C04B37/003

Manufacturing method of ceramic electrostatic chuck

The present invention provides a method for manufacturing a ceramic electrostatic chuck which enables high purity and minimum thickness variation of a dielectric layer formed of ceramics or composite ceramics. The method includes: forming grooves for electrode pattern formation in a dielectric layer formed of ceramics or composite ceramics and having a density of 95% or greater; forming an electrode pattern by filling the grooves with a metal; forming an activated bonding layer configured for joining on the dielectric layer; and joining an insulator layer, which is formed of ceramics or composite ceramics and has a density of 95% or greater, with the dielectric layer.

Method for joining a ceramic friction element to a piezoceramic element

The invention relates to a method for joining a ceramic friction element (11) to a piezoelectric element (1), comprising, among other things, the following steps: pressing (14) a joining surface (10) of the friction element and a contact surface (9) of the piezoelectric element against each other with a low-melting glass mass (12) arranged therebetween and maintaining the pressing force for all subsequent steps; heating (17) the piezoelectric element and the friction element to a defined temperature above the Curie point of the piezoceramic material of the piezoelectric element and above the melting point of the low-melting glass mass; thereafter, while maintaining the temperature, applying an electric polarization voltage Up to electrodes of the piezoelectric element; removing the polarization voltage after the Curie point has been fallen below; and cooling the piezoelectric element and the friction element to room temperature without an electric voltage being applied to the electrodes.

Electrostatic Chuck For Clamping In High Temperature Semiconductor Processing And Method Of Making Same

An electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C. The top surface may be sapphire. The top surface is attached to the lower portion of the electrostatic chuck using a braze layer able to withstand corrosive processing chemistries. A method of manufacturing an electrostatic chuck with a top surface adapted for Johnsen-Rahbek clamping in the temperature range of 500 C to 750 C

High temperature interfaces for ceramic composites

An article for a high temperature environment includes a first ceramic composite substrate, a second ceramic composite substrate, and a high temperature interface between a first surface of the first ceramic composite substrate and a second surface of the second ceramic composite substrate. The high temperature interface includes at least one high temperature interface layer that includes a ceramic matrix and a plurality of fibers distributed through the ceramic matrix.

CERAMIC JOINED BODY AND METHOD FOR MANUFACTURING SAME
20200346984 · 2020-11-05 ·

A ceramic joined body includes a first aluminum oxide-based sintered body, a second aluminum oxide-based sintered body, an aluminum oxide-based joint layer located between the first aluminum oxide-based sintered body and the second aluminum oxide-based sintered body, and an aluminum oxide-based protrusion connected to the aluminum oxide-based joint layer, where the average diameter for closed pores of the aluminum oxide-based projection is 0.8 times or more and 1.5 times or less as large as the average diameter for closed pores for each of the first aluminum oxide-based sintered body and the second aluminum oxide-based sintered body.

HONEYCOMB STRUCTURE AND METHOD FOR PRODUCING HONEYCOMB STRUCTURE

A honeycomb structure including a plurality of porous honeycomb block bodies bound via joining material layers A. Each of the porous honeycomb block bodies includes a plurality of porous honeycomb segments bound via joining material layers B, each of the porous honeycomb segment includes: partition walls that defines a plurality of cells to form flow paths for a fluid, each of cells extending from an inflow end face that is an end face on a fluid inflow side to an outflow end face that is an end face on a fluid outflow side; and an outer peripheral wall located at the outermost periphery. At least a part of the joining material layers A has higher toughness than that of the joining material layers B.

METHOD FOR PRODUCING HONEYCOMB STRUCTURE

A method for producing a honeycomb structure for fine particle collection filters, the honeycomb structure including a plurality of porous honeycomb structure segments. The method includes joining each of the porous honeycomb segments via a joining material layers by applying a joining material between joining surfaces of each of the porous honeycomb structure segments, through a nozzle portion of a joining material applicator. The nozzle portion of the joining material applicator includes: a joining material introduction port; a joining material discharge space; and a joining material flow path having a bent portion, through which the joining material passes from the joining material introduction port to the joining material discharge space. The joining material flow path of the nozzle portion includes a buffer space configured such that a flow path cross section gradually expands toward the joining material discharge space on a downstream side of the bent portion.

SUPERHARD CONSTRUCTIONS & METHODS OF MAKING SAME
20200262761 · 2020-08-20 · ·

A super hard polycrystalline construction has a first region having a body of thermally stable polycrystalline super hard material with an exposed surface forming a working surface, and a peripheral side edge, a second region forming a substrate to the first region and a third region interposed between the first and second regions. The third region extends across a surface of the second region along an interface and has a composite material having a first phase comprising a plurality of non-intergrown diamond grains, the majority of the diamond grains having a coating comprising nano-sized BN particles. There is also disclosed a method of making such a construction.

Methods for repairing composite cylinders

Methods for repairing composite cylindrical components are provided. One exemplary method for repairing a cylindrical component defining an axial direction, a radial direction, and a circumferential direction includes removing a damaged region of the cylindrical component. A flange extending from a cylindrical body of the cylindrical component is included in the damaged region. One or more arc segments that extend along the circumferential direction are connected with the existing cylindrical component. At least one of the arc segments includes a prefabricated flange. One or more plies are laid up to connect the arc segments with the existing cylindrical component to repair the damaged region of the cylindrical body and the prefabricated flange formed integrally with one of the arc segments replaces the damaged portion of the flange. Repaired cylindrical components are also provided.

Compound Monolithic 3-D Fused FHD/S Products and Method
20200231508 · 2020-07-23 ·

Fused, monolithic 3-D products of high-SiO2-containing body materials, called FHD/S, cut to pattern, mating surfaces honed or polished, assembled with mating surfaces in contact, and fusion fired until the contacting parts fuse without added flux. Fused FHD/S products may be used unglazed, or glaze may be applied to selected fused surfaces and then glaze fired. FHD/S body materials may include colorants so that the fused parts exhibit color contrast and variation when used without glazing. Examples include countertops having integral fused vertical back-splashes and front edges, and bowls fused to openings. The inventive 3-D monolithic fused FHD/S products are produced in standard sizes or as custom-fit interior and exterior products that are stain resistant, moisture impervious, UV resistant, acid resistant, dimensionally stable, abrasion and impact resistant, and may be glazed to produce unique decorative and utilitarian surfaces in a wide range of colors and textures, including artistic, one-of-a-kind 3-D works.