The present disclosure relates to a method of manufacturing a liquid metal-based electrode using a light sintering process. The method of manufacturing a liquid metal-based electrode includes a step of preparing a metal nanoparticle solution, a step of adding metal micron particles and a surface modifier to the metal nanoparticle solution to prepare a mixed solution, a step of adding a liquid metal to the mixed solution to prepare a composite ink containing the liquid metal having a surface oxide film formed thereon, a step of forming an electrode by applying the composite ink onto a substrate, and a step of irradiating the electrode with light to destroy the surface oxide film.

The present disclosure relates to a method of manufacturing a liquid metal-based electrode using a light sintering process. The method of manufacturing a liquid metal-based electrode includes a step of preparing a metal nanoparticle solution, a step of adding metal micron particles and a surface modifier to the metal nanoparticle solution to prepare a mixed solution, a step of adding a liquid metal to the mixed solution to prepare a composite ink containing the liquid metal having a surface oxide film formed thereon, a step of forming an electrode by applying the composite ink onto a substrate, and a step of irradiating the electrode with light to destroy the surface oxide film.

A poppet valve includes: a valve body comprising a valve stem body, a valve head body with a valve combustion face, and a valve fillet body interconnecting the valve stem body and the valve head body. The valve fillet body surface has an increased thermal resistance compared to the valve combustion face.

A poppet valve includes: a valve body comprising a valve stem body, a valve head body with a valve combustion face, and a valve fillet body interconnecting the valve stem body and the valve head body. The valve fillet body surface has an increased thermal resistance compared to the valve combustion face.

A method for providing a part with a plasma resistant ceramic coating for use in a plasma processing chamber is provided. A patterned mask is placed on the part. A film is deposited over the part. The patterned mask is removed. A plasma resistant ceramic coating is applied on the part.

A method for providing a part with a plasma resistant ceramic coating for use in a plasma processing chamber is provided. A patterned mask is placed on the part. A film is deposited over the part. The patterned mask is removed. A plasma resistant ceramic coating is applied on the part.

A component for a processing chamber includes a ceramic body having at least one surface with a first average surface roughness. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness.

A component for a processing chamber includes a ceramic body having at least one surface with a first average surface roughness. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness.

A method for applying a coating to a substrate having a plurality of holes. The method comprises: applying a braze material to a substrate having a plurality of holes; heating the substrate to melt the braze material to form a melt; cooling the substrate to solidify the melt to form plugs in the respective holes; applying a coating to the substrate; and further heating the substrate to melt the plugs.

A method for applying a coating to a substrate having a plurality of holes. The method comprises: applying a braze material to a substrate having a plurality of holes; heating the substrate to melt the braze material to form a melt; cooling the substrate to solidify the melt to form plugs in the respective holes; applying a coating to the substrate; and further heating the substrate to melt the plugs.