Glass-based articles that include a compressive stress layer extending from a surface of the glass-based article to a depth of compression are formed by exposing glass-based substrates to water vapor containing environments. The glass-based substrates have compositions selected to be fusion formable, to be steam strengthen able, and to avoid the formation of platinum defects during the forming process. The methods of forming the glass-based articles may include elevated pressures and/or multiple exposures to water vapor containing environments.

A glass substrate for EUVL includes a first main surface having a rectangular shape; a second main surface having a rectangular shape on an opposite side to the first main surface; four end surfaces orthogonal to the first and second main surfaces; four first chamfered surfaces formed on boundaries between the first main surface and the end surfaces; and four second chamfered surfaces formed on boundaries between the second main surface and the end surfaces. The glass substrate for EUVL is formed of quartz glass containing TiO.sub.2. The end surfaces include fluorine (F) and an element (A) other than fluorine that forms a gas cluster with fluorine, and satisfy relations:

S1=∫.sub.0.sup.x=50[nm]{D1(x)−(a1x+b1)}dx>0.2  (1)

S2=∫.sub.0.sup.x=50[nm]{D2(x)−(a2x+b2)}dx>0.03  (2)

Glass-based articles that include a hydrogen-containing layer extending from the surface of the article to a depth of layer. The hydrogen-containing layer includes a hydrogen concentration that decreases from a maximum hydrogen concentration to the depth of layer. The glass-based articles exhibit a high Vickers indentation cracking threshold. Glass compositions that are selected to promote the formation of the hydrogen-containing layer and methods of forming the glass-based article are also provided.

In some implementations, a carbon-containing glass material includes a surface-to-air interface and an interphase region extending from the surface-to-air interface along a direction to a depth within the carbon-containing glass material. The surface-to-air interface may be exposed to ambient air, and the interphase region may include a plurality of few layer graphene (FLG) nanoplatelets formed in response to recombination and/or self-nucleation of a plurality of carbon-containing radicals implanted within the interphase region. The FLG nanoplatelets have a non-periodic orientation configured to at least partially inhibit formation or propagation of microcracks and/or micro-voids in the carbon-containing glass material. The glass material may also include a compressive stress layer disposed between the interphase region and the surface-to-air interface of the carbon-containing glass material, the compressive stress layer induced by ion bombardment of the carbon-containing glass material by a plurality of ionized inert gas particles.

Glass-based articles that include a hydrogen-containing layer extending from the surface of the article to a depth of layer. The hydrogen-containing layer includes a hydrogen concentration that decreases from a maximum hydrogen concentration to the depth of layer. The glass-based articles exhibit a high Vickers indentation cracking threshold. Glass compositions that are selected to promote the formation of the hydrogen-containing layer and methods of forming the glass-based article are also provided.

Glass-based articles that include a hydrogen-containing layer extending from the surface of the article to a depth of layer. The hydrogen-containing layer includes a hydrogen concentration that decreases from a maximum hydrogen concentration to the depth of layer. The glass-based articles exhibit a high Vickers indentation cracking threshold. Glass compositions that are selected to promote the formation of the hydrogen-containing layer and methods of forming the glass-based article are also provided.

Glass-based articles that include a compressive stress layer extending from a surface of the glass-based article to a depth of compression are formed by exposing glass-based substrates to water vapor containing environments. The glass-based substrates have compositions selected to avoid the formation of haze during the treatment process. The methods of forming the glass-based articles may include elevated pressures and/or multiple exposures to water vapor containing environments selected to avoid the formation of haze during the treatment process.

Glass-based articles that include a hydrogen-containing layer extending from the surface of the article to a depth of layer. The hydrogen-containing layer includes a hydrogen concentration that decreases from a maximum hydrogen concentration to the depth of layer. The glass-based articles exhibit a high Vickers indentation cracking threshold. Glass compositions that are selected to promote the formation of the hydrogen-containing layer and methods of forming the glass-based article are also provided.

Glass-based articles that include a compressive stress layer extending from a surface of the glass-based article to a depth of compression are formed by exposing glass-based substrates to water vapor containing environments. The glass-based substrates have compositions selected to be fusion formable, to be steam strengthen able, and to avoid the formation of platinum defects during the forming process. The methods of forming the glass-based articles may include elevated pressures and/or multiple exposures to water vapor containing environments.

Glass-based articles that include a compressive stress layer extending from a surface of the glass-based article to a depth of compression are formed by exposing glass-based substrates to water vapor containing environments. The glass-based substrates have compositions selected to avoid the formation of haze during the treatment process. The methods of forming the glass-based articles may include elevated pressures and/or multiple exposures to water vapor containing environments selected to avoid the formation of haze during the treatment process.