The disclosure provides, inter alia, formulations comprising cerium (III) carbonate, and processes for producing cerium (III) carbonate. In embodiments, the disclosure provides methods for passivating photodegradation of organic compounds using cerium (III) carbonate.

The disclosure provides, inter alia, formulations comprising cerium (III) carbonate, and processes for producing cerium (III) carbonate. In embodiments, the disclosure provides methods for passivating photodegradation of organic compounds using cerium (III) carbonate.

An electrostatic chuck is provided, the electrostatic chuck includes a base; and an insulating layer, an electrode layer, a first dielectric layer, and a second dielectric layer sequentially stacked on the base. The first dielectric layer is aluminum oxide (Al.sub.2O.sub.3) or aluminum nitride (AlN). A material of the second dielectric layer is different from a material of the first dielectric layer, and the second dielectric layer includes titanium element, IVA group element, and oxygen element.

An electrostatic chuck is provided, the electrostatic chuck includes a base; and an insulating layer, an electrode layer, a first dielectric layer, and a second dielectric layer sequentially stacked on the base. The first dielectric layer is aluminum oxide (Al.sub.2O.sub.3) or aluminum nitride (AlN). A material of the second dielectric layer is different from a material of the first dielectric layer, and the second dielectric layer includes titanium element, IVA group element, and oxygen element.

A metal oxide film-forming containing a tertiary alkyloxycarbonyl group-modified bisnaphthol fluorene compound represented by formula (1), a metal compound represented by formula L(R.sup.6).sub.n1(O).sub.n2, and a solvent. In the formulas, ring Z.sup.1 represents a naphthalene ring; R.sup.1a and R.sup.1b represent a halogen atom; R.sup.2a and R.sup.2b represent an alkyl group; R.sup.3a to R.sup.5b represent an alkyl group having 1 to 8 carbon atoms; k1 and k2 represent an integer of 0 to 4; m1 and m2 represent an integer of 0 to 6; R.sup.6 is OR.sup.7; R.sup.7 represents an organic group having 1 to 30 carbon atoms; n1 and n2 represent an integer of 0 or larger; and n1+2×n2 represents a valence depending on the type of L; and L represents Al

##STR00001##

A metal oxide film-forming containing a tertiary alkyloxycarbonyl group-modified bisnaphthol fluorene compound represented by formula (1), a metal compound represented by formula L(R.sup.6).sub.n1(O).sub.n2, and a solvent. In the formulas, ring Z.sup.1 represents a naphthalene ring; R.sup.1a and R.sup.1b represent a halogen atom; R.sup.2a and R.sup.2b represent an alkyl group; R.sup.3a to R.sup.5b represent an alkyl group having 1 to 8 carbon atoms; k1 and k2 represent an integer of 0 to 4; m1 and m2 represent an integer of 0 to 6; R.sup.6 is OR.sup.7; R.sup.7 represents an organic group having 1 to 30 carbon atoms; n1 and n2 represent an integer of 0 or larger; and n1+2×n2 represents a valence depending on the type of L; and L represents Al

##STR00001##

A metal oxide film-forming composition containing an organooxy group-containing aromatic hydrocarbon ring-modified fluorene compound represented by formula (1), a metal compound represented by formula L(R.sup.6).sub.n1(O).sub.n2, and a solvent. In the formulas, ring Z.sup.1 represents an aromatic hydrocarbon ring, R.sub.1a and R.sup.1b each represents a halogen atom, a cyano group, or an alkyl group, R.sup.2a and R.sup.2b each represents an alkyl group, R.sup.3a and R.sup.3b each represents a tertiary alkyloxycarbonyl group, k1 and k2 each represent an integer between 0 and 4 inclusive, m1 and m2 each represent an integer between 0 and 6 inclusive, R.sup.6 represents OR.sup.7, R.sup.7 represents an organic group having 1 to 30 carbon atoms, n1 and n2 each represent an integer of 0 or larger, n1+2×n2 is a valence depending on the type of L, and L represents Al, Ga, Y, Ti, Zr, Hf, Bi, Sn, V, or Ta

##STR00001##

A metal oxide film-forming composition containing an organooxy group-containing aromatic hydrocarbon ring-modified fluorene compound represented by formula (1), a metal compound represented by formula L(R.sup.6).sub.n1(O).sub.n2, and a solvent. In the formulas, ring Z.sup.1 represents an aromatic hydrocarbon ring, R.sub.1a and R.sup.1b each represents a halogen atom, a cyano group, or an alkyl group, R.sup.2a and R.sup.2b each represents an alkyl group, R.sup.3a and R.sup.3b each represents a tertiary alkyloxycarbonyl group, k1 and k2 each represent an integer between 0 and 4 inclusive, m1 and m2 each represent an integer between 0 and 6 inclusive, R.sup.6 represents OR.sup.7, R.sup.7 represents an organic group having 1 to 30 carbon atoms, n1 and n2 each represent an integer of 0 or larger, n1+2×n2 is a valence depending on the type of L, and L represents Al, Ga, Y, Ti, Zr, Hf, Bi, Sn, V, or Ta

##STR00001##

The present application provides a heat exchanger and a manufacturing method of a heat exchanger. The heat exchange includes a metal substrate having a fluid channel for circulating a heat exchange medium. The heat exchanger includes a coating having a rare earth conversion coating and a hydrophilic coating. The rare earth conversion coating is arranged to cover at least part of a surface of the metal substrate, and the rare earth conversion coating includes a rare earth element-containing compound. At least part of the hydrophilic coating is further away from the metal substrate than the rare earth conversion coating. A surface of the heat exchanger is hydrophilic, which is conducive to the discharge of condensate water, and can improve corrosion resistance and prolong a service life of the heat exchanger.

The present application provides a heat exchanger and a manufacturing method of a heat exchanger. The heat exchange includes a metal substrate having a fluid channel for circulating a heat exchange medium. The heat exchanger includes a coating having a rare earth conversion coating and a hydrophilic coating. The rare earth conversion coating is arranged to cover at least part of a surface of the metal substrate, and the rare earth conversion coating includes a rare earth element-containing compound. At least part of the hydrophilic coating is further away from the metal substrate than the rare earth conversion coating. A surface of the heat exchanger is hydrophilic, which is conducive to the discharge of condensate water, and can improve corrosion resistance and prolong a service life of the heat exchanger.