Disclosed are a processing method for fluorination of a fluorination-target component for semiconductor fabrication equipment, which may realize high density and high strength by fluorinating the fluorination-target component using a fluorinating gas excited into plasma, and at the same time, may significantly reduce plasma contaminant particles which are generated during formation of a fluoride coating, and a fluorinated component obtained by the method.

An apparatus and process are presented for continuous production of metal-based micro-porous structures of pore sizes from 0.3 nm to 5.0 m from a green part of characteristic diffusion mass transfer dimension less than 1 mm through chemical reactions in a continuous flow of gas substantially free of oxygen. The produced micro-porous structures include i) thin porous metal sheets of thickness less than 200 m and pore sizes in the range of 0.1 to 5.0 m, ii) porous ceramic coating of thickness less than 40 m and ceramic particle sizes of 200 nm or less on a porous metal-based support structures of pore sizes in the range of 0.1 to 5 m.

A method of mechanically processing a metallic material component is provided whereby alloying, carburizing, nitriding and boriding can be performed using a friction stir processing tool. This method for mechanically processing metallic material surfaces is cost effective, efficient and does not require specialized equipment.

A method of controlling macroscopic strain of a porous structure includes contacting a porous structure with a modifying agent which chemically adsorbs to a surface of the porous structure and modifies an existing surface stress of the porous structure. A device in one embodiment includes a porous metal structure, which when contacted with a modifying agent which chemically adsorbs to a surface of the porous metal structure, exhibits a volumetric change due to modification of an existing surface stress of the porous metal structure; and a mechanism for detecting the volumetric change. Additional methods and systems are also presented.

A material at least partly coated with a passive film of fluoride formed by contact with a gas containing ClF.

The present invention relates to a method for preventing gases and fluids to penetrate a surface of an object, comprising the steps of: depositing (S1) an amorphous metal (5) on a surface of an object (4); forming (S2) a continuous layer of the amorphous metal (5) on the surface of the object (4); binding (S3) the amorphous metal (5) to the surface of the object by chemical binding; and passivation (S4) of a surface of the amorphous metal (5) facing away from the surface of the object (4).

The present invention relates to a method for preventing gases and fluids to penetrate a surface of an object, comprising the steps of: depositing (S1) an amorphous metal (5) on a surface of an object (4); forming (S2) a continuous layer of the amorphous metal (5) on the surface of the object (4); binding (S3) the amorphous metal (5) to the surface of the object by chemical binding; and passivation (S4) of a surface of the amorphous metal (5) facing away from the surface of the object (4).

A method for patinating zinc surfaces of a structural element. The method includes disposing a structural element with a zinc surface in a container. Disposing an atmosphere around the zinc surface in the container, wherein said atmosphere comprises a carbon-based gas and a relative humidity. Heating the zinc surface for at least one hour to provide a patinated zinc surface. Heating of the zinc surface occurs by disposing the atmosphere at a heating state. The heating state the atmosphere comprises a temperature of at least 50 degrees Celsius, relative humidity of at least 70%, and at least 5% volume of a carbon-based gas.

A method for patinating zinc surfaces of a structural element. The method includes disposing a structural element with a zinc surface in a container. Disposing an atmosphere around the zinc surface in the container, wherein said atmosphere comprises a carbon-based gas and a relative humidity. Heating the zinc surface for at least one hour to provide a patinated zinc surface. Heating of the zinc surface occurs by disposing the atmosphere at a heating state. The heating state the atmosphere comprises a temperature of at least 50 degrees Celsius, relative humidity of at least 70%, and at least 5% volume of a carbon-based gas.

A guiding member, having a body provided with a bore for mounting a mobile element is presented. The body consists of a metallic material. The bore has a surface layer treated against jamming over a diffusion depth of less than or equal to 0.6 mm. The surface layer has a hardness of greater than or equal to 500 Hv1 over a depth of between 5 and 50 ?m.