A system according to various embodiments can include: a coating system configured to apply a thermal coating material to a component, the component having a plurality of cooling holes; an airflow system coupled with the coating system, the airflow system configured to force air through the component; and a control system coupled with the airflow system and the coating system, the control system configured to: detect coating instructions for the coating system, the coating instructions instructing the coating system to apply the thermal coating material to a subset of the plurality of cooling holes; and instruct the airflow system to force air through the subset of the plurality of cooling holes during application of the thermal coating material to the component in response to detecting the coating instructions.

Embodiments involve smart device fabrication for semiconductor processing tools via precision patterning. In one embodiment, a method of manufacturing a semiconductor processing tool component includes providing a substrate of the semiconductor processing tool component, patterning the substrate to form a sensor directly on the substrate, and depositing a top layer over the sensor. The sensor may include, for example, a temperature or strain sensor. The method can also include patterning the substrate to form one or more of: heaters, thermistors, and electrodes on the substrate. In one embodiment, the method involves patterning a surface of the component oriented towards a plasma region inside of the semiconductor processing tool.

Embodiments involve smart device fabrication for semiconductor processing tools via precision patterning. In one embodiment, a method of manufacturing a semiconductor processing tool component includes providing a substrate of the semiconductor processing tool component, patterning the substrate to form a sensor directly on the substrate, and depositing a top layer over the sensor. The sensor may include, for example, a temperature or strain sensor. The method can also include patterning the substrate to form one or more of: heaters, thermistors, and electrodes on the substrate. In one embodiment, the method involves patterning a surface of the component oriented towards a plasma region inside of the semiconductor processing tool.

A piston for a cylinder for an internal combustion engine has a piston bowl surface adapted for facing a combustion chamber of the cylinder, the piston bowl surface being provided with a thermal barrier coating layer, wherein the thermal barrier coating layer is provided on a plurality of circumferentially spaced surface parts of the piston bowl surface. A method for producing a piston for a cylinder for an internal combustion engine includes the steps of providing a piston for a cylinder for an internal combustion engine, the piston having a piston bowl surface adapted for facing a combustion chamber of the cylinder, and providing the piston bowl surface with a thermal barrier coating layer, wherein the step of providing the thermal barrier coating layer is made on a plurality of circumferentially spaced surface parts of the piston bowl surface.

A piston for a cylinder for an internal combustion engine has a piston bowl surface adapted for facing a combustion chamber of the cylinder, the piston bowl surface being provided with a thermal barrier coating layer, wherein the thermal barrier coating layer is provided on a plurality of circumferentially spaced surface parts of the piston bowl surface. A method for producing a piston for a cylinder for an internal combustion engine includes the steps of providing a piston for a cylinder for an internal combustion engine, the piston having a piston bowl surface adapted for facing a combustion chamber of the cylinder, and providing the piston bowl surface with a thermal barrier coating layer, wherein the step of providing the thermal barrier coating layer is made on a plurality of circumferentially spaced surface parts of the piston bowl surface.

This invention relates to thermal spray coatings and processes onto non-smooth surfaces. The coating and processes can coat non-smooth surfaces without substantial degradation of the underlying surface texture or profile of the non-smooth surfaces so as to sufficiently preserve the underlying surface texture or profile. The ability for coating fractional coverage to maintain the surface profile while maintaining wear resistance is unprecedented by conventional thermal spray processes.

This invention relates to thermal spray coatings and processes onto non-smooth surfaces. The coating and processes can coat non-smooth surfaces without substantial degradation of the underlying surface texture or profile of the non-smooth surfaces so as to sufficiently preserve the underlying surface texture or profile. The ability for coating fractional coverage to maintain the surface profile while maintaining wear resistance is unprecedented by conventional thermal spray processes.

According to an aspect of the present disclosure, a porous plate is provided. The porous plate includes a body having an upper surface, a lower surface opposite the upper surface and sidewalls extending between respective entireties of the upper surface and the lower surface, the body being formed of porous material, and a metallic coating, which is thermally deposited onto an entirety of the sidewalls to form a high-strength mechanical bond with the entirety of the sidewalls.

According to an aspect of the present disclosure, a porous plate is provided. The porous plate includes a body having an upper surface, a lower surface opposite the upper surface and sidewalls extending between respective entireties of the upper surface and the lower surface, the body being formed of porous material, and a metallic coating, which is thermally deposited onto an entirety of the sidewalls to form a high-strength mechanical bond with the entirety of the sidewalls.

Thermal spray coating methods and thermal spray coated articles are disclosed. The thermal spray coating method includes positioning a covering on a cooling channel of a component, and thermal spraying a feedstock onto the covering. The covering prohibits the feedstock from entering the cooling channel in the component and is not removed from the component. In another embodiment, the thermal spray coating method includes providing a component comprising a substrate material, providing a cooling channel on a surface of the component, positioning a covering on the cooling channel, and thermal spraying a feedstock onto the component and the covering, the feedstock comprising a bond coat material. The covering prohibits the bond coat material from entering the cooling channel. The thermal spray coated article includes a component, a cooling channel, a covering on the cooling channel, and a thermally sprayed coating on the component and the covering.