A method of manufacturing silicon nano-powders and a manufacturing equipment implementing such method. The method according to the invention utilizes a plurality of aluminum powders to react with a silicon tetrahalide into a plurality of silicon nano-powders and an aluminum trihalide to obtain the silicon nano-powders.

Methods and materials are disclosed for simultaneously optimizing both the piezoelectric and mechanical properties of wurtzite piezoelectric materials based on the AlN wurtzite and alloyed with one or two end-members from the set BN, YN, CrN, and ScN.

In various embodiments, single-crystal aluminum nitride boules and substrates are formed from the vapor phase with controlled levels of impurities such as carbon. Single-crystal aluminum nitride may be heat treated via quasi-isothermal annealing and controlled cooling to improve its ultraviolet absorption coefficient and/or Urbach energy.

Aluminum nitride particles which are excellent in high thermal conductivity and useful as a filler for a heat dissipating material and which have good fluidity for improving the fillability, that is, spherical AlN particles containing Zr atoms with respect to Al atoms in an amount of a molar ratio Zr/Al=4.0×10.sup.−4 to 4.2×10.sup.−2, having an AlN conversion rate of 70.0% or more, and having a circularity of 0.85 to 1.00.

Aluminum nitride particles which are excellent in high thermal conductivity and useful as a filler for a heat dissipating material and which have good fluidity for improving the fillability, that is, spherical AlN particles containing Zr atoms with respect to Al atoms in an amount of a molar ratio Zr/Al=4.0×10.sup.−4 to 4.2×10.sup.−2, having an AlN conversion rate of 70.0% or more, and having a circularity of 0.85 to 1.00.

An acoustic wave resonator comprises a piezoelectric material formed of aluminum nitride (AlN) doped with calcium (Ca) to enhance performance of the acoustic wave resonator.

An acoustic wave resonator comprises a piezoelectric material formed of aluminum nitride (AlN) doped with calcium (Ca) to enhance performance of the acoustic wave resonator.

In various embodiments, single-crystal aluminum nitride boules and substrates have low Urbach energies and/or absorption coefficients at deep-ultraviolet wavelengths. The single-crystal aluminum nitride may function as a platform for the fabrication of light-emitting devices such as light-emitting diodes and lasers.

In various embodiments, single-crystal aluminum nitride boules and substrates have low Urbach energies and/or absorption coefficients at deep-ultraviolet wavelengths. The single-crystal aluminum nitride may function as a platform for the fabrication of light-emitting devices such as light-emitting diodes and lasers.

Provided are silicon-containing aluminum nitride particles having a high reflectance, a method for producing the same, and a light emitting device. In certain embodiment, silicon-containing aluminum nitride particles having a total amount of aluminum and nitrogen of 90% by mass or more, a content of silicon in a range of 1.5% by mass or more and 4.0% by mass or less, and a content of oxygen in a range of 0.5% by mass or more and 2.0% by mass or less, and having an average reflectance in a wavelength range of 380 nm or more and 730 nm or less of 85% or more.