The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant in which such a process can be carried out with advantage.

The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant wherein such a process can be carried out with advantage.

The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant wherein such a process can be carried out with advantage.

The invention concerns a method for making ADN from GUDN in one single process step. GUDN is reacted with an ammonium. source (ammonium-sulfamate, ammonium-sulfate, ammonia) and an ion-change gives ADN from GUDN in one process stage. The advantages are that the process gives pure ADN without potassium contaminants and that a smaller amount of solvent is necessary.

The invention concerns a method for making ADN from GUDN in one single process step. GUDN is reacted with an ammonium. source (ammonium-sulfamate, ammonium-sulfate, ammonia) and an ion-change gives ADN from GUDN in one process stage. The advantages are that the process gives pure ADN without potassium contaminants and that a smaller amount of solvent is necessary.

The present disclosure relates to ruthenium-based catalysts for ammonia (NH.sub.3) synthesis at mild conditions and methods of preparing the ruthenium-based catalysts. The ruthenium-based catalyst includes a MgFeO.sub.x support and ruthenium metal loaded onto the support, wherein the catalyst has the chemical formula of MgFeO.sub.xRu, wherein x is the number of oxygen atoms present. In an example, x is equal to four. The MgFeO.sub.x support is prepared from MgFe layered double hydroxide (LDH). An amount of ruthenium present in the ruthenium-based catalyst ranges from about 0.1 to about 1.0 wt %.

The present disclosure relates to ruthenium-based catalysts for ammonia (NH.sub.3) synthesis at mild conditions and methods of preparing the ruthenium-based catalysts. The ruthenium-based catalyst includes a MgFeO.sub.x support and ruthenium metal loaded onto the support, wherein the catalyst has the chemical formula of MgFeO.sub.xRu, wherein x is the number of oxygen atoms present. In an example, x is equal to four. The MgFeO.sub.x support is prepared from MgFe layered double hydroxide (LDH). An amount of ruthenium present in the ruthenium-based catalyst ranges from about 0.1 to about 1.0 wt %.

Systems and processes for gas phase-phase synthesis of trisilylamine. One system includes a reactor vessel having a top, bottom, and sidewall having an inner surface. The reactor vessel includes inlets for gaseous reactants, and a gas inlet for an inert gas. In certain reactors the gas inlets are positioned near the top of the reactor vessel and configured to inject the reactant gases in the reactor substantially vertically and downward therefrom. Other reactors are cyclonic-shaped with tangential feeding of the gases. One or more baffles having a peripheral edge and substantially horizontally positioned in the reactor to define a reaction zone above the baffles and a separation zone below the baffles. The baffles are positioned in the reactor vessel such that there is a gap between the baffle peripheral edge and the inner surface of the reactor vessel. Certain systems and processes include mechanical or static mixers.

Systems and processes for gas phase-phase synthesis of trisilylamine. One system includes a reactor vessel having a top, bottom, and sidewall having an inner surface. The reactor vessel includes inlets for gaseous reactants, and a gas inlet for an inert gas. In certain reactors the gas inlets are positioned near the top of the reactor vessel and configured to inject the reactant gases in the reactor substantially vertically and downward therefrom. Other reactors are cyclonic-shaped with tangential feeding of the gases. One or more baffles having a peripheral edge and substantially horizontally positioned in the reactor to define a reaction zone above the baffles and a separation zone below the baffles. The baffles are positioned in the reactor vessel such that there is a gap between the baffle peripheral edge and the inner surface of the reactor vessel. Certain systems and processes include mechanical or static mixers.

The present disclosure relates to the technical field of preparation of trisilylamine (TSA), in particular to a method for preparing TSA at an ultra-low temperature. The present disclosure provides a method for preparing TSA without a solvent at an ultra-low temperature, where by-products generated by a reaction can be easily removed by filtration with a metal ion-adsorption permeable membrane. The TSA obtained by the reaction has a gas chromatography (GC) purity of 99.5%, a receivable yield of not less than 85% (in terms of ammonia), and a metal ion purity of 6N. In addition, the method has a simple device, a high reaction degree of raw materials, a lower cost, a great market value, and a better industrial production benefit.