Patent classifications
C01B21/16
Method, system, and device for delivery of process gas
A method and chemical delivery system and device are provided. One method includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a gas stream comprising hydrazine to a critical process or application. One chemical delivery system and device includes a non-aqueous hydrazine solution having a vapor phase that is in contact with a carrier gas and/or vacuum. One device includes a chamber for containing a liquid comprising at least one volatile process chemical, such as a non-aqueous hydrazine solution, a hydrogen peroxide solution, or another suitable process chemical, and a head space from which the volatile can be drawn using a carrier gas and/or vacuum. Another method useful in the present invention involves drawing a process chemical from a device as a disclosed herein using a carrier or vacuum and delivering the process chemical to a critical process or application.
Method, system, and device for delivery of process gas
A method and chemical delivery system and device are provided. One method includes contacting a non-aqueous hydrazine solution with a carrier gas and/or vacuum and delivering a gas stream comprising hydrazine to a critical process or application. One chemical delivery system and device includes a non-aqueous hydrazine solution having a vapor phase that is in contact with a carrier gas and/or vacuum. One device includes a chamber for containing a liquid comprising at least one volatile process chemical, such as a non-aqueous hydrazine solution, a hydrogen peroxide solution, or another suitable process chemical, and a head space from which the volatile can be drawn using a carrier gas and/or vacuum. Another method useful in the present invention involves drawing a process chemical from a device as a disclosed herein using a carrier or vacuum and delivering the process chemical to a critical process or application.
METHODS UTILIZING ACTIVE QUANTUM CHEMISTRY
Described herein are methods of chemical reactions using active quantum chemistry. The methods are optimized and apply energies more directly and more efficiently, compared to conventional chemical reactions, in order to cause and/or promote chemical reactions.
METHODS UTILIZING ACTIVE QUANTUM CHEMISTRY
Described herein are methods of chemical reactions using active quantum chemistry. The methods are optimized and apply energies more directly and more efficiently, compared to conventional chemical reactions, in order to cause and/or promote chemical reactions.
REMOVAL OF MOISTURE FROM HYDRAZINE
The present invention generally relates to the field of gas and liquid phase desiccation. In particular, the present invention relates to methods for removing moisture (and hence oxygen precursors) from hydrazine, thereby providing a high purity source gas suitable for use in vapor deposition processes, such as but not limited to, chemical vapor deposition (CVD) or an atomic layer deposition (ALD).
REMOVAL OF MOISTURE FROM HYDRAZINE
The present invention generally relates to the field of gas and liquid phase desiccation. In particular, the present invention relates to methods for removing moisture (and hence oxygen precursors) from hydrazine, thereby providing a high purity source gas suitable for use in vapor deposition processes, such as but not limited to, chemical vapor deposition (CVD) or an atomic layer deposition (ALD).
Process for preparing hydrazine hydrate with pyrazoline recycling
The present invention relates to an improved process for preparing hydrazine hydrate from the azine of methyl ethyl ketone obtained from methyl ethyl ketone by oxidizing ammonia with hydrogen peroxide in the presence of an activator, characterized in that it comprises a step of recycling the pyrazoline-class heterocycles purge.
Process for preparing hydrazine hydrate with pyrazoline recycling
The present invention relates to an improved process for preparing hydrazine hydrate from the azine of methyl ethyl ketone obtained from methyl ethyl ketone by oxidizing ammonia with hydrogen peroxide in the presence of an activator, characterized in that it comprises a step of recycling the pyrazoline-class heterocycles purge.
Process for preparing hydrazine hydrate with oxime recycling
The present invention relates to an improved process for preparing hydrazine hydrate from the azine of methyl ethyl ketone obtained from methyl ethyl ketone by oxidizing ammonia with hydrogen peroxide in the presence of an activator, characterized in that it comprises a step of recycling the methyl ethyl ketone oxime purge.
Process for preparing hydrazine hydrate with oxime recycling
The present invention relates to an improved process for preparing hydrazine hydrate from the azine of methyl ethyl ketone obtained from methyl ethyl ketone by oxidizing ammonia with hydrogen peroxide in the presence of an activator, characterized in that it comprises a step of recycling the methyl ethyl ketone oxime purge.