Certain systems comprise a reactor (e.g., a reduction cell such as an electrolytic cell comprising an anode, a cathode, and an electrolyte) comprising molten metal within a container; and a collection vessel at least partially contained within the container of the reactor, the collection vessel comprising an opening fluidically connected to the container of the reactor. Some systems comprise a reactor; and a collection vessel comprising a first opening fluidically connected to the reactor and a second opening fluidically connected to a source of gas (e.g., inert gas) and to a source of negative pressure.

Systems and methods for recovery of molten metal are generally described. Certain systems comprise a reactor (e.g., a reduction cell such as an electrolytic cell comprising an anode, a cathode, and an electrolyte) comprising molten metal within a container; and a collection vessel at least partially contained within the container of the reactor, the collection vessel comprising an opening fluidically connected to the container of the reactor. Some systems comprise a reactor; and a collection vessel comprising a first opening fluidically connected to the reactor and a second opening fluidically connected to a source of gas (e.g., inert gas) and to a source of negative pressure.

A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.

A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.

A method of fabricating a low alloy steel ingot, the method including a) melting all or part of an electrode by a vacuum arc remelting method, the electrode, before melting, including iron and carbon, the melted portion of the electrode being collected in a crucible, thus forming a melt pool within the crucible; and b) solidifying the melt pool by heat exchange between the melt pool and a cooling fluid, the heat exchange applied serving to impose a mean solidification speed during step b) that is less than or equal to 45 m/s and to obtain an ingot of low alloy steel.

A method of fabricating a low alloy steel ingot, the method including a) melting all or part of an electrode by a vacuum arc remelting method, the electrode, before melting, including iron and carbon, the melted portion of the electrode being collected in a crucible, thus forming a melt pool within the crucible; and b) solidifying the melt pool by heat exchange between the melt pool and a cooling fluid, the heat exchange applied serving to impose a mean solidification speed during step b) that is less than or equal to 45 m/s and to obtain an ingot of low alloy steel.

Provided is a high purity tin (Sn) having an extremely low oxygen content. A high purity tin having a tin purity of 5N (99.999% by mass, provided that carbon, nitrogen, oxygen and hydrogen are excluded) or more, wherein the high purity tin has an oxygen content of less than 10 ppb by mass, as measured by elemental analysis using Dynamic-SIMS.

Provided is a high purity tin (Sn) having an extremely low oxygen content. A high purity tin having a tin purity of 5N (99.999% by mass, provided that carbon, nitrogen, oxygen and hydrogen are excluded) or more, wherein the high purity tin has an oxygen content of less than 10 ppb by mass, as measured by elemental analysis using Dynamic-SIMS.

A method of recycling a waste of an HSS processing process includes a pre-treating step of pre-treating the waste of the HSS processing process, a primary melting step of forming a primary melt by primarily melting at least one of ferro molybdenum, ferro tungsten, and ferro cobalt and the pre-treated waste of the HSS processing process at 1500 to 2500 degrees Celsius (? C.), and a preparing step of preparing the HSS master alloy by ingot casting the primary melt, wherein the pre-treating step includes: a separating step of separating the waste of the HSS processing process according to a composition, and a mixing step of forming a mixture by mixing oxides containing at least one of K.sub.2O, CaO, MgO, SiO.sub.2, Al.sub.2O.sub.3, and Fe.sub.2O.sub.3 and the separated waste of the HSS processing process with each other, the mixture having a melting point of 800 to 1700? C.

A method of fabricating a low alloy steel ingot, the method including a) melting all or part of an electrode by a vacuum arc remelting method, the electrode, before melting, including iron and carbon, the melted portion of the electrode being collected in a crucible, thus forming a melt pool within the crucible; and b) solidifying the melt pool by heat exchange between the melt pool and a cooling fluid, the heat exchange applied serving to impose a mean solidification speed during step b) that is less than or equal to 45 m/s and to obtain an ingot of low alloy steel.