Patent classifications
C07C303/32
PHOTOACID-GENERATING MONOMER, POLYMER DERIVED THEREFROM, PHOTORESIST COMPOSITION INCLUDING THE POLYMER, AND METHOD OF FORMING A PHOTORESIST RELIEF IMAGE USING THE PHOTORESIST COMPOSITION
A monomer has the structure
##STR00001##
wherein R is an organic group comprising a polymerizable carbon-carbon double bond or carbon-carbon triple bond; X and Y are independently at each occurrence hydrogen or a non-hydrogen substituent; EWG1 and EWG2 are independently at each occurrence an electron-withdrawing group; p is 0, 1, 2, 3, or 4; n is 1, 2, 3, or 4; and M.sup.+ is an organic cation. A polymer prepared from monomer is useful as a component of a photoresist composition.
PHOTOACID-GENERATING MONOMER, POLYMER DERIVED THEREFROM, PHOTORESIST COMPOSITION INCLUDING THE POLYMER, AND METHOD OF FORMING A PHOTORESIST RELIEF IMAGE USING THE PHOTORESIST COMPOSITION
A monomer has the structure
##STR00001##
wherein R is an organic group comprising a polymerizable carbon-carbon double bond or carbon-carbon triple bond; X and Y are independently at each occurrence hydrogen or a non-hydrogen substituent; EWG1 and EWG2 are independently at each occurrence an electron-withdrawing group; p is 0, 1, 2, 3, or 4; n is 1, 2, 3, or 4; and M.sup.+ is an organic cation. A polymer prepared from monomer is useful as a component of a photoresist composition.
METHOD FOR RECYCLING TAURINE MOTHER LIQUOR
The present disclosure relates to a method for recycling a taurine mother liquor, which includes: adding a base to the taurine mother liquor, heating to a first temperature, carrying out a hydrolysis reaction, removing ammonia produced, and evaporating and concentrating the ammonia-removed solution to obtain an alkali metal hydroxyethyl sulfonate solution. When applying the method provided by the present disclosure for the recycling of the taurine mother liquor, the taurine mother liquor can be further converted into the alkali metal hydroxyethyl sulfonate solution, impurities are removed from the obtained alkali metal hydroxyethyl sulfonate solution, the impurity-removed alkali metal hydroxyethyl sulfonate solution is concentrated and crystallized, and the alkali metal hydroxyethyl sulfonate is separated out. The method provided by the present disclosure is an efficient and simple method for recycling the taurine mother liquor, which is very easy to implement industrially and can effectively recycle the taurine mother liquor.
METHOD FOR RECYCLING TAURINE MOTHER LIQUOR
The present disclosure relates to a method for recycling a taurine mother liquor, which includes: adding a base to the taurine mother liquor, heating to a first temperature, carrying out a hydrolysis reaction, removing ammonia produced, and evaporating and concentrating the ammonia-removed solution to obtain an alkali metal hydroxyethyl sulfonate solution. When applying the method provided by the present disclosure for the recycling of the taurine mother liquor, the taurine mother liquor can be further converted into the alkali metal hydroxyethyl sulfonate solution, impurities are removed from the obtained alkali metal hydroxyethyl sulfonate solution, the impurity-removed alkali metal hydroxyethyl sulfonate solution is concentrated and crystallized, and the alkali metal hydroxyethyl sulfonate is separated out. The method provided by the present disclosure is an efficient and simple method for recycling the taurine mother liquor, which is very easy to implement industrially and can effectively recycle the taurine mother liquor.
METHOD FOR RECYCLING TAURINE MOTHER LIQUOR
The present disclosure relates to a method for recycling a taurine mother liquor, which includes: adding a base to the taurine mother liquor, heating to a first temperature, carrying out a hydrolysis reaction, removing ammonia produced, and evaporating and concentrating the ammonia-removed solution to obtain an alkali metal hydroxyethyl sulfonate solution. When applying the method provided by the present disclosure for the recycling of the taurine mother liquor, the taurine mother liquor can be further converted into the alkali metal hydroxyethyl sulfonate solution, impurities are removed from the obtained alkali metal hydroxyethyl sulfonate solution, the impurity-removed alkali metal hydroxyethyl sulfonate solution is concentrated and crystallized, and the alkali metal hydroxyethyl sulfonate is separated out. The method provided by the present disclosure is an efficient and simple method for recycling the taurine mother liquor, which is very easy to implement industrially and can effectively recycle the taurine mother liquor.
Salt, quencher, resist composition and method for producing resist pattern, and method for producing salt
Disclosed are a salt represented by formula (I), and a method for producing the salt, and a quencher and a resist composition comprising the same: ##STR00001## wherein R.sup.1 and R.sup.2 each represent a hydrocarbon group, and —CH.sub.2— included in the hydrocarbon group may be replaced by —O— or —CO—; R.sup.3, R.sup.4 and R.sup.5 each represent a halogen atom, an alkyl fluoride group or a hydrocarbon group, and —CH.sub.2— included in the hydrocarbon group may be replaced by —O— or —CO—; m3 represents an integer of 0 to 2, and when m3 is 2, two R.sup.3 may be the same or different from each other; and m4 and m5 represent an integer of 0 to 5, and when m4 and/or m5 is/are 2 or more, a plurality of R.sup.4 and/or a plurality of R.sup.5 may be the same or different from each other.
Sulfonium salt photoinitiator, preparation method therefor, photocurable composition comprising sulfonium salt photoinitiator, and use thereof
The present invention provides a sulfonium salt photoinitiator, a preparation method therefor, a photocurable composition comprising sulfonium salt photoinitiator, and use thereof. The sulfonium salt photoinitiator has a structure represented by formula (I). By modifying the structure of an existing sulfonium salt photoinitiator, a sulfonium salt photoinitiator having a new structure is obtained, which can exhibits a higher photosensitivity and an excellent as well as characteristics of low odor and low toxicity, when being used in a photocurable composition. This is significantly superior to existing similar photoinitiators. ##STR00001##
Sulfonium salt photoinitiator, preparation method therefor, photocurable composition comprising sulfonium salt photoinitiator, and use thereof
The present invention provides a sulfonium salt photoinitiator, a preparation method therefor, a photocurable composition comprising sulfonium salt photoinitiator, and use thereof. The sulfonium salt photoinitiator has a structure represented by formula (I). By modifying the structure of an existing sulfonium salt photoinitiator, a sulfonium salt photoinitiator having a new structure is obtained, which can exhibits a higher photosensitivity and an excellent as well as characteristics of low odor and low toxicity, when being used in a photocurable composition. This is significantly superior to existing similar photoinitiators. ##STR00001##
METHOD FOR PREPARING TAURINE AND METHOD FOR RECOVERING MOTHER LIQUOR THEREOF
The present disclosure relates to a method for preparing taurine and a method for recovering a mother liquor thereof. The method for recovering the taurine mother liquor comprises: providing a taurine mother liquor, and mixing the taurine mother liquor and a treating agent to obtain a solid-containing suspension, wherein the treating agent is a water-soluble organic solvent or a mixture of the water-soluble organic solvent and water; filtering the suspension to obtain a first solid product and a first filtrate; and dissolving the first solid product with an ammonia source, and then filtering same to obtain a second solid product and a second filtrate.
METHOD FOR PREPARING TAURINE AND METHOD FOR RECOVERING MOTHER LIQUOR THEREOF
The present disclosure relates to a method for preparing taurine and a method for recovering a mother liquor thereof. The method for recovering the taurine mother liquor comprises: providing a taurine mother liquor, and mixing the taurine mother liquor and a treating agent to obtain a solid-containing suspension, wherein the treating agent is a water-soluble organic solvent or a mixture of the water-soluble organic solvent and water; filtering the suspension to obtain a first solid product and a first filtrate; and dissolving the first solid product with an ammonia source, and then filtering same to obtain a second solid product and a second filtrate.