Patent classifications
C30B15/36
Methods for growing a single crystal silicon ingot using continuous Czochralski method
A method for growing a single crystal silicon ingot by the continuous Czochralski method is disclosed. The melt depth and thermal conditions are constant during growth because the silicon melt is continuously replenished as it is consumed, and the crucible location is fixed. The critical v/G is determined by the hot zone configuration, and the continuous replenishment of silicon to the melt during growth enables growth of the ingot at a constant pull rate consistent with the critical v/G during growth of a substantial portion of the main body of the ingot.
Methods for growing a single crystal silicon ingot using continuous Czochralski method
A method for growing a single crystal silicon ingot by the continuous Czochralski method is disclosed. The melt depth and thermal conditions are constant during growth because the silicon melt is continuously replenished as it is consumed, and the crucible location is fixed. The critical v/G is determined by the hot zone configuration, and the continuous replenishment of silicon to the melt during growth enables growth of the ingot at a constant pull rate consistent with the critical v/G during growth of a substantial portion of the main body of the ingot.
Method for producing group III nitride crystal and seed substrate
An object of the present invention is to provide a method for producing a group III nitride crystal in which generation of breaking or cracks is less likely to occur. To achieve the object, the method for producing a group III nitride crystal includes: seed crystal preparation including disposing a plurality of crystals of a group III nitride as a plurality of seed crystals on a substrate; and crystal growth including growing group III nitride crystals by contacting a surface of each of the seed crystals with a melt containing at least one group III element selected from gallium, aluminum, and indium and an alkali metal in an atmosphere containing nitrogen. In the seed crystal preparation, the plurality of seed crystals are disposed within a hexagonal region provided on the substrate.
Method for producing group III nitride crystal and seed substrate
An object of the present invention is to provide a method for producing a group III nitride crystal in which generation of breaking or cracks is less likely to occur. To achieve the object, the method for producing a group III nitride crystal includes: seed crystal preparation including disposing a plurality of crystals of a group III nitride as a plurality of seed crystals on a substrate; and crystal growth including growing group III nitride crystals by contacting a surface of each of the seed crystals with a melt containing at least one group III element selected from gallium, aluminum, and indium and an alkali metal in an atmosphere containing nitrogen. In the seed crystal preparation, the plurality of seed crystals are disposed within a hexagonal region provided on the substrate.
METHOD AND APPARATUS FOR GROWING SILICON SINGLE CRYSTAL INGOT
Embodiments provide a method of growing a silicon single crystal ingot, the method including growing a silicon single crystal ingot having crystal orientation of (111) using the Czochralski method, measuring a diameter of the silicon single crystal ingot, calculating a length of a facet of the silicon single crystal ingot, calculating a correction formula for a rotation speed of a seed and a correction formula for a pulling speed of the silicon single crystal ingot based on the calculated facet length, and correcting the rotation speed of the seed and the pulling speed of the silicon single crystal ingot based on a result of the calculation.
METHOD AND APPARATUS FOR GROWING SILICON SINGLE CRYSTAL INGOT
Embodiments provide a method of growing a silicon single crystal ingot, the method including growing a silicon single crystal ingot having crystal orientation of (111) using the Czochralski method, measuring a diameter of the silicon single crystal ingot, calculating a length of a facet of the silicon single crystal ingot, calculating a correction formula for a rotation speed of a seed and a correction formula for a pulling speed of the silicon single crystal ingot based on the calculated facet length, and correcting the rotation speed of the seed and the pulling speed of the silicon single crystal ingot based on a result of the calculation.
MONOCRYSTAL GROWTH METHOD AND MONOCRYSTAL GROWTH DEVICE
A monocrystal growth method and device. The method includes loading silicon material into a crucible for melting to form molten silicon liquid; lowering a heat shield to a preset position, a first preset distance is formed between a lower edge of the heat shield and a liquid level of the molten silicon liquid; in a first stage, using a counterweight to hang a seed shaft to gradually descend in a first direction, using a camera apparatus to acquire a pixel image of the seed shaft and the lower edge of the heat shield for comparison to reference; then a second stage is entered, in which the image processing apparatus records a current position of the seed shaft, the seed shaft is continuously lowered until the seed shaft extends into the molten silicon liquid for welding; seeding; shouldering; body growth; and tailing.
MONOCRYSTAL GROWTH METHOD AND MONOCRYSTAL GROWTH DEVICE
A monocrystal growth method and device. The method includes loading silicon material into a crucible for melting to form molten silicon liquid; lowering a heat shield to a preset position, a first preset distance is formed between a lower edge of the heat shield and a liquid level of the molten silicon liquid; in a first stage, using a counterweight to hang a seed shaft to gradually descend in a first direction, using a camera apparatus to acquire a pixel image of the seed shaft and the lower edge of the heat shield for comparison to reference; then a second stage is entered, in which the image processing apparatus records a current position of the seed shaft, the seed shaft is continuously lowered until the seed shaft extends into the molten silicon liquid for welding; seeding; shouldering; body growth; and tailing.
METHOD FOR PREPARING SINGLE CRYSTAL SUPERALLOY TEST BARS BY USING NI-W HETEROGENEOUS SEED CRYSTAL
In the method for preparing single crystal superalloy test bars by using a Ni—W heterogeneous seed crystal, on the premise of ensuring that the single crystal superalloy has the required orientation, by reusing the seed crystal, it is achieved that the trouble caused by the need of preparing a new seed crystal when a single crystal superalloy is produced by the seed crystal method every time is avoided, and the production cost is significantly reduced. In the present disclosure, the formation of the stray grains in mushy zone could be avoided by using a Ni—W heterogeneous seed crystal without mushy zone and a built-in corundum tube.
METHOD FOR PREPARING SINGLE CRYSTAL SUPERALLOY TEST BARS BY USING NI-W HETEROGENEOUS SEED CRYSTAL
In the method for preparing single crystal superalloy test bars by using a Ni—W heterogeneous seed crystal, on the premise of ensuring that the single crystal superalloy has the required orientation, by reusing the seed crystal, it is achieved that the trouble caused by the need of preparing a new seed crystal when a single crystal superalloy is produced by the seed crystal method every time is avoided, and the production cost is significantly reduced. In the present disclosure, the formation of the stray grains in mushy zone could be avoided by using a Ni—W heterogeneous seed crystal without mushy zone and a built-in corundum tube.