Provided is a method for producing a glass preform for optical fiber which suppresses occurrences of cracks, coloring and foaming in a surface layer when sintering a glass fine particle deposit to allow a production yield to be improved. A method for producing a glass preform for optical fiber comprising the steps of: spraying glass fine particles containing silicon dioxide and germanium dioxide to a starting material moving upward while rotating to produce a glass fine particle deposit; and sintering the glass fine particle deposit while relatively varying a positional relationship between a heating source and the glass fine particle deposit in a sintering apparatus to produce a transparent glass preform, wherein a germanium dioxide reducing gas is contained in an atmosphere gas in the sintering apparatus.

In the method for manufacturing a glass-fine-particle-deposited body according to the present invention, at least a part of a gas supplying pipe 25 from a temperature controlled booth 24 to a burner 18 for cladding is temperature-controlled so that the temperature at the burner side becomes high and temperature gradient becomes 5 C./m or more. The temperature control is performed so that the temperature gradient becomes preferably 15 C./m or more, more preferably 25 C./m or more. Specifically, the part is controlled to the predetermined temperature gradient by winding a tape heater 26 that is a heating element on the outer circumference of the gas supplying pipe 25 from the temperature controlled booth 24 to the burner 18 for cladding and temperature-controlling the tape heater 26.

A glass particle deposit producing method capable of preventing the variation in the outside diameter of a glass particle deposit and enhancing the yield of a glass raw material is provided. A glass particle deposit is produced by mounting a starting rod 11 and a glass particle generating burner 22 inside a reaction vessel 2, introducing a glass raw material into the burner 22, subjecting the glass raw material to a flame decomposition reaction inside a flame formed by the burner 22 to generate glass particles, and depositing the generated glass particles on the starting rod 11. At this time, the dispersion angle of the glass raw material jetted from the burner 22 with respect to the center axis of the burner 22 is set to the range of 5 to 70 degrees.

In the method for manufacturing a glass-fine-particle-deposited body according to the present invention, at least a part of a gas supplying pipe 25 from a temperature controlled booth 24 to a burner 18 for cladding is temperature-controlled so that the temperature at the burner side becomes high and temperature gradient becomes 5 C./m or more. The temperature control is performed so that the temperature gradient becomes preferably 15 C./m or more, more preferably 25 C./m or more. Specifically, the part is controlled to the predetermined temperature gradient by winding a tape heater 26 that is a heating element on the outer circumference of the gas supplying pipe 25 from the temperature controlled booth 24 to the burner 18 for cladding and temperature-controlling the tape heater 26.

Titania-doped quartz glass is manufactured by mixing a silicon-providing reactant gas and a titanium-providing reactant gas, preheating the reactant gas mixture at 200-400 C., and subjecting the mixture to oxidation or flame hydrolysis. A substrate of the glass is free of concave defects having a volume of at least 30,000 nm.sup.3 in an effective region of the EUV light-reflecting surface and is suited for use in the EUV lithography.

A soot glass deposit body is manufactured by placing a starting rod and a burner 22 for producing glass particulates in a reaction container, introducing a source material gas to the burner 22 through a supplying pipe 26, producing glass particulates by a pyrolytic oxidation reaction of the source material gas in a flame formed by the burner 22, and depositing the produced glass particulates on the starting rod. At the time, the source material gas to be supplied to the burner 22 is a siloxane, the burner 22 is heated so that temperature of the burner 22 falls within the range of from 30 C. to +30 C. relative to the boiling point of the siloxane, and also temperature of the supplying pipe is controlled within the range of from the boiling point of the siloxane to the boiling point plus 30 C.

A process for producing a glass body, the process including flowing oxygen gas from a burner in a furnace at a flow rate of greater than 12.0 standard liters per minute and flowing a precursor gas mixture from the burner. The process further including oxidizing the precursor gas mixture with the oxygen gas to form glass particles and depositing the glass particles on a collection cup to form the glass body.