A method for growing a single crystal silicon ingot by the continuous Czochralski method is disclosed. The melt depth and thermal conditions are constant during growth because the silicon melt is continuously replenished as it is consumed, and the crucible location is fixed. The critical v/G is determined by the hot zone configuration, and the continuous replenishment of silicon to the melt during growth enables growth of the ingot at a constant pull rate consistent with the critical v/G during growth of a substantial portion of the main body of the ingot.

An object of the present invention is to provide a method for producing a group III nitride crystal in which generation of breaking or cracks is less likely to occur. To achieve the object, the method for producing a group III nitride crystal includes: seed crystal preparation including disposing a plurality of crystals of a group III nitride as a plurality of seed crystals on a substrate; and crystal growth including growing group III nitride crystals by contacting a surface of each of the seed crystals with a melt containing at least one group III element selected from gallium, aluminum, and indium and an alkali metal in an atmosphere containing nitrogen. In the seed crystal preparation, the plurality of seed crystals are disposed within a hexagonal region provided on the substrate.

The present invention provides a semiconductor crystal growth device, comprising: a furnace body; a crucible disposed inside the furnace body for containing a silicon melt; a pulling unit disposed at a top portion of the furnace body for pulling out a silicon ingot from the silicon melt; and a heat shield unit including a flow tube that is barrel-shaped and disposed around the silicon ingot for rectifying argon gas input from the top portion of the furnace body and adjusting thermal field distribution between the silicon ingot and the silicon melt liquid surface, wherein, the heat shield unit further includes an adjustment unit disposed at a lower end inside the flow tube for adjusting a minimum distance between the heat shield unit and the silicon ingot. According to the present invention, by providing the adjustment unit at the lower end inside the flow tube, it is possible to adjust the distance between the silicon ingot and the adjacent heat shield unit and thereby boost the crystal growth speed and quality, without changing the shape and position of the flow tube.

A method for preparing a single crystal silicon ingot and a wafer sliced therefrom are provided. The ingots and wafers comprise nitrogen at a concentration of at least about 1×1014 atoms/cm3 and/or germanium at a concentration of at least about 1×1019 atoms/cm3, interstitial oxygen at a concentration of less than about 6 ppma, and a resistivity of at least about 1000 ohm cm.

A method for producing a bonded SOI wafer by bonding a bond wafer and a base wafer, each being formed of a silicon single crystal, together with a silicon oxide film placed therebetween, the method including: preparing, as the base wafer, a silicon single crystal wafer whose resistivity is 100 .Math.cm or more and initial interstitial oxygen concentration is 10 ppma or less; forming, on the front surface of the base wafer, a silicon oxide film by performing, on the base wafer, heat treatment in an oxidizing atmosphere at a temperature of 700 C. or higher and 1000 C. or lower for 5 hours or more; bonding the base wafer and the bond wafer together with the silicon oxide film placed therebetween; and thinning the bonded bond wafer to form an SOI layer.

A seed crystal holder for pulling up a single crystal is made of a carbon fiber-reinforced carbon composite material, and has a substantially cylindrical shape with a hollow space having a shape matching an outer shape of a substantially rod-shaped seed crystal. A direction of carbon fibers at a part in contact with at least an outer peripheral surface of the seed crystal has isotropy as viewed from a central axis of the hollow space.

A method of growing a cadmium zinc telluride (CdZnTe) crystal includes providing a crucible including a solid CdZnTe source and forming a Te-rich CdZnTe melt on the solid CdZnTe source. The method also includes positioning a CdZnTe seed crystal in physical contact with the Te-rich CdZnTe melt and growing the CdZnTe crystal from the Te-rich CdZnTe melt.

A seed crystal holder for pulling up a single crystal is made of a carbon fiber-reinforced carbon composite material, and has a substantially cylindrical shape with a hollow space having a shape matching an outer shape of a substantially rod-shaped seed crystal. A direction of carbon fibers at a part in contact with at least an outer peripheral surface of the seed crystal has isotropy as viewed from a central axis of the hollow space.

A method for growing a single crystal silicon ingot by the continuous Czochralski method is disclosed. The melt depth and thermal conditions are constant during growth because the silicon melt is continuously replenished as it is consumed, and the crucible location is fixed. The critical v/G is determined by the hot zone configuration, and the continuous replenishment of silicon to the melt during growth enables growth of the ingot at a constant pull rate consistent with the critical v/G during growth of a substantial portion of the main body of the ingot.

This invention provides method, device, system, and computer storage medium for crystal growth control of a shouldering process. The method comprises: presetting a setting value of a crystal growth angle at different stages of a shouldering process and a crystal growth process parameter at different stages of the shouldering process; obtaining crystal diameters at different stages of the shouldering process and calculating a measured crystal diameter variation and a measured crystal length variation, and using a ratio of the measured crystal diameter variation and the measured crystal length variation to calculate a measured crystal growth angle; comparing the measured crystal growth angle with the setting value of the crystal growth angle to obtain a difference as an input variable of PID algorithm; calculating an adjustment value of a crystal growth process parameter by PID algorithm as an output variable of PID algorithm; adding the adjustment value of the crystal growth process parameter and the setting value of the crystal growth process parameter to obtain a process parameter of an actual crystal growth process.