Nanostructured photonic materials and associated components for use in devices and systems operating at ultraviolet (UV), extreme ultraviolet (EUV), and/or soft Xray wavelengths are described. Such a material may be fabricated with nanoscale features tailored for a selected wavelength range, such as at particular UV, EUV, or soft Xray wavelengths or wavelength ranges. Such a material may be used to make components such as mirrors, lenses or other optics, panels, lightsources, masks, photoresists, or other components for use in applications such as lithography, wafer patterning, biomedical applications, or other applications.

A method for making a solid carbon material comprises: delivering a liquid comprising at least one liquid organic compound into a reaction region of a reactor; delivering a gas comprising at least one gaseous organic compound into the reaction region of the reactor; and inducing a chemical reaction between the at least one liquid organic compound and the at least one gaseous organic compound, wherein: the chemical reaction occurs in the reaction region of the reactor; the solid carbon material is made via the reaction; the solid carbon material is made during the reaction in the form of a dispersion comprising the solid carbon material dispersed in the liquid; and the chemical reaction is a homogeneous reaction comprising homogeneous nucleation of the solid carbon material in the reaction region of the reactor.

A method for making a solid carbon material comprises: delivering a liquid comprising at least one liquid organic compound into a reaction region of a reactor; delivering a gas comprising at least one gaseous organic compound into the reaction region of the reactor; and inducing a chemical reaction between the at least one liquid organic compound and the at least one gaseous organic compound, wherein: the chemical reaction occurs in the reaction region of the reactor; the solid carbon material is made via the reaction; the solid carbon material is made during the reaction in the form of a dispersion comprising the solid carbon material dispersed in the liquid; and the chemical reaction is a homogeneous reaction comprising homogeneous nucleation of the solid carbon material in the reaction region of the reactor.

This application relates to a method for direct growth of multilayer graphene used as a core layer of a pellicle for extreme ultraviolet lithography. This application also relates to a method for manufacturing the pellicle for extreme ultraviolet lithography by using the multilayer graphene direct growth method. The multilayer graphene direct growth method may include forming few-layer graphene on a silicon nitride substrate, forming a metal catalyst layer on the few-layer graphene, and forming an amorphous carbon layer on the metal catalyst layer. The method may also include directly growing multilayer graphene from the few-layer graphene used as a seed layer by interlayer exchange between the metal catalyst layer and the amorphous carbon layer through heat treatment.

This application relates to a method for direct growth of multilayer graphene used as a core layer of a pellicle for extreme ultraviolet lithography. This application also relates to a method for manufacturing the pellicle for extreme ultraviolet lithography by using the multilayer graphene direct growth method. The multilayer graphene direct growth method may include forming few-layer graphene on a silicon nitride substrate, forming a metal catalyst layer on the few-layer graphene, and forming an amorphous carbon layer on the metal catalyst layer. The method may also include directly growing multilayer graphene from the few-layer graphene used as a seed layer by interlayer exchange between the metal catalyst layer and the amorphous carbon layer through heat treatment.

The present invention refers to a gas sensor comprising a hybrid material of perovskite and graphene, to the method for obtaining said sensor and to the gas detection method using said sensor.

The present invention refers to a gas sensor comprising a hybrid material of perovskite and graphene, to the method for obtaining said sensor and to the gas detection method using said sensor.

Provided herein are graphene biosensors and related core particles, compositions methods and systems in which more than one pristine graphene sheet is coated with a coating layer of an organic or inorganic material to provide a core graphene particle, to which detectable components comprising a detectable moiety and a peptide linkage are attached through binding of the peptide linkage.

A configuration of a time and space-resolved infrared spectroscopic analysis which can be integrated onto a chip is provided. An infrared analysis chip includes a substrate in which a microchannel is formed, at least one of a spectroscope and a photodetector integrated onto a first surface of the substrate in an area where the microchannel is formed, and an infrared light source integrated on a second surface opposite to the first surface of the substrate, the infrared light source being positioned facing said at least one of the photodetector and the spectroscope.

A graphene structure includes one or more graphene layers. The graphene layers allow for microwave squeezing with gains up to 24 dB over a wide bandwidth.