C.sub.3GeSiCl.sub.3) by reacting trichlorosilyltriphenylgermane (Ph.sub.3GeSiCl.sub.3) with hydrogen chloride (HCl) in the presence of AlCl.sub.3 in solution. In addition, trichlorosilyltrichlorogermane is also used for the production of germanium-silicon layers (GeSi).
Hydrogenated silane composition
At least one embodiment of the present disclosure provides a hydrogenated silane composition containing a cyclic hydrogenated silane having high storage stability. The at least one embodiment of the present disclosure relates to a hydrogenated silane composition, wherein a content ratio of a linear hydrogenated silane having Si atoms of 5 or less to a cyclic hydrogenated silane having Si atoms of 5 to 7 is 0.009 or less, wherein the cyclic hydrogenated silane comprises at least cyclohexasilane, and further comprises at least one cyclic hydrogenated silane having a branched silyl group selected from silylcyclopentasilane and silylcyclohexasilane, and wherein a content ratio of a total of the silylcyclopentasilane and the silylcyclohexasilane to the cyclic hydrogenated silane having Si atoms of 5 to 7 is 10 ppb or more on a mass basis.
Hydrogenated silane composition
At least one embodiment of the present disclosure provides a hydrogenated silane composition containing a cyclic hydrogenated silane having high storage stability. The at least one embodiment of the present disclosure relates to a hydrogenated silane composition, wherein a content ratio of a linear hydrogenated silane having Si atoms of 5 or less to a cyclic hydrogenated silane having Si atoms of 5 to 7 is 0.009 or less, wherein the cyclic hydrogenated silane comprises at least cyclohexasilane, and further comprises at least one cyclic hydrogenated silane having a branched silyl group selected from silylcyclopentasilane and silylcyclohexasilane, and wherein a content ratio of a total of the silylcyclopentasilane and the silylcyclohexasilane to the cyclic hydrogenated silane having Si atoms of 5 to 7 is 10 ppb or more on a mass basis.
Hydrogenated silane composition
At least one embodiment of the present disclosure provides a hydrogenated silane composition containing cyclohexasilane of a cyclic hydrogenated silane having high storage stability. The at least one embodiment of the present disclosure relates to a hydrogenated silane composition, wherein a content ratio of normal hexasilane and silylcyclopentasilane to cyclohexasilane is 0.0020 or less on a mass basis.
Hydrogenated silane composition
At least one embodiment of the present disclosure provides a hydrogenated silane composition containing cyclohexasilane of a cyclic hydrogenated silane having high storage stability. The at least one embodiment of the present disclosure relates to a hydrogenated silane composition, wherein a content ratio of normal hexasilane and silylcyclopentasilane to cyclohexasilane is 0.0020 or less on a mass basis.
High efficiency synthesis and purification recycling system of higher silane
The high-efficiency synthesis and purification recycling system of higher silane has a liquid nitrogen cooling system. The liquid nitrogen cooling system has a liquid nitrogen storage tank for being configured to distribute 196 C. liquid nitrogen via a first cooling tube to the hydrogen column and the mono-silane column for a first cooling process; a second cooling tube is configured to distribute 160 C. nitrogen after the first cooling process into the first distillation column, the second distillation column, the third distillation column and the recycling drum for a second cooling process, a third cooling tube is configured to distribute 30 C. nitrogen after the second cooling process into the disilane drum for a third cooling process, and a fourth cooling tube is configured to distribute 25 C. nitrogen after the third cooling process into the silicon particle disposal system for a blowback regeneration process and to generate an anaerobic environment.
DIIODOSILANE PRODUCING METHOD
Industrial-scale production of diiodosilane through reaction between phenylsilane and iodine is safely and efficiently performed. Provided is a diiodosilane producing method wherein reaction is started between phenylsilane and iodine at a low temperature, the method including at least the step of, after dropping and mixing step finishes, pumping a reaction solution little by little continuously while raising a temperature thereof.
PROCESS FOR PRODUCING LIQUID POLYSILANES AND ISOMER ENRICHED HIGHER SILANES
Synthesis of silanes with more than three silicon atoms are disclosed (i.e., (Si.sub.nH.sub.(2n+2) with n=4-100). More particularly, the disclosed synthesis methods tune and optimize the isomer ratio by selection of process parameters such as temperature, residence time, and the relative amount of starting compounds, as well as selection of proper catalyst. The disclosed synthesis methods allow facile preparation of silanes containing more than three silicon atoms and particularly, the silanes containing preferably one major isomer. The pure isomers and isomer enriched mixtures are prepared by catalytic transformation of silane (SiH.sub.4), disilane (Si.sub.2H.sub.6), trisilane (Si.sub.3H.sub.8), and mixtures thereof.
PROCESS FOR PRODUCING LIQUID POLYSILANES AND ISOMER ENRICHED HIGHER SILANES
Synthesis of silanes with more than three silicon atoms are disclosed (i.e., (Si.sub.nH.sub.(2n+2) with n=4-100). More particularly, the disclosed synthesis methods tune and optimize the isomer ratio by selection of process parameters such as temperature, residence time, and the relative amount of starting compounds, as well as selection of proper catalyst. The disclosed synthesis methods allow facile preparation of silanes containing more than three silicon atoms and particularly, the silanes containing preferably one major isomer. The pure isomers and isomer enriched mixtures are prepared by catalytic transformation of silane (SiH.sub.4), disilane (Si.sub.2H.sub.6), trisilane (Si.sub.3H.sub.8), and mixtures thereof.