C25D17/02

Wetting method for substrate and plating apparatus
12152311 · 2024-11-26 · ·

Provided is a wetting method for substrate that allows reducing an amount of air bubbles attached to a surface to be plated with a simple structure. The wetting method for substrate includes a holding step 102 of holding a back surface of a substrate with a back plate such that a surface to be plated of the substrate is opposed to a liquid surface of a plating solution housed in a plating tank, a supplying step 104 of supplying the plating solution to the plating tank such that the plating solution upwardly flows through a plurality of through-holes in a center part of an ionically resistive element arranged inside the plating tank to raise a center part of the liquid surface of the plating solution, a first lowering step 106 of lowering a supporting member for supporting an outer edge portion of the surface to be plated of the substrate held by the holding member toward the liquid surface of the plating solution, and a second lowering step 108 of lowering the holding member such that the substrate is sandwiched by the supporting member lowered in the first lowering step 106 and the holding member while the center part of the liquid surface of the plating solution is raised in the supplying step 104.

Wetting method for substrate and plating apparatus
12152311 · 2024-11-26 · ·

Provided is a wetting method for substrate that allows reducing an amount of air bubbles attached to a surface to be plated with a simple structure. The wetting method for substrate includes a holding step 102 of holding a back surface of a substrate with a back plate such that a surface to be plated of the substrate is opposed to a liquid surface of a plating solution housed in a plating tank, a supplying step 104 of supplying the plating solution to the plating tank such that the plating solution upwardly flows through a plurality of through-holes in a center part of an ionically resistive element arranged inside the plating tank to raise a center part of the liquid surface of the plating solution, a first lowering step 106 of lowering a supporting member for supporting an outer edge portion of the surface to be plated of the substrate held by the holding member toward the liquid surface of the plating solution, and a second lowering step 108 of lowering the holding member such that the substrate is sandwiched by the supporting member lowered in the first lowering step 106 and the holding member while the center part of the liquid surface of the plating solution is raised in the supplying step 104.

PLATING APPARATUS
20240368800 · 2024-11-07 ·

Provided is a technique that allows suppressing a film thickness on an outer peripheral edge of a substrate becoming non-uniform.

A plating apparatus 1 includes a plating tank, an anode, a substrate holder, at least one auxiliary anode 60a to 60d, a busbar 61 having a power feeding part 62, to which electricity is supplied, and a plurality of connecting parts 63 connected to the at least one auxiliary anode and arrayed in an extending direction of the auxiliary anode, and at least one ionically resistive element 80a to 80d. The ionically resistive element is configured to increase in resistivity of the ionically resistive element as approaching the power feeding part in an extending direction of the ionically resistive element.

PLATING APPARATUS
20240368800 · 2024-11-07 ·

Provided is a technique that allows suppressing a film thickness on an outer peripheral edge of a substrate becoming non-uniform.

A plating apparatus 1 includes a plating tank, an anode, a substrate holder, at least one auxiliary anode 60a to 60d, a busbar 61 having a power feeding part 62, to which electricity is supplied, and a plurality of connecting parts 63 connected to the at least one auxiliary anode and arrayed in an extending direction of the auxiliary anode, and at least one ionically resistive element 80a to 80d. The ionically resistive element is configured to increase in resistivity of the ionically resistive element as approaching the power feeding part in an extending direction of the ionically resistive element.

Coating apparatus for coating components

A coating device for coating components, in particular for nickel-plating spark plug housings. The coating device includes: a housing having an outer anode that is designed to receive the component, an inner anode that can be introduced into a through-opening of the component, and a voltage-generating device, the voltage-generating device being designed to generate a first voltage between the outer anode and the component, as well as a second voltage between the inner anode and the component. The housing has an inlet and an outlet for introducing and discharging a process medium into or out of the housing.

SYSTEMS AND METHODS FOR PREPARING AND PLATING OF WORK ROLLS
20180080139 · 2018-03-22 · ·

The present embodiments are directed to systems and methods for plating of work rolls. In one embodiment, a system includes an inner tank having an inner diameter dimensioned to receive a work roll, and an outer tank, wherein the inner tank is disposed coaxially within the outer tank. The inner tank and the outer tank may each include cylindrical shapes. A temperature regulating tank, positioned outside of the outer tank, may be in fluid communication with an annular space between the inner and outer tanks. An exhaust hood having a generally ring-shaped profile including a plurality of slots formed therein may suction fumes from the inner tank. An anode configuration also is disclosed, having a shunt incorporated into the anode, wherein current going to the anode passes through the shunt.

SYSTEMS AND METHODS FOR PREPARING AND PLATING OF WORK ROLLS
20180080139 · 2018-03-22 · ·

The present embodiments are directed to systems and methods for plating of work rolls. In one embodiment, a system includes an inner tank having an inner diameter dimensioned to receive a work roll, and an outer tank, wherein the inner tank is disposed coaxially within the outer tank. The inner tank and the outer tank may each include cylindrical shapes. A temperature regulating tank, positioned outside of the outer tank, may be in fluid communication with an annular space between the inner and outer tanks. An exhaust hood having a generally ring-shaped profile including a plurality of slots formed therein may suction fumes from the inner tank. An anode configuration also is disclosed, having a shunt incorporated into the anode, wherein current going to the anode passes through the shunt.

Internal Airfoil Component Electrolplanting

Method and apparatus are provided for electroplating a surface area of an internal wall defining a cooling cavity present in a gas turbine engine airfoil component.

Graphene anti-corrosion coating and method of application thereof
09920447 · 2018-03-20 · ·

A graphene composite coating on a metal surface with excellent corrosion resistance by electrophoretic or electrolytic deposition has been obtained. The composite coating was shown to significantly increase the resistance of the metal surface to electrochemical degradation. The graphene coating significantly reduces cathodic current, which is an indicator of the rate of corrosion at the interface between the cathodic material and the anodic material.

ELECTROPLATING APPARATUS, ELECTROPLATING METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
20180073160 · 2018-03-15 · ·

According to one embodiment, an electroplating method includes, arranging an anode having passages through which a plating solution flows and a cathode to face each other via a resist mask, in a reaction section storing the plating solution, and setting a potential of the cathode to a negative potential to the anode, to form a metal plated film on the surface of the cathode.