A method of manufacturing a device includes thermally spraying tungsten carbine in feedstock that does not include Cobalt but that includes Nickel, Copper, or a Nickel-Copper alloy, the method improves the base coating toughness, anticorrosion, and antifouling properties for high load application in sea water and brackish water environments. Additionally, a Cobalt-free material lowers material costs and reduces the global demand of Cobalt. Providing a topcoat of a Silicon-doped DLC significantly reduces the topcoat brittleness of common DLC failures such as “egg shell” in high stress applications. Thus, high hardness, low friction applications may be tailored in high stress applications.

A method of manufacturing a device includes thermally spraying tungsten carbine in feedstock that does not include Cobalt but that includes Nickel, Copper, or a Nickel-Copper alloy, the method improves the base coating toughness, anticorrosion, and antifouling properties for high load application in sea water and brackish water environments. Additionally, a Cobalt-free material lowers material costs and reduces the global demand of Cobalt. Providing a topcoat of a Silicon-doped DLC significantly reduces the topcoat brittleness of common DLC failures such as “egg shell” in high stress applications. Thus, high hardness, low friction applications may be tailored in high stress applications.

Turbine and compressor casing abradable components for turbine engines include abradable surfaces with a zonal system of forward (zone A) and rear or aft sections (zone B) surface features. The zone A surface profile comprises an array pattern of non-directional depression dimples, or upwardly projecting dimples, or both, in the abradable surface. The dimpled forward zone A surface features reduce surface solidity in a controlled manner, to help increase abradability during blade tip rubbing incidents, yet they provide sufficient material to resist incoming hot working fluid erosion of the abradable surface. In addition, the dimples provide generic forward section aerodynamic profiling to the abradable surface, compatible with different blade airfoil-camber profiles. The aft zone B surface features comprise an array pattern of ridges and grooves.

A plasma processing apparatus includes: a processing chamber disposed inside a vacuum container and in which plasma is formed; and a member which is a member forming an inner wall surface of the processing chamber and is disposed on a surface to be exposed to the plasma and has a coating film formed by spraying of yttrium fluoride or a material containing the yttrium fluoride. A ratio of an orthorhombic crystal of the yttrium fluoride or the material containing the yttrium fluoride forming the coating film relative to the entirety is 60% or more.

A process of treating a component includes mechanically removing surface debris from a base coating of the component, identifying at least one surface feature in the base coating, and applying an overlay coating layer over the surface feature of the base coating without stripping off the base coating. A process of treating a gas turbine component includes mechanically removing surface debris from a base coating of the gas turbine component, identifying at least one surface feature in the base coating of corrosion pits, dents, spalls, and combinations thereof, and applying an overlay coating layer over the surface feature of the base coating without stripping off the base coating. A treated gas turbine component includes a gas turbine component substrate and a base coating on the gas turbine component substrate having at least one healed surface feature. The healed surface feature includes an overlay coating layer on the base coating.

A process of treating a component includes mechanically removing surface debris from a base coating of the component, identifying at least one surface feature in the base coating, and applying an overlay coating layer over the surface feature of the base coating without stripping off the base coating. A process of treating a gas turbine component includes mechanically removing surface debris from a base coating of the gas turbine component, identifying at least one surface feature in the base coating of corrosion pits, dents, spalls, and combinations thereof, and applying an overlay coating layer over the surface feature of the base coating without stripping off the base coating. A treated gas turbine component includes a gas turbine component substrate and a base coating on the gas turbine component substrate having at least one healed surface feature. The healed surface feature includes an overlay coating layer on the base coating.

A component for use in a plasma processing chamber is provided. A component body has a plasma facing surface. A coating is over the plasma facing surface, wherein the coating is formed by a method comprising spraying a surface of the component body with a spray formed from atomic layer deposition (ALD) coated particles to form the coating.

An yttrium oxyfluoride sprayed coating contains Y.sub.5O.sub.4F.sub.7 as a main component. In the yttrium oxyfluoride sprayed coating, when the total intensity of all peaks attributable to yttrium oxyfluoride in a diffraction spectrum obtained by X-ray diffractometry is assumed to be 100, the total intensity of all peaks attributable to yttrium fluoride and yttrium oxide is less than 10. Furthermore, in an yttrium oxyfluoride-containing sprayed coating, when the total intensity of all peaks attributable to yttrium oxyfluoride and yttrium fluoride in a diffraction spectrum obtained by X-ray diffractometry is assumed to be 100, the total intensity of all peaks attributable to yttrium oxide is less than 1.

An yttrium oxyfluoride sprayed coating contains Y.sub.5O.sub.4F.sub.7 as a main component. In the yttrium oxyfluoride sprayed coating, when the total intensity of all peaks attributable to yttrium oxyfluoride in a diffraction spectrum obtained by X-ray diffractometry is assumed to be 100, the total intensity of all peaks attributable to yttrium fluoride and yttrium oxide is less than 10. Furthermore, in an yttrium oxyfluoride-containing sprayed coating, when the total intensity of all peaks attributable to yttrium oxyfluoride and yttrium fluoride in a diffraction spectrum obtained by X-ray diffractometry is assumed to be 100, the total intensity of all peaks attributable to yttrium oxide is less than 1.

A stage includes a base material including a step portion and an insulating film. The step portion includes a first surface recessed from a top surface of the base material and a second surface recessed from a side surface of the base material. The insulating film includes a plurality of first layers on the first surface and a plurality of second layers on the second surface. In the step portion, each first end portion of the plurality of first layers and each second end portion of the plurality of second layers are alternately stacked. The first surface and the second surface are connected via a corner, and each first end portion and each second end portion are alternately stacked at the corner.