A surface treatment method of a Si element-containing wafer including, during a cleaning process of the wafer, forming a water-repellent protective film on at least the recess portion of the uneven pattern by supplying a vapor of a composition containing a water-repellent protective film-forming component and a solvent in a state that a liquid is retained in at least the recess portion of the uneven pattern, changing the vapor of the composition into a liquid and replacing the liquid retained in the recess portion with the liquid of the composition. The water-repellent protective film-forming component consists of a compound of formula [1], and the solvent contains at least an acyclic carbonate.
R.sup.1.sub.x(CH.sub.3).sub.3-xSiN(R.sup.2).sub.2  [1]
R.sup.1 is selected from the group consisting of a H and a C.sub.1-C.sub.10 hydrocarbon group; x is an integer of 1 to 3; and R.sup.2 is each independently a group selected from the group consisting of methyl, ethyl and acetyl.

A surface treatment method of a Si element-containing wafer including, during a cleaning process of the wafer, forming a water-repellent protective film on at least the recess portion of the uneven pattern by supplying a vapor of a composition containing a water-repellent protective film-forming component and a solvent in a state that a liquid is retained in at least the recess portion of the uneven pattern, changing the vapor of the composition into a liquid and replacing the liquid retained in the recess portion with the liquid of the composition. The water-repellent protective film-forming component consists of a compound of formula [1], and the solvent contains at least an acyclic carbonate.
R.sup.1.sub.x(CH.sub.3).sub.3-xSiN(R.sup.2).sub.2  [1]
R.sup.1 is selected from the group consisting of a H and a C.sub.1-C.sub.10 hydrocarbon group; x is an integer of 1 to 3; and R.sup.2 is each independently a group selected from the group consisting of methyl, ethyl and acetyl.

A soil-resistant fiber fabric having excellent water/oil repellency and excellent soil dirt resistance is obtained by fixing colloidal silica to a fiber fabric, and by subsequently treating the fiber fabric with a water/oil repellent fluorine compound, thereby having the water/oil repellent fluorine compound adhere to a surface of the fiber fabric.

Provided is a water repellent coating film, including: an undercoat layer formed on a surface of a base material and containing: at least one type of spherical particles having an average particle diameter of 2 μm or more and 50 μm or less and selected from the group consisting of spherical molten silica particles, spherical molten alumina particles, and spherical silicone resin particles; and an underlying resin; and a topcoat layer formed on the undercoat layer and containing: inorganic fine particles having an average particle diameter of 2 nm or more and 20 nm or less; and a water repellent resin. The underlying resin is preferably a polyurethane resin or a fluororesin. The water repellent resin is preferably a fluororesin or a silicone resin.

To provide a fluorinated ether compound capable of forming a surface layer excellent in initial water/oil repellency, fingerprint stain removability, abrasion resistance and light resistance; a fluorinated ether composition and a coating liquid containing the fluorinated ether compound; an article having a surface layer excellent in initial water/oil repellency, fingerprint stain removability, abrasion resistance and light resistance and a method for producing it. A fluorinated ether compound having a poly(oxyperfluoroalkylene) chain having a unit (α) which is an oxyperfluoroalkylene unit having 5 or 6 carbon atoms, and a unit (β) which is an oxyperfluoroalkylene unit having at most 4 carbon atoms, and having at least one of a hydrolysable silyl group and a silanol group on at least one terminal of the poly(oxyperfluoroalkylene) chain via a linking group.

To provide a fluorinated ether compound capable of forming a surface layer excellent in initial water/oil repellency, fingerprint stain removability, abrasion resistance and light resistance; a fluorinated ether composition and a coating liquid containing the fluorinated ether compound; an article having a surface layer excellent in initial water/oil repellency, fingerprint stain removability, abrasion resistance and light resistance and a method for producing it. A fluorinated ether compound having a poly(oxyperfluoroalkylene) chain having a unit (α) which is an oxyperfluoroalkylene unit having 5 or 6 carbon atoms, and a unit (β) which is an oxyperfluoroalkylene unit having at most 4 carbon atoms, and having at least one of a hydrolysable silyl group and a silanol group on at least one terminal of the poly(oxyperfluoroalkylene) chain via a linking group.

Provided are a fluorine-containing ether compound that can form a surface layer that excels in durability and a method of manufacturing the same, a fluorine-containing ether composition and a coating liquid, and an article having a surface layer that excels in durability and a method of manufacturing the same. A fluorine-containing ether compound is expressed by the following formula (A1) or (A2):

{R.sup.fO—(R.sup.f1O).sub.m1—(R.sup.1).sub.m2—(CHF).sub.m3—O—(CHF).sub.m4}.sub.n1-Q.sup.1(-T.sup.1).sub.n2   Formula (A1)

(T.sup.2).sub.n3-Q.sup.2-(CHF).sub.m5—O—(CHF).sub.m6—(R.sup.2).sub.m7—O—(R.sup.f2O).sub.m8—(R.sup.3).sub.m9—(CHF).sub.m10—O—(CHF).sub.m11-Q.sup.3(-T.sup.3).sub.n4  Formula (A2), in the above, the symbols in the formulas are as described in the specification.

The purpose of the present invention is to provide an antifogging coating composition which is capable of forming an antifogging coating film that firmly adheres to the surfaces of various base materials including a plastic base material without causing appearance changes such as water drip marks, said antifogging coating film exhibiting antifogging effects for a long period of time. The present invention provides an antifogging coating composition which contains: elongated colloidal silica; and a silane derivative compound mixture that contains at least a silane derivative compound which has a polyethylene glycol chain in each molecule and a silane derivative compound which has an epoxy group in each molecule.

The purpose of the present invention is to provide an antifogging coating composition which is capable of forming an antifogging coating film that firmly adheres to the surfaces of various base materials including a plastic base material without causing appearance changes such as water drip marks, said antifogging coating film exhibiting antifogging effects for a long period of time. The present invention provides an antifogging coating composition which contains: elongated colloidal silica; and a silane derivative compound mixture that contains at least a silane derivative compound which has a polyethylene glycol chain in each molecule and a silane derivative compound which has an epoxy group in each molecule.

Please substitute the new Abstract submitted herewith for the original Abstract: The present disclosure provides a surface treatment agent capable of not only being prepared by dissolving raw materials in a short time but also exerting a good water repellency imparting effect, and a method for manufacturing a surface treated body with the use of the surface treatment agent. The surface treatment agent according to the present disclosure includes the following components: (I) at least one kind selected from the group consisting of silicon compounds represented by the following formulas (1) and (2); (II) at least one kind selected from the group consisting of a nitrogen-containing heterocyclic compound represented by the following general formula (3), a nitrogen-containing heterocyclic compound represented by the following general formula (4) and imidazole; (III) an organic solvent; and (IV) at least one kind selected from the group consisting of silicon compounds represented by the following formulas (5) and (6).

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