A component for a mirror array for EUV lithography, particularly for use in faceted mirrors in illumination systems of EUV lithography devices. A component (500) for a mirror array for EUV lithography is proposed which is at least partially made from a composite material including matrix material (502) that contains copper and/or aluminium, and reinforcing material in the form of fibers (504). The composite material also includes particles (508) that consist of one or more of the materials from the group: graphite, adamantine carbon, and ceramic.

A component for a mirror array for EUV lithography, particularly for use in faceted mirrors in illumination systems of EUV lithography devices. A component (500) for a mirror array for EUV lithography is proposed which is at least partially made from a composite material including matrix material (502) that contains copper and/or aluminium, and reinforcing material in the form of fibers (504). The composite material also includes particles (508) that consist of one or more of the materials from the group: graphite, adamantine carbon, and ceramic.

A component for a mirror array for EUV lithography, particularly for use in faceted mirrors in illumination systems of EUV lithography devices. A component (500) for a mirror array for EUV lithography is proposed which is at least partially made from a composite material including matrix material (502) that contains copper and/or aluminium, and reinforcing material in the form of fibers (504). The composite material also includes particles (508) that consist of one or more of the materials from the group: graphite, adamantine carbon, and ceramic.

A compactor is disclosed for use with an additive manufacturing print head. The compactor may include a housing connectable to the additive manufacturing print head. The compactor may also include a compacting wheel, and at least one spring disposed in the housing and configured to exert an axial force on the compacting wheel. The compactor may further include a piston moveable to adjust a distance between the housing and the compacting wheel.

A compactor is disclosed for use with an additive manufacturing print head. The compactor may include a housing connectable to the additive manufacturing print head. The compactor may also include a compacting wheel, and at least one spring disposed in the housing and configured to exert an axial force on the compacting wheel. The compactor may further include a piston movable to adjust a distance between the housing and the compacting wheel.

A method includes fabricating a part out of composite material including fiber reinforcement densified by a metal matrix.

A method includes fabricating a part out of composite material including fiber reinforcement densified by a metal matrix.

A composition of the wear-resistant material of the present invention includes high-temperature resistant skeleton metal materials, ceramic fiber materials and ceramic particle materials with the mass ratio of (10-60):(1-30):(10-70). The high-temperature resistant skeleton metal materials are foam metal or high-temperature resistant metal fibers. The wear-resistant material is good in wear-resistance, high in tenacity, suitable for occasions with high requirements for wear-resistance and tenacity and capable of being locally attached to the surface of the light metal alloy matrix to improve the wear-resistance and tenacity of the light metal alloy matrix under high temperature conditions. The locally-reinforced light metal matrix composites of the present invention are the light metal alloy matrix locally-reinforced through the wear-resistant material. A manufacturing method of the locally-reinforced light metal matrix composites of the present invention is to metallurgically bond the wear-resistant layer with the light metal alloy matrix is through the squeeze casting technique.

A composition of the wear-resistant material of the present invention includes high-temperature resistant skeleton metal materials, ceramic fiber materials and ceramic particle materials with the mass ratio of (10-60):(1-30):(10-70). The high-temperature resistant skeleton metal materials are foam metal or high-temperature resistant metal fibers. The wear-resistant material is good in wear-resistance, high in tenacity, suitable for occasions with high requirements for wear-resistance and tenacity and capable of being locally attached to the surface of the light metal alloy matrix to improve the wear-resistance and tenacity of the light metal alloy matrix under high temperature conditions. The locally-reinforced light metal matrix composites of the present invention are the light metal alloy matrix locally-reinforced through the wear-resistant material. A manufacturing method of the locally-reinforced light metal matrix composites of the present invention is to metallurgically bond the wear-resistant layer with the light metal alloy matrix is through the squeeze casting technique.

A compactor is disclosed for use with an additive manufacturing print head. The compactor may include a housing connectable to the additive manufacturing print head. The compactor may also include a compacting wheel, and at least one spring disposed in the housing and configured to exert an axial force on the compacting wheel. The compactor may further include a piston moveable to adjust a distance between the housing and the compacting wheel.