A lid or other chamber component for a process chamber comprises a) at least one surface comprising a first ceramic material, wherein the first ceramic material comprises Y.sub.3Al.sub.5O.sub.12 and b) an internal region beneath the at least one surface comprising a second ceramic material, wherein the second ceramic material comprises a combination of Al.sub.2O.sub.3 and ZrO.sub.2.

The present disclosure relates to a thermal barrier coating for coating a substrate. The thermal barrier coating may comprise an inner ceramic layer (e.g. 7YSZ) having a columnar grain structure and a first outer ceramic layer (e.g. 7YSZ) having a branched grain structure. The thermal barrier coating further comprises a nucleation layer (which may comprise alumina or tantala), interposed between the inner ceramic layer and the first outer layer. The layers can be deposited by PVD using substantially contact deposition parameters because the nucleation layer induces branching in the first outer ceramic layer.

A cutting tool comprises a substrate and a coating layer provided on the substrate, the coating layer including a multilayer structure layer composed of a first unit layer and a second unit layer, and a lone layer, the lone layer including cubic Ti.sub.zAl.sub.1-zN crystal grains, an atomic ratio z of Ti in the Ti.sub.zAl.sub.1-zN being 0.4 or more and less than 0.55, the lone layer having a thickness with an average value of 2.5 nm or more and 10 nm or less, the multilayer structure layer having a thickness with an average value of 10 nm or more and 45 nm or less, one multilayer structure layer and one lone layer forming a repetitive unit having a thickness with an average value of 20 nm to 50 nm, a maximum value of 40 nm to 60 nm, and a minimum value of 10 nm to 30 nm.

A cutting tool comprises a substrate and a coating layer provided on the substrate, the coating layer including a multilayer structure layer composed of a first unit layer and a second unit layer, and a lone layer, the lone layer including cubic Ti.sub.zAl.sub.1-zN crystal grains, an atomic ratio z of Ti in the Ti.sub.zAl.sub.1-zN being 0.55 or more and 0.7 or less, the lone layer having a thickness with an average value of 2.5 nm or more and 10 nm or less, the multilayer structure layer having a thickness with an average value of 40 nm or more and 95 nm or less, one multilayer structure layer and one lone layer forming a repetitive unit having a thickness with an average value of 50 nm to 100 nm, a maximum value of 90 nm to 110 nm, and a minimum value of 40 nm to 60 nm.

A cutting tool comprises a substrate and a coating layer provided on the substrate, the coating layer including a multilayer structure layer composed of a first unit layer and a second unit layer, and a lone layer, the lone layer including cubic Ti.sub.zAl.sub.1-zN crystal grains, an atomic ratio z of Ti in the Ti.sub.zAl.sub.1-zN being 0.5 or more and 0.65 or less, the lone layer having a thickness with an average value of 2.5 nm or more and 10 nm or less, the multilayer structure layer having a thickness with an average value of 10 nm or more and 95 nm or less, one multilayer structure layer and one lone layer forming a repetitive unit having a thickness with an average value of 30 nm to 70 nm, a maximum value of 40 nm to 100 nm, and a minimum value of 20 nm to 40 nm.

In a hard-film-coated drill having a cemented carbide drill body coated with a hard film, the drill body is provided with a smooth region at a boundary between a flank surface and a rake surface. The surface hardness of the hard film is within 2000 to 2500 HV in Vickers hardness. A radius r1 (μam) of curvature of the first ridgeline L1 where the smooth region and the flank surface intersect is represented by r1=0.45×D+a1 (10≤a1≤25), where D is the diameter (mm) of the body. A radius r2 (μm) of curvature the second ridgeline L2 where the flank surface and a margin intersect is represented by r2=0.65×D+a2 (39≤a2≤67). A thickness t1 (μm) of the hard film is represented by t1=0.8×ln(D)+a3 (0.7≤a3≤3.0).

A three-dimensional (3D) memory device and a manufacturing method thereof are provided. The method includes the following steps. An alternating dielectric stack is formed on a substrate. An opening is formed penetrating the alternating dielectric stack in a thickness direction of the substrate. A blocking layer is formed on a sidewall of the opening. A trapping layer is formed in the opening, and the trapping layer is formed on the blocking layer. The trapping layer includes a lower portion and an upper portion disposed above the lower portion. A thickness of the upper portion in a horizontal direction is greater than a thickness of the lower portion in the horizontal direction. The thickness distribution of the trapping layer is modified for improving the electrical performance of the 3D memory device.

A coated body has a substrate and a coating applied to the substrate by physical vapor deposition. The coating includes a main layer adjacent to the substrate and a multilayer adjacent to the main layer. The main layer includes a nitride of at least Al and Ti. The multilayer includes alternating layers of an oxide or oxynitride layer and a nitride layer. The oxide or oxynitride layer includes an oxide or oxynitride of at least one of Zr, Hf, and Cr. The nitride layer includes a nitride of at least one of Zr, Hf, and Cr. A metallic interlayer is between the main layer and the multilayer or between the oxide or oxynitride layer and the nitride layer of the multilayer.

A cutting tool includes a substrate and a coating that coats a surface of the substrate, the coating including a multilayer structure layer composed of at least one layer A and at least one layer B alternately deposited from a side closer to the substrate toward a side closer to a surface, the layer A having an average composition of Al.sub.xCr.sub.(1-x)N, the layer B being composed of Al.sub.yTi.sub.(1-y)N, the layer A being composed of a domain region and a matrix region, the domain region having a composition ratio of Cr larger than that of Cr of the matrix region, wherein x has a range of 0.5≤x≤0.8 and y has a range of 0.5≤y≤0.7.

Disclosed are a component for a fuel injector and a method for coating the same. The component for the fuel injector may include a base material, a bonding layer laminated on the base material, a support layer laminated on the outer surface of the bonding layer, and an NbSiCN functional layer including an NbCN layer and an SiCN layer and alternately laminated on the outer surface of the support layer, thereby reducing friction, high hardness, shock resistance, heat resistance, and durability of the component for the fuel injector.