A metal porous material according to an aspect of the present disclosure is a metal porous material in sheet form that includes a frame having a three-dimensional network configuration, wherein the frame includes an alloy including at least nickel (Ni) and chromium (Cr), the frame 11 is a solid solution with iron (Fe), the frame includes a chromium oxide (Cr.sub.2O.sub.3) layer as an outermost layer and includes a chromium carbide layer located under the chromium oxide layer, the chromium oxide layer has a thickness not less than 0.1 μm and not more than 3 μm, and the chromium carbide layer has a thickness not less than 0.1 μm and not more than 1 μm.

Embodiments of an apparatus for gas delivery in a semiconductor processing system use a gas distribution plate that has a plurality of gas passageways where the passageways have surfaces with an average roughness of less than or equal to approximately 10 Ra. In some embodiments, the gas distribution plate has one or more internal fluid passageways that are capable of being fluidly coupled to one or more fluid sources to provide temperature control of the gas distribution plate. In some embodiments, the gas distribution plate has at least one internal cavity with at least one heatsink that may surround at least one of the plurality of gas passageways to provide, at least partial, temperature control of the gas distribution plate.

Disclosed are actuators containing an active layer comprising at least one metal hydroxide, the active layer having a first volume under no stimulation and a second volume either greater than or smaller than the first volume under stimulation; and a passive layer comprising a porous polymer membrane, the passive layer having an elastic modulus at least half of an elastic modulus of the active layer.

Disclosed are actuators containing an active layer comprising at least one metal hydroxide, the active layer having a first volume under no stimulation and a second volume either greater than or smaller than the first volume under stimulation; and a passive layer comprising a porous polymer membrane, the passive layer having an elastic modulus at least half of an elastic modulus of the active layer.

A metal porous body is a metal porous body mainly composed of nickel and having a framework of a three-dimensional network structure, Ni(OH).sub.2 being present in a surface of the framework, when the metal porous body is subjected to at least 30 potential scans between a lower limit potential of −0.10 V and an upper limit potential of +0.65 V with respect to a hydrogen standard potential in not less than 10% by mass and not more than 35% by mass of a potassium hydroxide aqueous solution, at least oxygen being detected within a depth of 5 nm from the surface, and hydrogen being detected at least in the surface.

A metal foam-based filtration system and method for removing sub-micron particles and contaminants from a gas or fluid flow with the use of ultralow density metal nanowire meshes that have nanometer to micron scale pores for trapping air/fluid-borne particulates. Filters can use metal foams and coated metal foams alone or in tandem. The size and density of pores in the foam can be adjusted with synthesis conditions. Foams with pore size gradients promote the trapping of different sized particulates at different regions of a foam. Multiple rounds of electrodeposition may be applied to increase the surface area and curvature of a nanowire mesh and strengthen the mesh to make it self-supporting, free-standing and capable of supporting a much heavier mass without collapse. A metal and/or a coated metal foam can act as a catalyst or substrate for absorption or adsorption to capture target particles and/or contaminants.

A metal foam-based filtration system and method for removing sub-micron particles and contaminants from a gas or fluid flow with the use of ultralow density metal nanowire meshes that have nanometer to micron scale pores for trapping air/fluid-borne particulates. Filters can use metal foams and coated metal foams alone or in tandem. The size and density of pores in the foam can be adjusted with synthesis conditions. Foams with pore size gradients promote the trapping of different sized particulates at different regions of a foam. Multiple rounds of electrodeposition may be applied to increase the surface area and curvature of a nanowire mesh and strengthen the mesh to make it self-supporting, free-standing and capable of supporting a much heavier mass without collapse. A metal and/or a coated metal foam can act as a catalyst or substrate for absorption or adsorption to capture target particles and/or contaminants.

A deposition mask includes a mask body and a through-hole provided in the mask body and through which a deposition material passes when the deposition material is deposited on a deposition target substrate. The mask body satisfies y≥950 and y≥23x−1280 when an indentation elastic modulus is x (GPa) and a 0.2% yield strength is y (MPa).

A deposition mask includes a mask body and a through-hole provided in the mask body and through which a deposition material passes when the deposition material is deposited on a deposition target substrate. The mask body satisfies y≥950 and y≥23x−1280 when an indentation elastic modulus is x (GPa) and a 0.2% yield strength is y (MPa).

The present invention relates to processes for producing metal foam bodies, in which metal-containing powders that may comprise aluminium and chromium or molybdenum are applied to metal foam bodies that may comprise nickel, cobalt, copper and iron and then treated thermally, wherein the highest temperature in the thermal treatment of the metal foam bodies is in the range from 680 to 715° C., and wherein the total duration of the thermal treatment within the temperature range from 680 to 715° C. is between 5 and 240 seconds. Following this method of thermal treatment can achieve alloy formation at the contact surface between metal foam body and metal-containing powder, but simultaneously leave unalloyed regions within the metal foam. The present invention further comprises processes comprising the treatment of the alloyed metal foam bodies with basic solution. The present invention further comprises the metal foam bodies obtainable by these processes, which find use, for example, as support and structure components and in catalyst technology.