A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.

A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.

The present disclosure relates to the technical field of ceramic powder preparation, and discloses a zirconia/titania/cerium oxide doped rare earth tantalum/niobate RETa/NbO.sub.4 ceramic powder and a preparation method thereof. A general chemical formula of the ceramic powder is RE.sub.1-x(Ta/Nb).sub.1-x(Zr/Ce/Ti).sub.2xO.sub.4, 0<x<1, the crystal structure of the ceramic powder is orthorhombic, the lattice space group of the ceramic powder is C222.sub.1, the particle size of the ceramic powder ranges from 10 to 70 μm, and particles of the ceramic powder are spherical. During preparation, the raw materials are ball-milled before a high temperature solid phase reaction, then mixed with a solvent and an organic binder to obtain a slurry C, then centrifuged and atomized to obtain dry pellets, and finally sintered to obtain a zirconia/titanium oxide/cerium oxide doped rare earth tantalum/niobate RETa/NbO.sub.4 ceramic powder, which satisfies the requirements of APS technology for ceramic powders.

A dielectric composition includes main phases and Ca-RE-Si—O segregation phases. The main phases include a main component expressed by ABO.sub.3. “A” includes at least one selected from barium and calcium. “B” includes at least one selected from titanium and zirconium. “RE” represents at least one of rare earth elements. A molar ratio of (Si/Ca) is larger than one. A molar ratio of (Si/RE) is larger than one, provided that the molar ratio of (Si/RE) is a molar ratio of silicon included in the segregation phases to the rare earth elements included therein. An average length of major axes of the segregation phases is 1.30-2.80 times as large as an average particle size of the main phases. An average length of minor axes of the segregation phases is 0.21-0.48 times as large as an average particle size of the main phases.

A dielectric composition includes main phases and Ca-RE-Si—O segregation phases. The main phases include a main component expressed by ABO.sub.3. “A” includes at least one selected from barium and calcium. “B” includes at least one selected from titanium and zirconium. “RE” represents at least one of rare earth elements. A molar ratio of (Si/Ca) is larger than one. A molar ratio of (Si/RE) is larger than one, provided that the molar ratio of (Si/RE) is a molar ratio of silicon included in the segregation phases to the rare earth elements included therein. An average length of major axes of the segregation phases is 1.30-2.80 times as large as an average particle size of the main phases. An average length of minor axes of the segregation phases is 0.21-0.48 times as large as an average particle size of the main phases.

An oxide sintered body may include zinc, magnesium, a positive trivalent or positive tetravalent metal element X, and oxygen as constituent elements. The atomic ratio of the metal element X to the sum of the zinc, the magnesium, and the metal element X [X/(Zn+Mg+X)] may be 0.0001 or more and 0.6 or less. The atomic ratio of the magnesium to the sum of the zinc and the magnesium [Mg/(Zn+Mg)] may be 0.25 or more and 0.8 or less.

A Li ion conductor includes a garnet-type composite metal oxide phase (L) containing Li, La, Zr, and O. The Li ion conductor has a diffraction peak at least one of at 2θ=13.8° ±1° and at 2θ=15.2° ±1° in X-ray diffraction measurement using CuKa rays. The Li ion conductor may have a metal-containing phase (K) different from the garnet-type composite metal oxide phase (L), and the metal-containing phase (K) contains a halogen element and Li.

Disclosed herein is a ceramic particle comprising a core substrate chosen from yttria-stabilized zirconia, partially stabilized zirconia, zirconium oxide, aluminum nitride, silicon nitride, silicon carbide, and cerium oxide, and a conformal coating of a sintering aid film having a thickness of less than three nanometers and covering the core substrate, and methods for producing the ceramic particle.

Provided are a composite oxide powder from which dense solid electrolyte objects having a high ion conductivity can be produced and a method for producing the composite oxide powder. The composite oxide powder is composed of particles comprising lithium (Li), lanthanum (La), zirconium (Zr), and oxygen (O) and having a cubic garnet-type crystal structure, and has a volume particle size distribution in which the 50% diameter (D50) is 1,000 nm or smaller, the composite oxide powder having a pyrochlore phase content of 10 mass % or less.

Provided are a composite oxide powder from which dense solid electrolyte objects having a high ion conductivity can be produced and a method for producing the composite oxide powder. The composite oxide powder is composed of particles comprising lithium (Li), lanthanum (La), zirconium (Zr), and oxygen (O) and having a cubic garnet-type crystal structure, and has a volume particle size distribution in which the 50% diameter (D50) is 1,000 nm or smaller, the composite oxide powder having a pyrochlore phase content of 10 mass % or less.