A method of producing bi-modal particles includes the steps of igniting a first precursor gas using a primary burner thereby producing a first plurality of particles of a first size, fluidly transporting the first plurality of particles down a particle tube, igniting a second precursor gas using a secondary burner thereby producing a second plurality of particles of a second size, flowing the second plurality of particles into the first plurality of particles, and capturing the first and second plurality of particles.

A method includes impregnating a region of a glass sheet with a filler material in a liquid state. The glass sheet includes a plurality of glass soot particles. The filler material is solidified subsequent to the impregnating step to form a glass/filler composite region of the glass sheet.

Laser waveguides, methods and systems for forming a laser waveguide are provided. The waveguide includes an inner cladding layer surrounding a central axis and a glass core surrounding and located outside of the inner cladding layer. The glass core includes a laser-active material. The waveguide includes an outer cladding layer surrounding and located outside of the glass core. The inner cladding, outer cladding and/or core may surround a hollow central channel or bore and may be annular in shape.

A glass substrate for a high-frequency device, which contains SiO.sub.2 as a main component, the glass substrate having a total content of alkali metal oxides in the range of 0.001-5% in terms of mole percent on the basis of oxides, the alkali metal oxides having a molar ratio represented by Na.sub.2O/(Na.sub.2O+K.sub.2O) in the range of 0.01-0.99, and the glass substrate having a total content of alkaline earth metal oxides in the range of 0.1-13% in terms of mole percent on the basis of oxides, wherein at least one main surface of the glass substrate has a surface roughness of 1.5 nm or less in terms of arithmetic average roughness Ra, and the glass substrate has a dielectric dissipation factor at 35 GHz of 0.007 or less.

A glass substrate for a high-frequency device, which contains SiO.sub.2 as a main component, the glass substrate having a total content of alkali metal oxides in the range of 0.001-5% in terms of mole percent on the basis of oxides, the alkali metal oxides having a molar ratio represented by Na.sub.2O/(Na.sub.2O+K.sub.2O) in the range of 0.01-0.99, and the glass substrate having a total content of alkaline earth metal oxides in the range of 0.1-13% in terms of mole percent on the basis of oxides, wherein at least one main surface of the glass substrate has a surface roughness of 1.5 nm or less in terms of arithmetic average roughness Ra, and the glass substrate has a dielectric dissipation factor at 35 GHz of 0.007 or less.

An object of the present invention is to provide a technique capable of obtaining a shower plate having cleaning resistance without machining. The present invention relates to a silica glass porous body having a plurality of pores, in which the plurality of pores includes a non-communication pore and a communication pore, and the pores have an average pore size, obtained by mercury intrusion porosimetry, of 10 m to 150 m.

A manufacturing apparatus of porous glass base material includes deposition apparatuses that manufacture a porous glass base material by generating raw material particles from vaporized raw material compounds in an oxyhydrogen flame, and then depositing the generated raw material particles on a rotating starting material. The manufacturing apparatus includes a storage container that stores liquid raw material compounds for each compound, a vapor generation mechanism that vaporizes the raw material compounds, and a gas channel that supplies the vaporized raw material compounds to the deposition apparatuses. The gas channel includes a common gas channel shared to supply vaporized raw material compounds to the plurality of deposition apparatuses, and individual gas channels branched off from the common gas channel to supply vaporized raw material compounds to each of the deposition apparatuses individually. Each of the individual gas channels has a flow controller, a steam valve, and a valve.

Provided is a manufacturing apparatus for manufacturing a soot deposition body, including a main burner that deposits glass microparticles on a target rod while moving parallel to a longitudinal direction of the target rod; and a side burner that is positioned outside of a movement range of the main burner in a movement direction of the main burner, and fires an end portion of the soot deposition body formed on the target rod. The side burner includes a plurality of heating burners arranged distanced from each other in a circumferential direction of the target rod. In the manufacturing apparatus described above, the main burner may include a plurality of deposition burners that are arranged distanced from each other in the circumferential direction of the target rod.

A system and process for making a thin, soot particle or glass sheet is provided. The system includes a soot deposition plate having a deposition surface and a glass soot generating device spaced from the deposition surface along a first axis. The glass soot generating device is configured to generate glass soot particles and to deliver the glass soot particles through an outlet and on to the deposition surface in a layer having a thickness of less than 5 mm. At least one of the soot deposition plate and the glass soot generating device is movable to cause relative movement between the deposition surface of the soot deposition plate and the glass soot generating device. A thin soot or sintered soot sheet is also provided. The soot sheet has a variable surface topography that varies along at least two axes.

A method includes impregnating a region of a glass sheet with a filler material in a liquid state. The glass sheet includes a plurality of glass soot particles. The filler material is solidified subsequent to the impregnating step to form a glass/filler composite region of the glass sheet.