Disclosed is a fluorination method comprising providing an aryl fluorosulfonate and a fluorinating reagent to a reaction mixture; and reacting the aryl fluorosulfonate and the fluorinating reagent to provide a fluorinated aryl species. Also disclosed is a fluorination method comprising providing, a salt comprising a cation and an aryloxylate, and SO.sub.2F.sub.2 to a reaction mixture; reacting the SO.sub.2F.sub.2 and the ammonium salt to provide a fluorinated aryl species. Further disclosed a fluorination method comprising providing a compound having the structure Ar—OH to a reaction mixture; where Ar is an aryl or heteroaryl; providing SO.sub.2F.sub.2 to the reaction mixture; providing a fluorinating reagent to the reaction mixture; reacting the SO.sub.2F.sub.2, the fluorinating reagent and the compound having the structure Ar—OH to provide a fluorinated aryl species having the structure Ar—F.

The invention relates to a process for the preparation of 5-bromo-1,3-dichloro-2-fluoro-benzene by diazotization and reduction of 6-bromo-2,4-dichloro-3-fluoro-aniline, which is obtained by bromination of 2,4-dichloro-3-fluoro-aniline, which is obtained by reduction of 1,3-dichloro-2-fluoro-4-nitro-benzene, and a process for preparing active compounds of formula V (Formula V) wherein the variables are defined in the specification by further transforming 5-bromo-1,3-dichloro-2-fluoro-benzene obtained from 2,4-dichloro-3-fluoro-aniline by the process according to the invention.

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The present invention relates to a process for modifying the fluorine distribution in a hydrocarbon compound, comprising a step of making contact between said hydrocarbon compound and a catalytic composition comprising a chromium-based catalyst, said process being performed in a reactor made of a material comprising a base layer made of a material M1 and an inner layer made of a material M2, said base layer and said inner layer being laid against each other by bonding.

The present invention relates to a process for modifying the fluorine distribution in a hydrocarbon compound, comprising a step of making contact between said hydrocarbon compound and a catalytic composition comprising a chromium-based catalyst, said process being performed in a reactor made of a material comprising a base layer made of a material M1 and an inner layer made of a material M2, said base layer and said inner layer being laid against each other by bonding.

The invention relates to a process for the preparation of 5-bromo-1,3-dichloro-2-fluoro-benzene by diazotization and reduction of 6-bromo-2,4-dichloro-3-fluoro-aniline, which is obtained by bromination of 2,4-dichloro-3-fluoro-aniline, which is obtained by reduction of 1,3-dichloro-2-fluoro-4-nitro-benzene, and a process for preparing active compounds of formula V (Formula V) wherein the variables are defined in the specification by further transforming 5-bromo-1,3-dichloro-2-fluoro-benzene obtained from 2,4-dichloro-3-fluoro-aniline by the process according to the invention. ##STR00001##

The invention relates to a process for the preparation of 5-bromo-1,3-dichloro-2-fluoro-benzene by diazotization and reduction of 6-bromo-2,4-dichloro-3-fluoro-aniline, which is obtained by bromination of 2,4-dichloro-3-fluoro-aniline, which is obtained by reduction of 1,3-dichloro-2-fluoro-4-nitro-benzene, and a process for preparing active compounds of formula V (Formula V) wherein the variables are defined in the specification by further transforming 5-bromo-1,3-dichloro-2-fluoro-benzene obtained from 2,4-dichloro-3-fluoro-aniline by the process according to the invention. ##STR00001##

The invention relates to a new industrial process for manufacturing of perfluoropen-tane (PFP), and to the manufacture of a novel intermediate compound thereof, as well as to the novel intermediate compound itself and the use thereof in the process for manu-facturing of perfluoropentane (PFP). Accordingly, the invention relates to a process for the manufacture of the compound PFP (perfluoropentane), and/or of the compound perfluorinated 4-methylbutyrolactone, i.e., the precursor or intermediate compound of PFP (perfluoropentane), characterized in that the process comprises direct fluorination reaction with F2 gas as the fluorination agent, and/or from the fluorination reaction with SF4 as the fluorination agent. The present invention provides an efficient and simplified new industrial process for manufacturing of perfluoropentane (PFP) and/or of the compound perfluorinated 4-methylbutyrolactone, and preferably enabling large-scale and/or industrial production of perfluoropentane (PFP) and/or of the compound perfluorinated 4-methylbutyrolactone by means of special equipment and special reactor design.

The invention relates to a new industrial process for manufacturing of perfluoropen-tane (PFP), and to the manufacture of a novel intermediate compound thereof, as well as to the novel intermediate compound itself and the use thereof in the process for manu-facturing of perfluoropentane (PFP). Accordingly, the invention relates to a process for the manufacture of the compound PFP (perfluoropentane), and/or of the compound perfluorinated 4-methylbutyrolactone, i.e., the precursor or intermediate compound of PFP (perfluoropentane), characterized in that the process comprises direct fluorination reaction with F2 gas as the fluorination agent, and/or from the fluorination reaction with SF4 as the fluorination agent. The present invention provides an efficient and simplified new industrial process for manufacturing of perfluoropentane (PFP) and/or of the compound perfluorinated 4-methylbutyrolactone, and preferably enabling large-scale and/or industrial production of perfluoropentane (PFP) and/or of the compound perfluorinated 4-methylbutyrolactone by means of special equipment and special reactor design.

A dry etching method according to one embodiment of the present disclosure includes plasmatizing a dry etching agent and etching a silicon oxide or a silicon nitride with the plasmatized dry etching agent, wherein the dry etching agent comprises CF.sub.3I and a C2-C3 fluorine-containing linear nitrile compound, and wherein the concentration of the C2-C3 fluorine-containing linear nitrile compound relative to the CF.sub.3I is higher than or equal to 1 vol. ppm and lower than or equal to 1 vol %.

Disclosed are mono-substituted cyclopentadienes, metal cyclopentadienyl complexes and methods for synthesizing them. The disclosed mono-substituted cyclopentadienes are synthesized by a selective catalytic carbon-carbon coupling reaction. The disclosed metal cyclopentadienyl complexes are synthesized from the disclosed mono-substituted cyclopentadienes. The disclosed metal cyclopentadienyl complexes include main group metal and transition metal cyclopentadienyl complexes, and may be used as deposition precursors contained in film forming compositions for film depositions in semiconductor industry, such as ALD, CVD, SOD, etc.